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SEMI E84-0305 © SEMI 1999, 2005 29 Production Equipment AGV/R GV OHT Controller Controller Controller p hoto p hoto* Passive Side Active Side Passive Side Active Side Active Internal Wir ing Active Internal Wir ing : Pho…

SEMI E84-0305 © SEMI 1999, 2005 28

the timing in which the active equipment will output the signal allowing the transfer interlock to be performed

accurately.

Table 7 Active Equipment Timer

Timer Name Period (Signal Status) to Monitor the Timer Range (SEC) TYP (SEC)

TA1 VALID ON - L_REQ ON

VALID ON - U_REQ ON

1–999 2

TA2 TR_REQ ON - READY ON 1–999 2

TA3 COMPT ON - READY OFF 1–999 2

The minimum timer value does not define the response time of the active equipment.

These timer values must be implemented for detecting timeouts and are not meant to specify the delay time between signals. The equipment

response time must be faster than the timeout of the timer.

Table 8 Passive Equipment Timer

Timer Name Period (Signal Status) to Monitor the Timer Range (SEC) TYP (SEC)

TP1 L_REQ ON - TR_REQ ON

U_REQ ON - TR_REQ ON

1–999 2

TP2 READY ON - BUSY ON 1–999 2

TP3 BUSY ON - CARRIER DETECT

BUSY ON - CARRIER REMOVE

1–999 60

TP4 U_REQ OFF - BUSY OFF

L_REQ OFF - BUSY OFF

1–999 60

TP5 READY OFF - VALID OFF 1–999 2

TP6 VALID OFF - VALID ON (Continuous handoff) 1–999 2

The minimum timer value does not define the response time of the passive equipment.

These timer values must be implemented for detecting timeouts and are not meant to specify the delay time between signals. The equipment

response time must be faster than the timeout of the timer.

Table 9 Delay Timer

Timer Name Period (Signal Status) to Monitor the Timer Range (SEC) TYP (SEC)

TD0 CS ON - VALID ON 0.1–0.2 0.1

TD1 VALID OFF - VALID ON 1–999 1

6.3.3 Error Recovery

6.3.3.1 Error recovery procedures are not defined in this specification. Recovery procedures may require operator

assistance and/or proprietary procedures specific to the equipment. It is recommended that the recovery procedure

(ex, abort interlock sequence and set to restart/complete) be provided on the active equipment and the passive

equipment.

6.4 Connector Type, Signal, and Pin Assignment

6.4.1 The connector type for the passive equipment side must be type DB-25 socket housing (female) as specified

in ISO 2110:1989. The connector will have female 4-40 threaded jack screw locks. Suitable 25 pin connectors

known as Type “D” are similar to Amphenol MIN RAC 17 series with jack screw locks. It is recommended that the

connector on the passive equipment should be appropriately labeled. As shown in Figure 30, this standard specifies

the connector on the passive side optical PI/O for floor based vehicles (RGV, AGV, others) (case 1), as well as the

active to passive connector between an overhead delivery system and production equipment (case 2). Figure 31

defines the PI/O point of interface for the interbay AMHS (OHS and stocker). If the OHS is the active device in the

interbay AMHS then the stocker is the passive device. Likewise, if the OHS is the passive device, then the stocker

is the active device.

SEMI E84-0305 © SEMI 1999, 2005 29

Production

Equipment

AGV/RGV

OHT

Controller

hoto

hoto*

Passive SideActive Side

Passive

Side

Active

Side

Active Internal

Wiring

Active Internal

Wiring

: Photo Coupled

PI/O Unit

: Connector A

specified by this standard

: Connector B

specified by this standard

: Other connector

not specified by this standard

example

implementation

case 1

case 2

Figure 30

Connector Locations

Stocker

Controller

Point of Interface

: Photo Coupled

PI/O Unit

: Connector A

specified by this standard

: Connector B

specified by this standard

: Other connector

not specified by this standard

Internal Wiring

OHS

Controller

hoto*

example

implementation

Case 3

Case 4

OTE

Connected with Case 3 or Case 4

Figure 31

Connector Location Schematic for Interbay AMHS (i.e., OHS and STOKER)

6.4.2 Power and signal specifications are as follows:

Table 10 Input/Output Specifications

On State Off State

Active/Passive

Current Voltage Current Voltage

Input Max. 10mA Max.1.8 Vdc

Max. 200A

Max. 30 Vdc

Output Min. 25mA Sink Max 1.8 Vdc

Max. 100A Source

Max. 30 Vdc

6.4.2.1 Power Supply Voltage: +24 Vdc Nominal (Min. +18 Vdc, Max. +30 Vdc) from no load to full load

(100mA).

6.4.2.2

For hardwired applications the power and power common of the passive must be isolated from the power

and power common of the active. Also, internally to either the active or passive equipment, the power and power

common must be isolated from the signal common.

6.4.3

Bit assignments are specified in Figure 34.

6.4.4 Connector pin assignments where required in ¶6.4.1 and Figures 30 and 31 are specified in Figures 35 and 36

and Table 11.

6.4.5 All configurations will include signal optoisolation within each equipment conforming to this standard to

allow for optical transmission or hardwired configuration to coexist. See Figures 32 and 33 below.

6.4.6

Timing diagram signal state of Off corresponds to no current flow for the hardwired configuration or no

optical signal transmitted for the optical transmitter configurations.

6.5

Interface Sensor Unit Size

6.5.1 The maximum dimensions in millimeters of the interface sensor are indicated in Figure 37. This size includes

volume needed for rigid portions of the sensor’s electrical connector and cable. For systems which are designed to

handle 300 mm wafer carriers, the interface sensor unit must be designed in a way that allows mounting of the unit

within the exclusion volume as defined per SEMI E15.1 with the optical axis centered in this exclusion volume.

ct i ve

Figure 32

Optoisolated Implementation Using an Optical Transmission Device