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HYDROGEN PEROXIDE SEMI C30 -1101 © SEMI 1 978, 2001 7 12 Grade 5 P rocedures NOTE 11: The analytical pr ocedures associated with th is standard are not intended to be the only acceptab le pro cedure or the best pr ocedur…

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SEMI C30-1101 © SEMI 1978, 2001 HYDROGEN PEROXIDE6
appropriate grade of 18.2 Mohm-cm water that meets
the criteria for Type E1.2 in ASTM D 5127.
11.2.2.2 1000 µg/mL TOC Standard (prepare fresh
weekly) — Weigh accurately 0.2128 g of potassium
acid phthalate into a 100 mL volumetric flask, add
water, shake to dissolve, dilute to volume, and mix
well. Lower standards (prepare fresh daily) can be
made by diluting an aliquot of the 1000 µg/mL to the
appropriate volume.
11.2.3 Analysis
11.2.3.1 Analyze TOC by directly injecting the 31%
H
2
O
2
into the total oxidizable carbon analyzer after the
instrument has been calibrated with 0, 5, 10, and 30
µg/mL of TOC standards.
11.3 Anions
11.3.1 The following method has given satisfactory
results in determining anion impurities at the values
specified for each of the following anions: chloride
(Cl), phosphate (PO
4
), nitrate (NO
3
), and sulfate (SO
4
).
Alternate methods may be used as long as validity is
demonstrated as defined in SEMI C1, Section 3.14
(Method Validation).
11.3.2 Special Reagents
11.3.2.1 Eluent — Prepare an eluent solution that is
100 mM potassium hydroxide (KOH) in deionized
water meeting the criteria for Type E1.2 in ASTM D
5127. Prepare second solution consisting of deionized
water only meeting the criteria for Type E1.2 in ASTM
D 5127. Store eluents under a helium gas blanket.
11.3.3 Sample Preparation
11.3.3.1 Prepare the following calibration standards by
spiking 31% H
2
O
2
with appropriate amounts of
individual anion standards: 0, 5, 15, 30 ppb.
11.3.4 Analysis
11.3.4.1 Gradient — Using the prepared eluent
solutions, design a gradient as follows, flow rate should
remain 2ml/min throughout analysis:
Pump Time (min) [mM KOH]
isocratic 0.0–2.5 1.0
isocratic 2.5–14 9.0
ramp 14–15 40.0
ramp 15–30 47.0
11.3.4.2 Columns — Precolumn should be AG15
(Dionex) or equivalent, separation column should be
AS15 (Dionex) or equivalent, concentrator column
should be TAC-LP1 (Dionex) or equivalent.
11.3.4.3 Load 5mL standard then 5mL deionized water
meeting the criteria for Type E1.2 in ASTM D 5127
onto concentrator column. Using the prepared solutions,
blanks, and prescribed eluent gradient analyze chloride,
nitrate, phosphate, and sulfate in neat 31% H
2
O
2
by ion
chromatography. Run a reagent blank. Samples and
reagent blanks should be prepared and analyzed in
triplicate.
11.4 Trace Metals Analysis
11.4.1 The following method has given satisfactory
results in determining metal ion impurities at the values
specified for each of the following metals: aluminum
(Al), antimony (Sb), arsenic (As), barium (Ba), boron
(B), cadmium (Cd), calcium (Ca), chromium (Cr),
copper (Cu), iron (Fe), lead (Pb), lithium (Li),
magnesium (Mg), manganese (Mn), nickel (Ni),
potassium (K), sodium (Na), tin (Sn), titanium (Ti),
vanadium (V), and zinc (Zn). Alternate methods may be
used as long as validity is demonstrated as defined in
SEMI C1, Section 3.14 (Method Validation).
11.4.2 Special Reagents
11.4.2.1 Nitric Acid, Ultra Pure — Use nitric acid
specified for low metal ion content.
11.4.2.2 1% Nitric Acid Solution — Dilute 10 mL of
ultrapure nitric acid to 1 L of water that meets the
criteria for Type E1.2 in ASTM D 5127.
11.4.2.3 Water — The water used for all of the
dilutions, calibrations, and standards should be the
appropriate grade of 18.2 Mohm-cm water meeting the
criteria for Type E1.2 in ASTM D 5127.
11.4.2.4 Indium Internal Standard — Make up the
indium internal standard solution to a concentration of
20 µg/mL (ppm) from the appropriate concentrated
indium standard solution.
11.4.3 Sample Preparation
11.4.3.1 In a clean environment, place 200 g of sample
into a tared FEP bottle and add 20 µL of the indium
internal standard.
