semi合集-English.pdf - 第1075页
SEMI E5-1104 © SEMI 1982, 2004 17 Name Format Description Values Where Used EAC 10 Equipment acknowledge code, 1 byte 0 = Acknowledge 1 = Denied. At least one constant does not exist 2 = Denied. Busy 3 = Denied. At least…
SEMI E5-1104 © SEMI 1982, 2004 16
Name Format Description Values Where Used
DATASEG 20 Used to identify the data
requested
S3F29, F31;
S18F5, F7
DATASRC 20 Object type for Data Source
Objects
S14F1, F3, F6,
F7, F8;
S17F1
DATLC 51 Data location
Location of invalid data,
represented in bytes, measured
from the start of the message in
question, excluding all header
bytes.
S12F19
DRACK 10 Define Report Acknowledge
Code, 1 byte
0 = Accept
1 = Denied. Insufficient space
2 = Denied. Invalid format
3 = Denied. At least one RPTID
already defined
4 = Denied. At least VID does
not exist
>4 = Other errors
5-63 Reserved
S2F34
DSID 20, 3(),
5()
Data set ID
S6F3, F8, F9
DSNAME 20 The name of the Data Set
The minimum length is zero. The
maximum is 200 characters.
S13F1, F2, F3,
F4,
S7F37, F39,
F41, F43;
S15F49, F51
DSPER 20 Data sample period. DSPER
has two allowable formats:
Format 1: hhmmss, 6 bytes
Format 2: hhmmsscc, 8 bytes
Where “hh” is hours, “mm” is
minutes, “ss” is seconds’ and
“cc” is centiseconds.
Equipment shall either (1)
support only Format 1, or (2)
support both Format 1 and Format
2. Equipment shall document
which formats it accepts.
Equipment which supports Format
2 need not necessarily support a
minimum DSPER of 1 centisecond,
nor a trace resolution of 1
centisecond, but equipment
suppliers shall document its
trace performance limits.
S2F23
DUTMS 20 Die Units of Measure
Use units description per SEMI
E5 Section 12.
S12F1, F4
DVNAME 3(), 20,
5()
Data value name
S6F3, F8
DVVAL 0, 10,
11, 20,
21, 3(),
4(), 5()
Data value
S6F3, F8, F9
SEMI E5-1104 © SEMI 1982, 2004 17
Name Format Description Values Where Used
EAC 10 Equipment acknowledge
code, 1 byte
0 = Acknowledge
1 = Denied. At least one
constant does not exist
2 = Denied. Busy
3 = Denied. At least one
constant out of range
>3 = Other equipment-specific
error
4-63 Reserved
S2F16
ECDEF 10, 11,
20, 21,
3(), 4(),
5()
Equipment constant default
value
S2F30
ECID 3(), 20,
5()
Equipment Constant ID
S2F13, F15,
F29, F30
ECMAX 10, 11,
20, 21,
3(), 4(),
5()
Equipment constant
maximum value
S2F30
ECMIN 10, 11,
20, 21,
3(), 4(),
5()
Equipment constant
minimum value
S2F30
ECNAME 20 Equipment constant name
S2F30
ECV 10, 11,
20, 21,
3(), 4(),
5()
Equipment Constant Value
S2F14, F15
EDID 10, 20,
3(), 5()
Expected data Identification
Three possible responses.
MEXP EDID EDID
S02F03, <SPID> A[6]
S03Fl3, <PTN> B[1]
S07F03, <PPID> A[80],
B[80]
S9F13
EMID 10, 20 Equivalent material ID (16
bytes maximum)
S3F9
EPD 10 Executive program data
S8F4
EQNAME 20 A unique ASCII equipment
identifier assigned by the
factory to the equipment.
Limited to a maximum of 80
characters.
S4F29
ERACK 10 Enable/Disable Event Report
Acknowledge Code, 1 byte
0 = Accepted
1 = Denied. At least one CEID
does not exist
>1 = Other Errors
2-63 Reserved
S2F38
ERRCODE 5() Code identifying an error
0 = No error
1 = Unknown object in Object
Specifier
2 = Unknown target object type
3 = Unknown object instance
4 = Unknown attribute name
5 = Read-only attribute -
access denied
6 = Unknown object type
7 = Invalid attribute value
8 = Syntax error
S1F20;
S3F16, F30,
F32;
S4F20, F22,
F23, F33, F35;
S5F14, F15,
F18;
S13F14, F16;
S14F2, F4, F6,
F8, F10, F12,
F14, F16, F18,
SEMI E5-1104 © SEMI 1982, 2004 18
Name Format Description Values Where Used
9 = Verification error
10 = Validation error
11 = Object identifier in use
12 = Parameters improperly
specified
13 = Insufficient parameters
specified
14 = Unsupported option
requested
15 = Busy
16 = Not available for
processing
17 = Command not valid for
current state
18 = No material altered
19 = Material partially
processed
20 = All material processed
21 = Recipe specification
related error
22 = Failed during processing
23 = Failed while not processing
24 = Failed due to lack of
material
25 = Job aborted
26 = Job stopped
27 = Job cancelled
28 = Cannot change selected
recipe
29 = Unknown event
30 = Duplicate report ID
31 = Unknown data report
32 = Data report not linked
33 = Unknown trace report
34 = Duplicate trace ID
35 = Too many data reports
36 = Sample period out of range
37 = Group size to large
38 = Recovery action currently
invalid
39 = Busy with another recovery
currently unable to perform the
recovery
40 = No active recovery action
41 = Exception recovery failed
42 = Exception recovery aborted
43 = Invalid table element
44 = Unknown table element
45 = Cannot delete predefined
46 = Invalid token
47 = Invalid parameter
48 = Load port does not exist
49 = Load port already in use
50 = Missing Carrier
51-63 = Reserved (data formats
51, 52, 54, or 50 must be used)
64-32767 = User defined (data
formats 52, 54, or 50 must be
used)
32768 = Action will be performed
at earliest opportunity
F26, F28;
S15F28, F18,
F20, F22, F24,
F26, F30, F32,
F34, F36, F38,
F40, F42, F44,
F48, F53;
S16F12, F14,
F16, F18, F24,
F26, F28;
S17F2, F4, F6,
F8, F10, F12,
F14