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SEMI E139-0705 © SEMI 2005 19 8.3.3.3 The u ser may limit the number of AntecedentData instances by setting the maxAntecedents attribute of th e PDE . This leaves only the m ost r ecent entries in each branch of Antecede…

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Attribute Name Definition Access Reqd Form
type Supplier assigned string used to differentiate the kinds of PDEs used on the
equipment. For example, the supplier might designate types such as “flow”,
“unit”, “image”, “inline-metrology”, etc.
RO N String
executable When = True, indicates that the PDE can serve as a Master PDE. RO Y Boolean
maxAntecedents The maximum number of AntecedentData records that may be kept in this
PDE. In the case of branching (where multiple antecedents for a PDE
existed), maxAntecedents is the maximum number of AntecedentData records
in any one path backwards through the antecedents. See the definition of the
AntecedentData class in ¶8.3.3. If zero, no Antecedents are kept.
RO Y Integer
createDate Date/time the PDE was created. RO Y Time
createNode Identifier (nodeID) of the RaPnode where the PDE was created. If the
creation location was not associated with a RaPnode, createNode shall contain
an identifier that uniquely identifies the creating entity within the factory.
RO Y String
author Name of the creator of the PDE. Note that a PDE can be “created”, but not
“modified”, since any modification results in a new PDE.
RO Y String
userInfo A list of strings that contain text entered by the user. However, neither the
Equipment nor PDEeditor are required to interpret or react to this information.
RO N list of String
supplierInfo A list of strings that contain text defined by the supplier. The supplierInfo
strings should provide information to the user that is not included in the
standard attributes.
RO N list of String
8.3.2.4 A gid is used to identify PDEs that are substitutable for one another. In addition to sharing the same
groupName and gid, the following shall be true for all PDEs in the same group:
They shall have the same set of PDEparameters.
The existence of PDEparameter default values shall be the same (the actual default values may differ).
Table 6 Navigable Associations for PDEheader
Type Description Associated Class Role Cardinality
Composition PDEheader may contain instances of AntecedentData to
document the predecessors of this PDE.
AntecedentData none 0..*
Composition PDEheader may contain references to other PDEs. ReferencedPDE none 0..*
Composition PDEheader may define PDEparameters to accept externally
supplied values to a PDE during run-time.
PDEparameter none 0..*
Composition PDEheader contains instances of ExecutionTarget that describe
the equipment or module that are permitted to execute this PDE.
If no ExecutionTargets are associated with the PDEheader, then
no restriction exists. The equipment implementation may restrict
the cardinality of this association to be at least one (that is, 1..*).
ExecutionTarget none 0..*
8.3.2.5 Multiple ExecutionTarget objects are defined when multiple sets of criteria are acceptable. For example,
two similar models of an equipment might be able to run the same recipe.
8.3.3 AntecedentData Class
8.3.3.1 The AntecedentData class documents the predecessors of the current PDE. When a PDE is created, if a
PDE is used as the basis for the new one, the older PDE’s relevant data is copied into the first AntecedentData
instance. Then the older PDEs AntecedentData is appended to that of the new PDE. This provides a
chronologically ordered sequence of AntecedentData instances. Since the antecedent PDEs may not be available at
a later time, some of their attributes are included in the AntecedentData class.
8.3.3.2 Note that portions of multiple PDEs may be used to create the new one. AntecedentData sequences may
branch as they move back in time.
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8.3.3.3 The user may limit the number of AntecedentData instances by setting the maxAntecedents attribute of the
PDE. This leaves only the most recent entries in each branch of AntecedentData. See Table 7 for more on
maxAntecedents.
Table 7 AntecedentData Class Attributes
Attribute Name Definition Access Reqd Form
uid Universally unique identifier of a PDE upon which the current PDE is based. RO Y UUID
name Value of the name attribute of the PDE identified by the uid above. RO Y String
gid Value of the gid attribute of the PDE identified by the uid above. RO Y UUID
groupName Value of the groupName attribute of the PDE identified by the uid above. RO Y String
description Value of the description attribute of the PDE identified by the uid above. RO Y String
author Value of the author attribute of the PDE identified by the uid above. RO Y String
createDate Value of the createDate attribute of the PDE identified by the uid above. RO Y Time
createNode Value of the createNode attribute of the PDE identified by the uid above. RO Y String
Table 8 Navigable Associations for AntecedentData
Type Description Associated Class Role Cardinality
Composition AntecedentData may contain AntecedentData. This represents
the sequence of precursor PDEs backwards through time.
