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SEMI E52-0703 © SEMI 1995, 2003 3 Code Gas Name Symbol Formula Synonym Ref 32 Sulfur Dioxide SO2 SO 2 1 33 Methyl Fluoride CH3F CH 3 F Fluoromethane or Methane, Fluoro 1 34 Carbonyl Sulfide COS COS 1 35 Arsine AsH3 AsH 3…

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SEMI E52-0703 © SEMI 1995, 2003 2
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Definitions
5.1.1 formula — the structural representation of a gas, indicating the molecular groupings. Formulas are unique and
unambiguous except in the case of isomers.
5.1.2 gas code — an integer that is uniquely associated with a particular gas.
5.1.3 gas name — the accepted name for a gas as specified in Nomenclature of Organic Chemistry.
5.1.4 symbol — commonly accepted, unambiguous, and unique identification using ASCII characters with no
subscripts, superscripts, or parenthesis.
6 Gas Table Sorted by Code
Table 1 Gases Sorted by Code
Code Gas Name Symbol Formula Synonym Ref
1 Helium He He 1
2 Neon Ne Ne 1
3 Radon Rn Rn 2
4 Argon Ar Ar 1
5 Krypton Kr Kr 1
6 Xenon Xe Xe 1
7 Hydrogen H2 H
2
1
8 Air Air 1
9 Carbon Monoxide CO CO 1
10 Hydrogen Bromide HBr HBr 1
11 Hydrogen Chloride HCl HCl 1
12 Hydrogen Fluoride HF HF 1
13 Nitrogen N2 N
2
1
14 Deuterium D2 H
2
2
D2 2
15 Oxygen O2 O
2
1
16 Nitric Oxide NO NO 2
17 Hydrogen Iodide HI HI 1
18 Fluorine F2 F
2
1
19 Chlorine Cl2 Cl
2
1
20 Water Vapor H2O H
2
O 2
21 Bromine Br2 Br
2
2
22 Hydrogen Sulfide H2S H
2
S 1
23 Hydrogen Selenide H2Se H
2
Se 1
24 Hydrogen Cyanide HCN HCN 1
25 Carbon Dioxide CO2 CO
2
1
26 Nitrogen Dioxide NO2 NO
2
1
27 Nitrous Oxide N2O N
2
O 1
28 Methane CH4 CH
4
1
29 Ammonia NH3 NH
3
1
30 Ozone O3 O
3
1
31 Phosphine PH3 PH
3
1
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Code Gas Name Symbol Formula Synonym Ref
32 Sulfur Dioxide SO2 SO
2
1
33 Methyl Fluoride CH3F CH
3
F Fluoromethane or Methane,
Fluoro
1
34 Carbonyl Sulfide COS COS 1
35 Arsine AsH3 AsH
3
1
36 Methyl Chloride CH3Cl CH
3
Cl Chloromethane or Methane,
Chloro
1
37 Cyanogen Chloride ClCN ClCN 1
38 Ethylene C2H4 CH
2
=CH
2
Ethene 1
39 Silane SiH4 SiH
4
1
40 Carbon Disulfide CS2 CS
2
2
41 Oxygen Difluoride OF2 OF
2
1
42 Acetylene C2H2 HC=CH Ethyne 1
43 Germane GeH4 GeH
4
1
44 Methyl Bromide CH3Br CH
3
Br Bromomethane or Methane,
Bromo
1
45 Ethylene Oxide C2H4O C
2
H
4
O Acetaldehyde 1
46 Carbonyl Fluoride CF2O CF
2
O 1
47 Methyl Mercaptan CH4S CH
3
SH 1
48 Boron Trifluoride BF3 BF
3
1
49 Fluoroform CHF3 CHF
3
Trifluoromethane or Methane,
Trifluoro, F-23, R-23
1
50 Hydrazine N2H4 H
2
NNH
2
2
51 Vinyl Fluoride C2H3F H
2
C=CHF 1
52 Methylamine CH5N CH
3
NH
2
Amino Methane,
Monomethylamine
2
53 Nitrogen Trifluoride NF3 NF
3
1
54 Ethane C2H6 CH
3
CH
3
1
55 Vinyl Chloride C2H3Cl CH
2
=CHCl Chloroethylene 1
56 Vinyl Bromide C2H3Br CH
2
