semi合集-English.pdf - 第1437页

SEMI 30.1-0200 © SEMI 1998, 2000 12 Transi- tion # Previ ous State Trigger New State Actions Comments 34 ACQUI RE ANOMALY DATA Anoma l y da ta has been acq uired for the rev iew, or no more anom al y data is availabl e. …

SEMI 30.1-0200 © SEMI 1998, 200011

Transi-

tion #

Previous State Trigger New State Actions Comments

20 PAUSING The equipment has

achieved a “safe state.”

PAUSED The equipment is waiting for a

command (PP-UPDATE,

RESUME, STOP, or

ABORT).

None

21 PROCESS

PAUSED

An alarm is set. ALARM

PAUSED

The equipment waits for all

alarms to be cleared or for a

STOP or ABORT command.

None

22 ALARM

PAUSED

All alarms are cleared. PAUSED The equipment is waiting for a

command (RESUME, PP-

UPDATE, STOP, or ABORT).

None

23 LOAD Material transfer to

processing location is

complete.

WORKING The substrate is being

processed.

None

24 WORKING The processing of the

specific material being

processed successfully

completed.

UNLOAD This material is transferred

from the processing location.

Normal completion of the

substrate.

25 UNLOAD The material unload is

complete.

LOAD The equipment returns to

LOAD and determines if

processing is complete, if not,

transfers the next substrate to

the processing location.

None

26 WORKING The processing of the

specific material being

processed abnormally

ended.

UNLOAD This material is transferred

from the processing location.

Error exit from WORKING.

Data may be invalid.

27 ALIGN The material alignment

is complete, and

inspection is required.

INSPECT The equipment determines if

another region needs to be

inspected.

This transition is to the

INSPECT SETUP Sub-State

of INSPECT.

28 INSPECT

SETUP

All inspect setup

activity is complete,

and the inspection is

not complete.

INSPECT

REGION

The equipment inspects the

current alignment region.

None

29 INSPECT

REGION

The region inspection

has ended.

INSPECT

SETUP

The equipment determines if

another region needs to be

inspected.

None

30 INSPECT

SETUP

Inspection of this

alignment group is

complete.

INSPECT

COMPLETE

The equipment determines if

(a) additional alignment areas

are required to do more

inspections, (b) the recipe on

this material is complete, or (c)

a review of the current

alignment area is required.

The next transition is

conditional.

31 INSPECT

COMPLETE

The inspection of this

alignment area ended,

and additional

inspections may be

required.

ALIGN An inspection group is

complete, and additional

inspections may be required.

None

32 ALIGN The material alignment

is complete, and

review is required.

REVIEW The material is reviewed. This transition is to the

REVIEW SETUP Sub-State of

REVIEW.

33 REVIEW

SETUP

Anomaly data is

needed to perform the

review.

ACQUIRE

ANOMALY

DATA

Anomaly data is being

acquired.

Anomaly data may come from

the host or equipment.

SEMI 30.1-0200 © SEMI 1998, 2000 12

Transi-

tion #

Previous State Trigger New State Actions Comments

34 ACQUIRE

ANOMALY

DATA

Anomaly data has

been acquired for the

review, or no more

anomaly data is

available.

REVIEW

SETUP

The equipment determines

what to do.

35 REVIEW

SETUP

The equipment has

anomaly data, and the

review is not complete.

ACQUIRE

ANOMALY

IMAGE

The equipment acquires the

anomaly image at the specified

site.

The image may be a stored

image or from an imaging

device.

36 ACQUIRE

ANOMALY

IMAGE

The equipment has

acquired the anomaly

image for the specified

site.

CLASSIFY The operator or equipment

classifies the anomaly.

None

37 CLASSIFY All anomalies have

been classified for the

site.

REVIEW

SETUP

The equipment determines

what to do.

None

38 REVIEW

SETUP

The review of the align

area is complete.

REVIEW

COMPLETE

Transition to next state is to be

determined.

None

39 REVIEW

COMPLETE

The review of this

alignment area ended,

and additional review

is required.

ALIGN A review group is complete,

and additional alignment is

required.

None

40 INSPECT The alignment area

inspection is complete,

and review is required.

REVIEW The material is reviewed. This transition is to the

REVIEW SETUP Sub-State of

REVIEW.

41 REVIEW

COMPLETE

The review is

complete, and

inspection is required.

INSPECT The material is inspected. This transition is to the

INSPECT SETUP Sub-State

of INSPECT.

42 CHECKING Validation of

requested process

program changes

failed.

PAUSED The equipment is waiting for a

new command.

No process program

parameters have been changed.

