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SEMI F36-0299 (Reapproved 1104) GUIDE FOR DIMENSIONS AND CONNECTION S OF GAS DISTRIBUTION COMPONENTS This standard was technically approved b y the Global Gases Committee and is the direct r e sponsibility of the North A…

SEMI F35-0304 © SEMI 1998, 2004 7

17.6.1 When Tool-1, Tool-2, or Tool-3 demands gas,

the O

reading drops in proportion to the total flow of

gas in the lateral line. The higher flow rates act to dilute

the effects of the leak source and thus lower the O

reading at S

17.6.2 It is observed that when Tool-5 demands gas,

there is no change in the O

reading at S

. Therefore, it

is deduced that the leak source is located further out

along the lateral line.

17.6.3 When Tool-4 demands gas, it causes a more

significant drop in the O

reading at S

. Further, it is

observed that the time required for the analyzer to

respond after Tool-4 begins demanding gas correlates

to the time needed for the analyzer’s sample flow alone

to purge down the lateral line volume up to the

analyzer, when Tool-1, -2, and -3 are not demanding

gas.

17.6.4 This deductive inference technique pinpoints the

leak source to the Tool-4 lateral line.

17.6.5 After Tool-4 has stopped demanding gas (yet

before any other Tools on this lateral demand gas), the

reading at S

continues to drop gradually over

several minutes. It then gradually begins to elevate once

again. This indicates that the actual leak is not very

close to the connection of Tool-4 at the lateral line. It

suggests more that the leak source is closer to the tool

itself.

17.7 A final investigative sample point is selected

along the line leading to Tool-4. This is shown as S

Figure 2. It is observed that the O

readings drop to

0.2–0.5 ppb when Tool-4 demands gas. S

begins to

show an O

elevation after the Tool-4 stops demanding

gas. This concludes that the leak source is originating

from Tool-4 itself.

18 Related Documents

18.1 SEMI Standard

SEMI E49.8 — Guide For High Purity And Ultrahigh

Purity Gas Distribution Systems In Semiconductor

Manufacturing Equipment

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature

respecting any materials mentioned herein. These

standards are subject to change without notice.

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compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

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are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

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consent of SEMI.

SEMI F36-0299 (Reapproved 1104)

GUIDE FOR DIMENSIONS AND CONNECTIONS OF GAS

DISTRIBUTION COMPONENTS

This standard was technically approved by the Global Gases Committee and is the direct responsibility of the

North American Gases Committee. Current edition approved by the North American Regional Standards

Committee on July 11, 2004. Initially available at www.semi.org September 2004; to be published

November 2004. Originally published in 1993; last published February 1999.

1 Purpose

1.1 The purpose of this guide is standardization of

dimensional and mechanical/electrical connection

attributes for components used within gas distribution

systems. Standardization of these component interfaces

will allow for interchangeability of gas distribution

system components. Filters/purifiers, shut-off valves,

pressure regulators, MFC/MFMs, and pressure

transducers are the types of gas distribution components

that would benefit from being interchangeable.

2 Scope

2.1 This guide is for use with 1/4-inch distribution

systems at operating pressures no greater than 345 kPa

(50 psi).

2.2 The guide includes the following items:

2.2.1 Physical characteristics specific to each

component. These include a generalized drawing of the

component, specific end-to-end lengths for each type of

end connection, maximum envelope dimensions, base-

to-centerline dimensions, tolerances, and bottom

mounting information.

2.2.2 Electrical connections specific to each

component, where applicable. These include pin-outs

and types of connectors.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Limitations

3.1 This guide is not intended to dictate how to build a

gas distribution system, but to allow for

interchangeability of components.

3.2 This standard does not include recommendations

for sensor-bus compliant interfaces.

3.3 This standard does not apply to surface mount

components used in modular type gas systems.

4 Referenced Standards

4.1 None.

5 Terminology

5.1 Definitions

5.1.1 component



an individual piece or a complete

assembly of individual pieces capable of being joined

with other pieces or components.

5.1.2 filter  a porous device, generally constructed of

polymer, metal, or ceramics and housed in a metal

chamber, which traps particles, preventing them from

being transported downstream.

5.1.3 mass flow controller (MFC)  a self-contained

device (consisting of a transducer, control valve, and

control and signal-processing electronics) commonly

used in the semiconductor industry to measure and

regulate the mass flow of gas.

5.1.4 mass flow meter (MFM)  a self-contained

device, consisting of a mass flow transducer and signal-

processing electronics, commonly used in the

semiconductor industry to measure the mass flow of

gas.

5.1.5 pressure regulator  a valve designed to reduce

a high incoming pressure (for example, from a cylinder)

to a lower outlet pressure by automatically opening to

allow flow until a desired, preset pressure on the outlet

side is reached, then automatically throttling closed to

stop further pressure increase.

5.1.6 pressure transducer



a component which

mechanically or electrically senses gas pressure. It

typically consists of a sensor and signal-processing

electronics which enables remote indication of gas

pressure.

5.1.7 purifier  an in-line device used for the removal of homogeneous impurities from gases, typically consisting

of a packed-bed of active solids contained in a stainless steel housing. The active purification media may remove

impurities such as moisture, oxygen, CO, CO

, hydrocarbons, hydrogen, or nitrogen from specific gases using a

variety of chemical reaction, physisorption, or chemisorption mechanisms. Point-of-use purifiers often contain a

particle filter within the same housing.

5.1.8 valve  a device that controls the flow or pressure of a gas. Valve functions can include shutoff, metering,

backflow prevention, and pressure relief.

6 Ordering Information

6.1 Device manufacturers may use this guide when procuring processing equipment to communicate to the

equipment supplier the interface specifications required for interchangeability of components. This document may

also be used by semiconductor processing equipment suppliers to specify standardized interfaces to component and

module suppliers.

6.2 Orders for components in accordance with this standard shall include:

6.2.1 This standard number and date of issue.

6.2.2 Reference to the table number.

6.2.3 Reference to the option number, if applicable.

7 Filters and Purifiers

7.1 Filters less than 30 SLM and purifiers less than 1 SLM should conform to the interface design recommendations

appearing in Figure 1 and Table 1.

Figure 1

Filter and Purifier Interface Design