AntecedentData none 0..*
8.3.4 ReferencedPDE Class
8.3.4.1 This class contains a reference to a PDE that is needed by the current PDE to complete its task. At any
point in the structure of a recipe, the set of ReferencedPDEs provides the identities of the PDEs at the next lower
level.
8.3.4.2 The value of the id attribute can be either a uid or gid. Since all UUID type values are universally unique,
there is no conflict. If the id contains a uid value, the reference is explicit and no further work is needed. If the id
contains a gid value, then it will be resolved to a uid at a later time (see ¶8.5.1.3 for more detail).
8.3.4.3 A PDE shall ensure that the PDEparameters of all of its ReferencedPDEs are satisfied, by either providing a
value or allowing the default to be used (if one exists).
Table 9 ReferencedPDE Class Attributes
Attribute Name Definition Access Reqd Form
id Identifier of the PDE being referenced. This attribute may contain the
value of the uid or of the gid of an appropriate PDE.
RO Y UUID
8.3.5 ExecutionTarget Class
8.3.5.1 ExecutionTarget describes the Process Module(s) on which this PDE can be executed. The supplier, make,
model, and recipeTypes attributes define the type of Process Module that can execute this PDE. Based on the
definition of these attributes, an ExecutionTarget may represent a general set of acceptable Process Modules. If the
identifier attribute is also be specified, the ExecutionTarget is limited to one specific unit. The PDEeditor shall
ensure that the ExecutionTarget definition shall describe only equipment that are able to execute this PDE.
8.3.5.2 A PDE’s ExecutionTarget instances should correspond to its scope of execution. A Master PDE’s scope
would typically be the equipment.
8.3.5.3 An equipment can contain multiple Process Modules that match ExecutionTarget definitions for a PDE. In
this case, the equipment, with possible guidance from the recipe, shall select which to use during processing.
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Table 10 ExecutionTarget Class Attributes
Attribute Name Definition Access Reqd Form
identifier Unique identifier of a specific Process Module on which this PDE can be
executed. If the identifier attribute is omitted, then any equipment that matches
the other attributes can execute this PDE.
RO N String
supplier Name of the equipment supplier. RO Y String
make Classification of equipment provided by the equipment supplier. It could
represent a product line, a division of the company or any other useful
classification of equipment.
RO Y String
model Finer grained classification of equipment provided by the equipment supplier. It
could represent a tool configuration targeted at some particular wafer process or
any other useful classification of equipment.
RO Y String
recipeTypes This is a classification field that allows identification of recipe compatibility
across multiple pieces of equipment. The supplier should define the recipeType
values that correspond to each Process Module.
Target equipment that support the same recipeType shall be capable of executing
a PDE of that type without fault.
While the recipeTypes attribute is not required by RaP, an Equipment may declare
it to be required and enforce the requirement in the PDEeditor.
RO N list of
String
8.3.6 PDEparameter Class
8.3.6.1 PDEparameters are inputs to a PDE that help determine how it will perform its task. PDEparameter input
values are supplied by the next higher level of the recipe hierarchy. For the Master PDE, they are supplied by the
equipment itself (as it executes the job/recipe). For all other PDEs, the PDEparameter values shall be supplied by
the referencing PDE.
8.3.6.2 The group of PDEs that make up a recipe are responsible for satisfying all the settings (or Module
Parameters) and any other conditions required to perform the defined activity. These Module Parameters can be set
by PDEs at any level in the hierarchy. The value of a PDEparameter may affect the eventual value of one or more
Module Parameters. The PDE may set the Module Parameters directly or it may set a PDEparameter that will
affect the value of a Module Parameter. In either case, the affected Module Parameters are considered
relatedParameters.
8.3.6.3 A PDE may set a Module Parameter to different values at different times during execution. In this case,
there may be multiple input PDEparameters that affect the same Module Parameter.
Table 11 PDEparameter Class Attributes
Attribute Name Definition Access Reqd Form
name Identifies the PDEparameter. It must be unique within the list of
PDEparameters of this PDE.
RO Y String
description Text description of the PDEparameter, its intended usage, and the
expected effect its settings will have on the activity.
RO Y String
units The units of the PDEparameter value to be supplied. RO Y String
relatedParameters The names of the Module Parameters affected by the setting of this
PDEparameter (if any).
RO N list of String
defaultValue Value to be used for this PDEparameter during execution if no external
input is provided.
RO N Any
inputBoundaryType Specifies the type of inputBounds defined for this PDEparameter.
Possible types are “List” and “Range”. If inputBounds are present, this
attribute shall also be included.
RO N Enumeration