semi合集-English.pdf - 第2183页
SEMI E54.16-0705 © SEMI 2005 28 9.2.2 The presentation of the Mass Flow Device – Sensor/Actuator Con troller (SAC) Object — is as defi ned by SEMI E54.1, CDM standard specification. There are no a dditional object instan…

SEMI E54.16-0705 © SEMI 2005 27
8.3 Following the LonMark Interoperability Guidelines during product design will allow easy product certification.
Application-specific functional profile(s) are available to download from the User Guides section to ease the
specification process. All questions about guidelines and certification should be directed to “cert@lonmark.org”.
Design assistance may be obtained by referencing “lm_confm.pdf”.
9 Specific Device Type Information
9.1 This section provides for the mapping of network-visible specific device model structure and behavior,
specified in a SEMI standard Specific Device Model specification, to the ANSI/EIA/CEA-709.1 (LONWORKS)
protocol. Each subsection is devoted to a single Specific Device Model specification. As additional SEMI SDM
specifications are created, additional SDM mappings are added as subsections to this NCS specification. Unless
otherwise noted, all attributes and services described are instance level attributes (as opposed to class level
attributes). Device-type-specific items, such as overrides to the standard connector, may also be noted in these
subsections.
9.1.1 Note that the formats of object instance attributes and services are detailed in the associated Specific Device
Model specification. The presentation of the attributes and services to a LONWORKS network is detailed in the tables
contained in the following sub-sections and in the LONMARK Application Layer Interoperability Guidelines
document. Note that relationships between object classes, including inheritance are defined in the associated SDM
specification and the CDM specification.
9.1.2 The instance identifier format of 1 through n, assigned to an object type, refers to the possibility of multiple
instantiations of the object type. Refer to Table 3 of this document and the CDM document for a further explanation
of object instance assignments.
9.2 Specific Device Model For Mass Flow Device — These sections detail the network mapping required to support
the Specific Device Model For Mass Flow Device (see reference SEMI E54.3 of §4.1). Table 29 summarizes the
Mass Flow Device object types. Subsequent Table 30 to Table 49 detail the instance attributes and services
associated with each Mass Flow Device object type.
Table 29 Mass Flow Device Object Types
SEMI SDM Object
Identifier
Object Name
LONMARK Profile
ID
LONMARK Functional Profile Name
MFD1 (DM) Device Manager 0
Node Object
MFD2 (SAC) Sensor/Actuator/Controller 0
Node Object
MFD3 Sensor-AI-MF 180.13
SFPTsemiSensorAIMF
MFD4 Sensor-AI-AT 180.12
SFPTsemiSensorAIAT
MFD5 Assembly-MFM 180.82
SFPTsemiAssemblyMFM
MFD6 Sensor-AI-Aux 180.14
SFPTsemiSensorSensorAIAux
MFD7 Actuator-AO-MF 180.32
SFPTsemiActuatorAOMF
MFD8 Controller 180.51
SFPTsemiController
MFD9 Local Link --
Turnaround Connection
#1
MFD10 SISO 180.71
SFPTsemiSISO
MFD11 SISO-Setpoint 180.72
SFPTsemiSISOSetpoint
MFD12 Assembly-MFC 180.83
SFPTsemiAssemblyMFC
#1
A turnaround connection is not a profile, but is a protocol-specific method of creating a link
9.2.1 The presentation of the Mass Flow Device - Device Manager(DM) Object — is as defined by SEMI E54.1,
CDM standard specification. There are no additional object instance attributes or services required by this SDM.

