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SEMI S2-0703a E © SEMI 1991, 2004 90 R14-9.2.3 During pre-ins pection, cont rol system commissioning pr otocols should be prepared . R14-9.2.4 If a safety analysis or safety case has been prepared for the specific in sta…

SEMI S2-0703a

R14-8.3.3 Fault Tolerant Equipment Control System With High Availability And Redundant Network — In Figures

R14-2 through R14-6, the FECS enters a safe-state condition if a failure should occur; however, the production

process would be interrupted. In order to increase the availability of the automation system and therefore avoid

process downtime resulting from control system faults as well as faults and errors of components such as the power

supply, the industrial controller, the network connection, and the I/O modules need to be made redundant. Possible

architectures (see Figure R14-7) for achieving high availability include 2 oo 2, 2 oo 3, 2 oo 4, etc. (see R14-Section

9). Using fail-to-safe and high availability systems, injury to people or environmental damage can be prevented and

the production process can be continued without interruption.

Figure R14-7

Fault-Tolerant Equipment Control System with High Availability FECS and Redundant Network

R14-9 Guide to Assessment and Test Methods

R14-9.1 Assessment and testing of an electronic system (especially programmable systems) for safety integrity

levels (SIL) according to IEC 61508/ANSI/ISA-84.01 or risk categories according to ISO 13849-1 (EN 954-1) is a

complex and time consuming task, requiring a considerable level of knowledge and expertise. The use of

components such as safety PLCs and safety networks, that are certified by third parties for use in systems, and

include specific SILs and risk categories, simplifies the process of assessing the whole system.

NOTE 9: Certified (or listed) components need to be certified for functional safety use in safety critical systems. The final

integrated system should be fully assessed; using tools such as IEC 61508/ANSI/ISA-84.01 or ISO 13849-1 (EN954-1).

Assessments can often simplified by using combinations of certified components or FECS.

R14-9.2 Commissioning and Site Approval — Commissioning and site approval as described in IEC 61508 may be

confusing and therefore the following criteria are necessary for understanding:

R14-9.2.1 Safety-related components should meet the safety requirements defined during the risk analysis.

NOTE 10: Use of Notified Bodies, ATLs or a Professional Engineer to perform system assessment, type approval/site

approval/commissioning of electronic components and for machinery with industrial controllers is defined by the jurisdiction of

use.

R14-9.2.2 During control system commissioning, all relevant documentation of the pre-inspection should be

available. A pre-inspection usually is the first phase of a control system commissioning.

SEMI S2-0703a

R14-9.2.3 During pre-inspection, control system

commissioning protocols should be prepared.

R14-9.2.4 If a safety analysis or safety case has been

prepared for the specific installation, all documents

regarding this activity should be made available.

R14-9.2.5 Whether a safety analysis or safety case has

been prepared or not, a directory of available

documents should be generated.

R14-9.2.5.1 This list should include the titles, dates

and number of pages of all documents.

R14-9.2.5.1.1 If possible, all documents should also be

available in electronic form.

R14-9.2.5.2 The documentation should include:

a. Safety Specification (if possible as formal

specification),

b. Top-level diagram of the application (1 or 2

pages),

c. Technical implementation (e.g. block, flow

and timing diagrams),

d. Explanation of separation between safety

critical and not safety critical parts of the

application,

e. Safety handbooks of the system components

(safety handbooks of the safety controllers,

sensors and actuators),

f. Description of interfaces,

g. Specification of all safety relevant program

parts,

h. I/O documentation,

i. Software program documentation,

j. Wiring documents,

k. Diagram and listing of the interaction

between input- and output-data (e.g. safety

matrix, cause-effect diagrams or comparable

documents),

l. Cross reference listing,

m. Source programs on storage medium, and

n. Description of the procedure to verify, that

the documentation, respectively the files on

the storage medium, are identical to the

programs in the application (upload verify,

CRC checksums, or comparable).

R14-10 Safety Performance

R14-10.1 For details on how to achieve the necessary

safety system requirements, see ISO 13849.

NOTE 11: An update of document IEC 62061 is currently

under preparation, and it should be consulted for further

details.

