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SEMI MF1392-1103 © SEMI 2003 18 NOTE: Items marked with an asterisk (*) ar e required only for referee measurements. Figure R2-1 Example of Format for Capacita nce-Voltage Data and Calculations Using the Incremental Meth…

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SEMI MF1392-1103 © SEMI 2003 17
RELATED INFORMATION 2
SAMPLE DATA SHEETS
NOTICE: This related information is not an official part of SEMI MF1392. It was developed during the original
development of the document. This related information was approved for publication by full letter ballot on July 12,
2003.
R2-1.1 The following are examples of data sheet formats for manual collection and manual or off-line analysis of
C-V data. Figure R2-1 is for data to be analyzed by the Incremental Method and Figure R2-2 is for data to be
analyzed by the Curve-Fitting Method. The data listed must be stored in a format such that it can be retrieved if the
system employed performs the calculations internally.
SEMI MF1392-1103 © SEMI 2003 18
NOTE: Items marked with an asterisk (*) are required only for referee measurements.
Figure R2-1
Example of Format for Capacitance-Voltage Data and Calculations Using the Incremental Method
SEMI MF1392-1103 © SEMI 2003 19
NOTE: Items marked with an asterisk (*) are required only for referee measurements.
Figure R2-2
Example of Format for Capacitance-Voltage Data and Calculations Using the Curve-Fitting Method