43 PAUSED The equipment

receives a PP-

UPDATE command.

CHECKING The equipment begins

validating requested changes

to the process program.

No process program

parameters are updated or

changed before “all” requested

changes are validated.

44 LOAD Previous process

program has

completed, and there

are additional process

programs assigned to

the “CARRIERBLD”.

See Section 13.

SETTING UP The equipment performs setup

according to specifications of

the next process program.

PROCESS-BLD-GROUP may

include an AUTOSTART

command within its body.

Otherwise, the equipment

waits for a START command.

8 Collection Event List

This section identifies data collection events and defines (Stream 6) reporting levels for variable items. The host can

use the report definition scenario defined in SEMI E30 to define reports at ISEM-defined levels. The intent of this

section is to ensure data is available at specific events and to optimize data reporting to the SECS-II host by

allowing data to be grouped at reporting levels.

8.1 Requirements

8.1.1 This standard requires all collection events listed in the SEMI E30 standard. This standard requires the ISEM

events in Table 2 for data collection (RunDataComplete, SubstrateDataComplete, GroupDataComplete,

RegionDataComplete, and AnomalyDataComplete). These events are separate from the processing state transitions.

These collection events shall occur before or on the processing state transition specified in Table 1. This was done to

ensure that the data and the material remain synchronous. As a result, in some cases material processing may be

delayed due to extended data processing time.

8.1.2 The most fundamental level of data defined for ISEM equipment is the anomaly level for review equipment

and region level for inspection equipment. For example, review equipment has data available for individual

anomalies at the AnomalyDataComplete event. Anomaly data may be grouped for level reporting. For example, data

for anomalies found within a region on a substrate would be available at the RegionDataComplete event. This data

would be available as a list variable item for Region Anomalies. All anomalies found on a substrate would be

available at the SubstrateDataComplete event. This could either be 1) a list of list variable items for Region

Anomaly, or 2) a single list variable item of all Substrate Anomalies. In this way, data can be reported with less

high-level event reports, rather than as more low-level event reports.

8.1.3 Data produced by ISEM equipment is customarily grouped for reporting by processing, material, and

equipment constraints which are called reporting levels (i.e., run, substrate, group, site, and anomaly data). Level

data is grouped by these constraints for a reporting level. Data shall be grouped within a reporting level according to

other constraints by degree of processing (e.g., raw sensor, basic, or analyzed data), or statistically (e.g., summary,

correlation, or comparison).

Table 2 Collection Events for ISEM Data Reporting

Reporting Level Data Collection Event Inspection Equipment Review Equipment

Run RunDataComplete

STOPPING → IDLE and LOAD →

SETTING UP

STOPPING → IDLE and LOAD →

SETTING UP

ProcessGroup ProcessBuildGroup-

Complete

LOAD → SETTING UP LOAD → SETTING UP

Substrate SubstrateDataComplete

UNLOAD → LOAD UNLOAD → LOAD

Group GroupDataComplete

INSPECT COMPLETE → ALIGN or

WORKING → UNLOAD

REVIEW COMPLETE → ALIGN or

WORKING → UNLOAD

Region RegionDataComplete

INSPECT REGION → INSPECT

SETUP

Not Defined

Anomaly AnomalyDataComplete Not Defined

CLASSIFY → REVIEW SETUP

NOTE 1: The data collection event shall occur before or on the processing state transition.

9 Variable Items

The purpose of this section is to define the list of variable item requirements for inspection and review equipment.

Values of these variables shall be available to the host via collection event reports and host status queries. These

variable items are separated into three categories: (a) common to all ISEM equipment; (b) specific to inspection

equipment; (c) and specific to review equipment.

If equipment supports the data item functionality defined by ISEM, then it is required and shall be implemented as

specified in Table 4 “Variable Item Dictionary”. That is, a variable item is only required if the equipment supports

the functionality necessary to support it. For example, if an inspection instrument only has the hardware to count

detected anomalies and lacks the hardware to determine their size, then the ISEM requires it to report anomaly count

(e.g., as SubstrateAnomalyCount), but reporting anomaly size (as AnomalySize) is not required by the ISEM.

9.1 Requirements

• All variable items and data item restrictions defined in SEMI E30 are required on ISEM equipment.

• All variable items in the ISEM Variable Item Dictionary for specific equipment classifications are required for

ISEM equipment. The data item restrictions are also required.

9.1.1 Variable items are categorized in the Variable Item Dictionary as follows:

• Common Variables (CV) — variables common to all ISEM equipment.

• Inspection-Specific Variables (ISV) — variables required only for inspection equipment.

• Review-Specific Variables (RSV) — variables required only for review equipment.