R14-11 Application Examples

R14-11.1 Safety is important in semiconductor

equipment (especially in the area of wafer fabrication)

where toxic media (e.g. gases or chemicals), high-speed

motion, or lasers may be present. The following are

examples of some wafer fabrication equipment which

could be adapted to a FECS:

a. CVD

b. Cleaning Equipment

c. CMP

d. Diffusion/Oxidation

e. Dry Etch Systems

f. Epitaxy

g. Ion Implantation

h. Lithography

i. Physical Vapor Deposition

j. Vacuum Deposition

k. Wet Etch Systems

R14-12 Related Documents

R14-12.1 DIN V VDE Standards

DIN V VDE 19250 — Control Technology; Functional

Safety Aspects to be Considered for Measurement and

Control Equipment

24 VDE-Verlag GmbH, Bismarkstrasse 33, 10625 Berlin, Germany,

www.vde.de

SEMI S2-0703a

RELATED INFORMATION 15

ADDITIONAL CONSIDERATIONS FOR FIRE SUPPRESSION SYSTEMS

NOTICE: This related information is not an official part of SEMI S2. It was derived from editorial work by the

Fire Protection Task Force. This related information was approved for publication by Technical Ballot and formal

adjudication as an Effective date line item on March 18, 2004.

R15-1 Introduction

R15-1.1 Preventing discharges from occurring

accidentally and ensuring that systems are able to fulfill

their intended function requires attention to detail from

the specification of the system, through design,

installation and commissioning and then through on-

going maintenance.

R15-1.2 The following information is intended to assist

stakeholders involved in the process of designing,

installing, and maintaining fire protection of

semiconductor manufacturing equipment. Further

information can be found in the appropriate fire

protection codes and standards applicable to the type of

fire protection system and in related documents.

NOTE 1: The term “fire suppression” is limited to

extinguishing fire, once it has begun. The term “fire

protection” incorporates fire suppression and other means of

mitigating the risk of fires, including fire detection and

materials selection.

R15-1.3 The use of contractors with previous

experience in the design and installation of fire

protection of cleanrooms and semiconductor

manufacturing equipment is desirable.

R15-1.4 Independent third party review of fire

protection designs and installations by a fire protection

engineer with relevant experience can also help to

ensure that systems are correctly designed and installed.

NOTE 2: The material in this Related Information is

presented as additional guidance in designing, installing, and

maintaining fire protection systems in semiconductor

manufacturing equipment. Although this information is

believed to be useful in optimizing such systems, the material

in this Related Information does not comprise additional

criteria for determining conformance to the provisions of

SEMI S2 or SEMI S14.

R15-2 Design Review

R15-2.1 Ensure that system proposed uses approved or

listed components and that they are used within their

listing or approval, e.g., FM Approved wet bench fire

suppression systems should be used for open-faced wet

bench whereas an enclosed tool can use a system

comprising of FM approved & compatible components.

R15-2.2 Detection needs to be selected to suit the

working environment and the type of fire/smoke that is

anticipated. For example, optical detectors need to

have been tested and approved/listed for use with

specific flammable liquids or gases. Flames and smoke

from burning materials have varying physical

characteristics which mean that some detection devices

will not always react promptly.

R15-2.3 The location of detection devices in relation to

hazards needs to be carefully considered. A detector

that is located too close to a heat source may activate

when it sees normal process conditions rather than fire

conditions.

R15-2.4 Some optical detectors may also be

susceptible to accidental activation if they are exposed

to welding flashes. Care in detector selection can avoid

this, but implementing strict cutting and welding

working practices and permissions can also play an

important part.

R15-3 Installation Review

R15-3.1 Once completed by the fire protection

installer, the fire protection installation should be

inspected and reviewed by a competent and

experienced fire protection engineer. This review will:

R15-3.1.1 Verify installation against previously

working drawings.

R15-3.1.2 Ensure that specified equipment has been

installed as indicated on the working drawings and in

line with equipment approvals and listings.

R15-3.2 Distribution pipework networks should be

complete (including all connections), properly

supported using listed and approved equipment.

Frequent failures of piped systems, including CO

systems, occur due to incorrectly connected pipes or

where fittings have not been made or sufficiently

tightened.

R15-3.3 Supports for pipework should be able to

withstand the expected forces that will be experienced

during discharge of the suppression system. This is

important to protect personnel and property from

moving pipes in high-pressure systems using agents

such as carbon dioxide.

R15-3.4 Detection systems should have components

installed as per reviewed drawings, however it is not

always possible during desktop drawing review to

identify that detectors are correctly sited. As a result,