SEMI E54.16-0705 © SEMI 2005 28
9.2.2 The presentation of the Mass Flow Device – Sensor/Actuator Controller (SAC) Object — is as defined by
SEMI E54.1, CDM standard specification. There are no additional object instance attributes or services required by
this SDM.
9.2.3 Sensor-AI-MF — The presentation of the Sensor Analog Input Mass Flow (Sensor-AI-MF) object instance
attributes are as indicated in Table 30. The presentation of Sensor-AI-MF object services is indicated in Table 31.
Table 30 Sensor-AI-MF Object Instance Network Variables
Sensor-AI-MF
Profile ID = 180.13, Instance ID = 01 through r
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
128 Flow Totalizer NVO A1 SNVT_vol_f
129 Flow Hours NVO A2 SNVT_time_hour
130 Zero Offset Mode CP A5 SCPTzeroOffsetMode (*)
#1
131 Zeroing Status NVO A6 SNVT_zeroing_stat (*)
#1
132 Autorange Status NVO A7 SNVT_autorange_stat (*)
#1
#1
(*) LonMark interoperability extension. Refer to §6.8.3 for further definition.
Table 31 Sensor-AI-MF Object Instance Network Services
Sensor-AI-MF
Class ID = 180.13, Instance ID = 01 through r
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
129 Perform Zero Offset S1 Controller Object
RQ_ZERO_OFFSET (*)
#1
130 Query-Supported Gas Types S2 Controller Object
RQ_QUERY_GAS_TYPES (*)
#1
LONMARK file transfer –
Context Specific
131 Selected Programmed Gas Type S3 Controller Object
RQ_SELECT_GAS_TYPES (*)
#1
LONMARK file transfer –
Context Specific
132 Insert Gas Type S4 Controller Object
RQ_INSERT_GAS_TYPES (*)
#1
LONMARK file transfer –
Context Specific
133 Delete Gas Type S5 Controller Object
RQ_DELETE_GAS_TYPES (*)
#1
LONMARK file transfer –
Context Specific
134 Get Gas Calibration Data Value S6 Controller Object
RQ_GET_CAL_DATA (*)
#1
LONMARK file transfer –
Context Specific
135 Set Gas Calibration Data Value S7 Controller Object
RQ_SET_CAL_DATA (*)
#1
LONMARK file transfer –
Context Specific
136 Autorange S8 Controller Object
RQ_AUTORANGE (*)
#1
#1
(*) LonMark interoperability extension. Refer to §6.8.3 for further definition.
9.2.4 Service Requests Code — The service request is implemented as a network variable update containing a file
request to an nviSemiReq input to the Sensor-AI-MF Object functional block of a device. This input is defined by
the SNVT_semi_req type as follows:
typedef enum {
struct {
CMD_PERFORM_ZERO_OFFSET = 129,
CMD_QUERY_SUPPORTED_GAS_TYPES = 130,
CMD_SELECTED_PROGRAMMED_GAS = 131,

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CMD_INSERT_GAS_TYPE = 132,
CMD_DELETE_GAS_TYPE = 133,
CMD_GET_GAS_CALIBRATION_DATA_VALUE = 135,
CMD_SET_GAS_CALIBRATION_DATA_VALUE = 135,
CMD_AUTORANGE = 136,
} semi_request_t;
typedef struct {
unsigned int flblock_index;
semi_request_t service_code;
unsigned int parameter; // Optional parameter
} SNVT_semi_req;
9.2.5 Sensor-AI-AT — The presentation of the Sensor Analog Input Ambient Temperature (Sensor-AI-AT) object
instance attributes are as indicated in Table 32. The presentation of object services shall be indicated in Table 33.
Table 32 Sensor-AI-AT Object Instance Network Variables
Sensor-AI-AT
Profile ID = 180.12, Instance ID = 00 through r
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
-- No Additional Attributes Defined -- --
Table 33 Sensor-AI-AT Object Instance Network Services
Sensor-AI-AT
Profile ID = 180.12, Instance ID = 00 through r
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined --
9.2.6 Assembly-MFM — The presentation of the Assembly Mass Flow Meter (Assembly-MFM) object instance
attributes are as indicated in Table 34. The presentation of object services shall be indicated in Table 35.
Table 34 Assembly-MFM Object Instance Network Variables
Assembly-MFM
Class ID = 180.82, Instance ID = 00, 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
1 Data File A1 LonMark file transfer NVs and messaging
interface