=CHBr 1
57 Chlorodifluoromethane CHClF2 CClHF
2
F-22, R-22 1
58 Diborane B2H6 B
2
H
6
1
59 Cyanogen C2N2 NCCN Oxalodinitrile 1
60 Phosgene CCl2O CCl
2
O Carbonyl Chloride 1
61 Cyclopropane C3H6 C
3
H
6
1
62 Phosphorus Trifluoride PF3 PF
3
1
63 Carbon Tetrafluoride CF4 CF
4
Tetrafluoromethane or Methane,
Tetrafluoro
1
64 Difluoroethylene C2H2F2 CH
2
=CF
2
G-1132A,Vinylidenefluoride 1
65 Dichlorofluoromethane CHCl2F CHCl
2
F F-21, R-21 1
66 Allene C3H4 CH
2
=C=CH
2
Propadiene 1
67 Dichlorosilane SiH2Cl2 SiH
2
Cl
2
1
68 Methyl Acetylene C3H4 CH
3
C=CH Propyne 1
69 Propylene C3H6 CH
3
CH=CH
2
Propene 1
70 Boron Trichloride BCl3 BCl
3
1
71 Chloroform CHCl3 CHCl
3
Trichloromethane or Methane,
Trichloro
2
SEMI E52-0703 © SEMI 1995, 2003 4
Code Gas Name Symbol Formula Synonym Ref
72 Perchloryl Fluoride ClO3F ClO
3
F 1
73 Dimethyl Ether C2H6O CH
3
OCH
3
Methylether 1
74 Chlorotrifluoromethane CClF3 ClCF
3
F-13, R-13 1
75 Ethyl Chloride C2H5Cl C
2
H
5
Cl Chloroethane or Ethane, Chloro
or Ethyl Chloride
1
76 Bromine Trifluoride BrF3 BrF
3
1
77 Chlorine Trifluoride ClF3 ClF
3
1
78 Nitrogen Trioxide N2O3 N
2
O
3
1
79 Boron Tribromide BBr3 BBr
3
1
80 Bromotrifluoromethane CBrF3 BrCF
3
F-13B1, R-13B1 1
81 Methyl Vinyl Ether C3H6O CH
3
OCH=CH
2
1
82 Difluoroethane C2H4F2 CH
3
CHF
2
Ethylidene Fluoride, R-152A 1
83 Tribromomethane CHBr3 CHBr
3
2
84 Dichlorodifluoromethane CCl2F2 CCl
2
F
2
F-12, R-12 1
85 Dimethylamine C2H7N (CH
3
)
2
NH 1
86 Sulfur Tetrafluoride SF4 SF
4
1
87 Sulfuryl Fluoride SO2F2 SO
2
F
2
1
88 Silicon Tetrafluoride SiF4 SiF
4
1
89 Propane C3H8 CH
3
CH
2
CH
3
1
90 Intentionally Left Blank
91 Trichlorofluoromethane CCl3F CCl
3
F F-11, R-11 1
92 Intentionally Left Blank
93 Ethyl Acetylene C4H6 CH
3
CH
2
C=CH 1
94 Tetrafluorethylene C2F4 F
2
C=CF
2
1
95 Nitrogen Tetroxide N2O4 N
2
O
4
Dinitrogenoxide 2
96 Arsenic Pentafluoride AsF5 AsF
5
2
97 Disilane Si2H6 Si
2
H
6
2
98 Transbutene C4H8 CH
3
CH=CHCH
3
2
99 Germanium Tetrafluoride GeF4 GeF
4
Tetrafluorogermane 2
100 Butadiene C4H6 CH
2
=C=CHCH
3
Methylallene 1
101 Carbon Tetrachloride CCl4 CCl
4
Tetrachloromethane or Methane,
Tetrachloro
2
102 Phosphorous Oxychloride POCl3 POCl
3
2
103 Difluorochloroethane C2H3ClF2 CF
2
ClCH
3
F-142B, R-142B 1
104 Butene C4H8 CH
3
CH
2
CH=CH
2
1-Butene 1
105 Bromotrifluoroethylene C2BrF3 CF
2
CFBr 1
106 Isobutene C4H8 (CH
3
)
2
C=CH
2
Isobutylene,Methylpropene 2
107 Cisbutene C4H8 CH
3
CH=CHCH
3
Cis-2-Butene 2
108 Silicon Tetrachloride SiCl4 SiCl
4
Tetrachlorosilane 2
109 Trimethylamine C3H9N (CH
3
)
3
N Methylamine 1
110 Sulfur Hexafluoride SF6 SF
6
1
111 Isobutane C4H10 (CH
3
)
2
CHCH
3
2-Methylpropane or Propane, 2-
Methyl
1
112 Trichloroethane C2H3Cl3 CH
3
CCl
3
TCA, Methylchloroform 2
113 Germanium Tetrachloride GeCl4 GeCl
4
Tetrachlorogermane 2
114 Titanium Tetrachloride TiCl4 TiCl
4
2