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SEMI E36-0704  1995, 2004 1 SEMI E36-0704 SEMICONDUCTOR EQUIPMENT M ANUFACTURING INFORMATION TAGGING SPECIFICATION This specificatio n was technically a pproved by the Global Information & C ontrol Comm ittee and is…

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SEMI E32.1-0997 © SEMI 1994, 1997 2
Parameter SECS-II Data Item
AtomicSpec List Structure
AttrData ATTRDATA
AttributeID ATTRID
CmdParameter List Structure
CmdParmName CPNAME
CmdParmValue CPVAL
EQName EQNAME
ErrorCode ERRCODE
ErrorText ERRTEXT
HOAck HOACK
HOCancelAck HOCANCELACK
HOCmdName HOCMDNAME
HOHaltAck HOHALTACK
HOStatus List Structure
ObjectID OBJID
ObjType OBJTYPE
Status List Structure
TRAck TRACK
TRAtomicID TRATOMICID
TRAutoStart TRAUTOSTART
TRCmdName TRCMDNAME
TRDirection TRDIR
TREventData List Structure (See S6,F11 in SEMI E5.)
TREventID CEID
TRJobID TRJOBID
TRJobMS TRJOBMS
TRJobName TRJOBNAME
TRLink TRLINK
TRLocation TRLOCATION
TRObjName TROBJNAME
TRObjType TROBJTYPE
TRPartner TRPTNR
TRPartnerPort TRPTPORT
TRPort TRPORT
TRRecipe TRRCP
TRRole TRROLE
TRStatus List Structure
TRType TRTYPE
4 Collection Event List
The following collection events must be available for
reporting from the equipment via S6,F11:
Committed To Transfer
Waiting for StartHandoff
Transfer Job Paused
Transfer Job Resumed
Atomic Transfer Started
Atomic Transfer Complete
Application Note — SECS-I Equipment-to-
Equipment Link
The direct SECS-I link between equipment poses a
small problem. That is, it is not clear which partner
should be the “SECS-I host” and which the “SECS-I
equipment.” As a general rule, if one partner is always
the primary transfer partner, it should be configured as
the SECS-I host. However, this is not a requirement,
since in some cases the choice of which is the primary
partner may depend upon the situation. Therefore,
where SECS-I is used to link the transfer partners, each
partner should be user-configurable as either “host” or
“equipment.”
NOTICE: These standards do not purport to addresxs
safety issues, if any, assosciated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicabliity of regulalatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E36-0704 1995, 2004
1
SEMI E36-0704
SEMICONDUCTOR EQUIPMENT MANUFACTURING INFORMATION
TAGGING SPECIFICATION
This specification was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on December 18, 1998. Initially available at www.semi.org
February 1999; to be published June 1999. Originally published 1995; previous published revision February
1998.
This document replaces SEMI E36-0298 in its entirety.
NOTICE: The designation of this standard was updated during the 0704 publishing cycle to reflect the creation of
SEMI E36.1.
NOTE: The Document Type Definitions, schemas, and
documentation defined in other parts of Semiconductor
Equipment Manufacturing Information Tagging may be
used freely without permission or payment of royalties
or other licensing charge, provided this source and/or its
associated specifications are cited.
1 Purpose
The purpose of Semiconductor Equipment
Manufacturing Information Tagging is to define a
markup philosophy, a markup framework, and an
information markup which is rich enough to facilitate:
• Electronic interchange and distribution of
information;
• Quality hardcopy printing and screen display of
information;
• Consistent high-precision online searching; and
• Reuse and repurposing of information for such
applications as integrating source material into
training material and online support applications.
The intent of this document is to create an information
interchange specification, not an authoring specification
or an electronic presentation specification.
Semiconductor Equipment Manufacturing Information
Tagging will define the markup necessary for
exchanging documents electronically, for facilitating
retrieval of information content, and for validating
information interchanges.
2 Scope
2.1 Information Scope - Semiconductor Equipment
Manufacturing Information Tagging is intended to
cover the types of technical and commercial
information typically needed to support the selection,
installation, use, and maintenance of semiconductor
manufacturing equipment.
The following list gives examples of information types
within scope; this list is not exhaustive.
• Operations Manuals/Guides — typically used by
equipment operators at customer sites to perform
the tasks for which the equipment was designed.
• Installation Manuals — typically used by supplier
and customer engineers to install the equipment at
the customer site.
• Maintenance Manuals — typically used by trained
maintenance technicians at customer sites to
perform repair and upkeep of equipment.