11.4.4 Analysis
11.4.4.1 Using the prepared solutions and blanks,
analyze the aforementioned metals by GFAA and/or
inductively coupled plasma mass spectrometry (ICP-
MS). For calibration, the standards are made up with
the 1% nitric acid solution and the indium internal
standard such that the final concentration is 2 ng/g of
indium. Run a reagent blank.
HYDROGEN PEROXIDE SEMI C30-1101 © SEMI 1978, 20017
12 Grade 5 Procedures
NOTE 11: The analytical procedures associated with this
standard are not intended to be the only acceptable procedure
or the best procedure available. The published procedures
have been found to meet the required criteria for acceptance
of an analytical procedure. Alternate procedures may be used
if they meet the same criteria as the published procedures.
NOTE 12: Each laboratory is responsible for verifying the
validity of each method within its own operation.
12.1 Non-Metal Impurities
12.1.1 See Section 8, which contains procedures for the
following tests:
Assay
12.2 TOC
12.2.1 Equipment
12.2.1.1 TOC analyzer capable of analyzing total
oxidizable carbon in 31% H
2
O
2
. Validated
instrumentation includes TOC analyzer using a high
temperature platinum catalyst.
12.2.2 Special Reagents
12.2.2.1 Water — The water used for all of the
dilutions, calibrations, and standards should be the
appropriate grade of 18.2 Mohm-cm water that meets
the criteria for Type E1.2 in ASTM D 5127.
12.2.2.2 1000 µg/mL TOC Standard (prepare fresh
weekly) — Weigh accurately 0.2128 g of potassium
acid phthalate into a 100 mL volumetric flask, add
water, shake to dissolve, dilute to volume, and mix
well. Lower standards (prepare fresh daily) can be
made by diluting an aliquot of the 1000 µg/mL to the
appropriate volume.
12.2.3 Analysis
12.2.3.1 Analyze TOC by directly injecting the 31%
H
2
O
2
into the total oxidizable carbon analyzer after the
instrument has been calibrated with 0, 5, 10, and 30
µg/mL of TOC standards.
12.3 Anions
12.3.1 The following method has given satisfactory
results in determining anion impurities at the values
specified for each of the following anions: chloride
(Cl), phosphate (PO
4
), nitrate (NO
3
), and sulfate (SO
4
).
Alternate methods may be used as long as validity is
demonstrated as defined in SEMI C1, Section 3.14
(Method Validation).
12.3.2 Special Reagents
12.3.2.1 Eluent — Prepare an eluent solution that is
100 mM potassium hydroxide (KOH) in deionized
water meeting the criteria for Type E1.2 in ASTM D
5127. Prepare second solution consisting of deionized
water only meeting the criteria for Type E1.2 in ASTM
D 5127. Store eluents under a helium gas blanket.
12.3.3 Sample Preparation
12.3.3.1 Prepare the following calibration standards by
spiking 31% H
2
O
2
with appropriate amounts of
individual anion standards: 0, 5, 15, 30 ppb.
12.3.4 Analysis
12.3.4.1 Gradient — Using the prepared eluent
solutions, design a gradient as follows, flow rate should
remain 2mL/min throughout analysis:
Pump Time (min) [mM KOH]
isocratic 0.0–2.5 1.0
isocratic 2.5–14 9.0
ramp 14–15 40.0
ramp 15–30 47.0
12.3.4.2 Columns — Precolumn should be AG15
(Dionex) or equivalent, separation column should be
AS15 (Dionex) or equivalent, concentrator column
should be TAC-LP1 (Dionex) or equivalent.
12.3.4.3 Load 5mL standard then 5mL deionized water
meeting the criteria for Type E1.2 in ASTM D 5127
onto concentrator column. Using the prepared solutions,
blanks, and prescribed eluent gradient analyze chloride,
nitrate, phosphate, and sulfate in neat 31% H
2
O
2
by ion
chromatography. Run a reagent blank. Samples and
reagent blanks should be prepared and analyzed in
triplicate.
12.4 Trace Metals Analysis
12.4.1 The following method has given satisfactory
results in determining metal ion impurities at the values
specified for each of the following metals: aluminum
(Al), antimony (Sb), arsenic (As), barium (Ba), boron
(B), cadmium (Cd), calcium (Ca), chromium (Cr),
copper (Cu), iron (Fe), lead (Pb), lithium (Li),
magnesium (Mg), manganese (Mn), nickel (Ni),
potassium (K), sodium (Na), tin (Sn), titanium (Ti),
vanadium (V), and zinc (Zn). Alternate methods may be
used as long as validity is demonstrated as defined in
SEMI C1, Specifications for Reagents; Section 3.14,
Method Validation.
