semi合集-English.pdf - 第2491页
SEMI E87-0705 © SEMI 1999, 2005 60 R1-3.2 Bind and Notify BIND Erro r Has the l oadport been as sociated? Has the object been r egist ered? Create the car rier object Carrier ID Not Read Slot Map Not Read Not Processe d …

SEMI E87-0705 © SEMI 1999, 2005 59
Table R1-24 CarrierID Read Fail Scenario 3
# Comment Dir Message LTS LCAS CIDS CSMS
0 Initial condition. RTL
1 Carrier Arrives. E>H Transfer Blocked
2 ID read attempt fails. E>H ID read fail event
3 Decision to continue is made. H>E
NA (T) (T)
4 Host sends ProceedWithCarrier
service.
H>E
E>H
E>H
ProceedWithCarrier
State change to Id Verification OK
State change to Load Port Associated
TB
A IVO SNR
R1-2.25 CarrierID Read Fail Scenario 4
R1-2.25.1 Assumptions: Fixed buffer Equipment, Host based Verification.
R1-2.25.2 Indicated states: LTS = Load Port Transfer State, LCAS = Load Port/Carrier Association State, CIDS =
Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-25 CarrierID Read Fail Scenario 4
# Comment Dir Message LTS LCAS CIDS CSMS
0 Initial condition. RTL
1 Carrier Arrives. E>H Transfer Blocked
2 ID read attempt fails. E>H ID read fail event
3 Decision to stop is made. H>E
NA (T) (T)
4 Host sends CancelCarrier. H>E
E>H
E>H
CancelCarrier
State change to Id Verification Failed
State change to Load Port Associated
TB
A IVF SNR
R1-2.26 CarrierID Read Fail Scenario 5
R1-2.26.1 Assumptions: Fixed buffer Equipment, Host based Verification.
R1-2.26.2 Indicated states: LTS = Load Port Transfer State, LCAS = Load Port/Carrier Association State, CIDS =
Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-26 CarrierID Read Fail Scenario 5
# Comment Dir Message LTS LCAS CIDS CSMS
0 Initial condition. RTL
1 Carrier Arrives. E>H Transfer Blocked
2 ID read attempt fails. E>H ID read fail event
3 Decision to stop is made. H>E
4 Host sends CancelCarrierAtPort. H>E CancelCarrierAtPort
TB
NA (T) (T)
R1-3 Example Equipment Logic for Carrier Delivery
R1-3.1 To summarize the CMS carrier object behavior, following flow-charts are provided. The charts show the
example of an equipment logic for the CMS definitions.

SEMI E87-0705 © SEMI 1999, 2005 60
R1-3.2 Bind and Notify
BIND
Error
Has the loadport
been associated?
Has the object
been registered?
Create the carrier object
Carrier ID Not Read
Slot Map Not Read
Not Processed
Associate
Associate the object with
the loadport of carrier
delivered
YES
NO
YES
NO
NOTIFY
Error
Has the object
been registered?
Create the carrier object
Carrier ID Not Read
Slot Map Not Read
Not Processed
YES
NO
R1-3.2.1 Bind Service Request From the Host
R1-3.2.1.1 Verify no object has been associated with designated loadport. If it is associated the Bind service shall
be failed.
R1-3.2.1.2 Verify no object having the same ID specified in Bind service has been registered.
R1-3.2.1.2.1 If it is registered, the Bind service shall associate the object that is already registered with the
designated loadport.
R1-3.2.1.2.2 If it is not registered, then create the object and associate it to the loadport. The initial states of the
object are Carrier ID Not Read, Carrier Slot Map Not Read, Carrier Not Processed and Associated to the loadport.
R1-3.2.2 Notify service request from the host.
R1-3.2.2.1 Verify no object having the same ID specified in Notify service has been registered.
R1-3.2.2.1.1 If it is registered, the Notify service shall be failed.
R1-3.2.2.1.2 If it is not registered, then create the carrier object. The initial states of the object are Carrier ID Not
Read, Carrier Slot Map Not Read, Carrier Not Processed and Not Associated.

SEMI E87-0705 © SEMI 1999, 2005 61
R1-3.3 Carrier ID Read
ID READ
ID read successful?
READ FAIL EVENT
Report the event and wait
the host instruction.
YES
NO
ProceedWithCarrier ?
READ FAIL ON OBJECT
ID read failed on
associated object, then
Carrier ID Waiting Host
NO
VERIFICATION
YES
Create and Associate
the object
Carrier ID Verification OK
Slot Map Not Read
Associated
Carrier ID Verified
Carrier ID Verification OK
Slot Map Not Read
Associated
Has the port
been associated?
ProceedWithCarrier ?
CANCEL
CancelCarreri or
CancelCarrierAtPort
NO NO
YESYES
R1-3.3.1 Carrier ID Read Event
R1-3.3.1.1 If carrier ID has been read successfully then ID DETERMINATION (ID DET) is executed.
R1-3.3.1.2 If carrier ID has been failed to be read and the port is not associated with any object;
R1-3.3.1.2.1 Report the host the event to inform Carrier ID read fail when the loadport has no Bind.
R1-3.3.1.2.2 If the host requests ProceedWithCarrier service, then create the object and associate it with the
loadport. Carrier ID state shall be changed to Carrier ID Verification OK.
R1-3.3.1.2.3 If the host requests CancelCarrierservice, then create the object and associate it with the loadport.
Carrier ID state shall be changed to Carrier ID Verification Fail. Take the carrier to Ready to Unload.
R1-3.3.1.2.4 If the host requests CancelCarrierAtPort service, no objet is created. Take the carrier to Ready to
Unload.
R1-3.3.1.3 If carrier ID has been failed to be read and the port is associated with any object;
R1-3.3.1.3.1 Change the Carrier ID status of the associated object to Waiting for Host. The event shall be reported
to indicate carrier ID read for associated object has been failed.
R1-3.3.1.3.2 If the host requests ProceedWithCarrier service, then change the Carrie ID status of the associated
object to Carrier ID Verification OK.
R1-3.3.1.3.3 If the host requests CancelCarrier service, then change the Carrie ID status of the associated object to
Carrier ID Verification Fail. Take the carrier to Ready to Unload.