• Maintenance Schedules — typically used by site
coordinators and customer facility managers to
schedule and document normal preventive
maintenance.
• Spares/Parts Lists — typically used by on-site field
service engineers and customers to maintain a
sufficient stocking level to ensure prompt delivery
of parts.
• Repair/Troubleshooting Manuals — typically used
by equipment operators and qualified maintenance
technicians to identify and correct equipment
problems.
• Release Notes — typically used by operators,
technicians and system administrators to identify
changes in software configuration.
• Training Manuals — typically used by supplier
training personnel and customers to train operators
and maintenance technicians.
Additional information on potential use and re-use of
these information types in electronic form can be found
in the Auxiliary Information for this specification.
2.2 Content of SEMI E36 - Semiconductor Equipment
Manufacturing Information Tagging will be issued in
three parts:
• this base document,
SEMI E36-0704 1995, 2004
2
• associated information models such as SGML and
XML Document Type Definitions (DTDs) and
schema, and
• the documentation for these information models,
including at least a comprehensive Tag Library.
Semiconductor Equipment Manufacturing Information
Tagging does not include implementation advice,
suggestions, or notes on how to implement the models
described here. This material will be presented in the
form of Auxiliary Information associated with
Semiconductor Equipment Manufacturing Information
Tagging.
Semiconductor Equipment Manufacturing Information
Tagging by design does not include tutorials on SGML,
XML, how to use the defined elements or modules, or
how to create document content.
2.3 SGML and XML – Any documents marked up
according to Semiconductor Equipment Manufacturing
Information Tagging will be “valid” XML documents:
that is, “well-formed” XML documents that have an
associated document type declaration and that comply
with the constraints expressed therein. Since valid
XML documents are by definition type-valid SGML
documents, such documents will be valid SGML
documents as well.
Initially, information models will be maintained in both
XML and SGML, with all changes made in parallel.
SEMI will issue a dual set of models whenever a
change is made, and both will always be (within the
limits of their syntax) the same. Although parallel
maintenance is unfortunate, it is intended to make it
easier for members to create documents using current
SGML or XML tools. As Web-SGML
implementations and alternative XML schema syntax
become more common, modules may be maintained in
other syntactic forms.
2.4 Examples of SEMI Content Specifications - There
are other SEMI standards and specifications that
regulate the content of a document. Semiconductor
Equipment Manufacturing Information Tagging is
expressly not in conflict with any of them, since it
specifies only how to identify the content present in the
documents, and in some contexts, how to electronically
structure the content. Semiconductor Equipment
Manufacturing Information Tagging does not address
what information is to be included. Examples of SEMI
content-related or content guideline-related standards
and specifications can be seen in section 7.
3 Referenced Documents
Semiconductor Equipment Manufacturing Information
Tagging references the following information
standards, which should be referred to in their entirety
for full details:
3.1 ISO Standards
1
International Standard for SGML; ISO-8879-1986 as
modified by Amendment 1, of 1988
HyTime Standard ISO 10744 revision 2, which is
referenced for hypertext linking
3.2 Other references
2
The Extensible Markup Language (XML)V 1.0
Recommendation of the World Wide Web Consortium
(W3C)
The draft W3C specifications for Extensible Linking
Language (XLL).
4 Terminology
4.1 Attribute - An attribute is a markup construct that
resides within the start tag of an element to provide
additional information about the element. (Note: the
start tag is the tag that is placed directly before the
element in the datastream and determines where the
element begins.)
4.2 Conforming Authoring Application - A conforming
authoring application must be able to produce
conforming documents. There is no requirement that all
internal work in the application be performed in the
markup described by Semiconductor Equipment
Manufacturing Information Tagging, only that the end
product, exported for interchange, must be a
conforming document.
4.3 Conforming Document - A conforming document is
one that meets the markup rules and specific
information models defined in Semiconductor
Equipment Manufacturing Information Tagging for the
class of document. This specification comprises three
parts: this base document, a set of information models,
and the documentation for those models. A conforming
document must conform to all three parts.
A conforming document created by one application
must be interchangeable with a conforming application
without significant information loss.
NOTE: Explicit rendering instructions such as font
family and type size are not considered to be significant
information.
1
ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-
1211 Genevè 20, Switzerland. http://www.iso.ch
2
World Wide Web Consortium, Massachusetts Institute of
Technology Laboratory for Computer Science, 545 Technology
Square, Cambridge, MA 02139. http://www.w3.org