12.4.2 Special Reagents
12.4.2.1 Nitric Acid, Ultra Pure — Use nitric acid
specified for low metal ion content.
12.4.2.2 1% Nitric Acid Solution — Dilute 10 mL of
ultrapure nitric acid to 1 L of water meeting the criteria
for Type E1.2 in ASTM D 5127.
SEMI C30-1101 © SEMI 1978, 2001 HYDROGEN PEROXIDE8
12.4.2.3 Water — The water used for all of the
dilutions, calibrations, and standards should be the
appropriate grade of 18.2 Mohm-cm water that meets
the criteria for Type E1.2 in ASTM D 5127.
12.4.2.4 Indium Internal Standard — Make up the
indium internal standard solution to a concentration of
20 µg/mL (ppm) from the appropriate concentrated
indium standard solution.
12.4.3 Sample Preparation
12.4.3.1 In a clean environment, place 200 g of sample
into a tared FEP bottle and add 20 µL of the indium
internal standard.
12.4.4 Analysis
12.4.4.1 Using the prepared solutions and blanks,
analyze the aforementioned metals by GFAA and/or
inductively coupled plasma mass spectrometry (ICP-
MS). For calibration, the standards are made up with
the 1% nitric acid solution and the indium internal
standard such that the final concentration is 2 ng/g of
indium. Run a reagent blank.
13 VLSI Grade Procedures
13.1 Specific procedures for this grade do not exist.
Refer to Sections 8 and 9 for available procedures.
14 Tier A Procedures
14.1 This section does not apply to this chemical.
15 Tier B Procedures
15.1 This section does not apply to this chemical.
16 Tier C Procedures
16.1 This section does not apply to this chemical.
17 Tier D Procedures
17.1 This section does not apply to this chemical.
Table 1 Impurity Limits and Other Requirements for Hydrogen Peroxide
Previous SEMI Reference # C1.9-96 C7.5-95 C8.5-0298 -- -- C11.4-94
Grade 1 Grade 2 Grade 3 Grade 4 Grade 5 VLSI Grade
(Specification) (Specification) (Specification) (Specification) (Specification) (Guideline)
Assay (H
2
O
2
) 30.0–32.0% 30.0–32.0% 30.0–32.0% 30.0–32.0% 30.0–32.0% 30.0–32.0% or
34.0–36.0%
Color (APHA) 10 max 10 max 10 max -- -- 10 max
Residue after Evaporation -- -- -- -- -- 20 ppm max
Chloride (Cl) 2 ppm max 200 ppb max 200 ppb max 30 ppb max 30 ppb max 0.5 ppm max
Nitrate (NO
3
) -- 400 ppb max 400 ppb max 30 ppb max 30 ppb max --
Phosphate (PO
4
) 2 ppm max 200 ppb max 200 ppb max 30 ppb max 30 ppb max 1 ppm max
Sulfate (SO
4
) 5 ppm max 200 ppb max 200 ppb max 30 ppb max 30 ppb max 1 ppm max
Total Nitrogen (N) -- -- -- -- -- 2 ppm max
Total Organic Carbon (TOC) 20 ppm max 20,000 ppb
max
20 ppm max -- -- --
Total Oxidizable Carbon
(TOC)
-- -- -- 10 ppm max 10 ppm max --
Free Acid
0.6 µeq/g max
0.6 µeq/g max 0.6 µeq/g max -- -- 0.6 µeq/g max
Aluminum (Al) 1 ppm max 10 ppb max 1 ppb max 100 ppt max 10 ppt max 0.2 ppm max
Ammonium (NH
4
) -- -- -- -- -- 2 ppm max
Antimony (Sb) -- 5 ppb max 1 ppb max 100 ppt max 10 ppt max --
Arsenic (As) -- 5 ppb max 1 ppb max 100 ppt max 10 ppt max --
Arsenic and Antimony (as
As)
0.01 ppm max -- -- -- -- 0.01 ppm max
Barium (Ba) -- 10 ppb max -- 100 ppt max 10 ppt max 0.05 ppm max
Beryllium (Be) -- 10 ppb max -- -- -- 0.01 ppm max
Bismuth (Bi) -- 10 ppb max -- -- -- 0.02 ppm max
Boron (B) 0.1 ppm max 10 ppb max 1 ppb max 100 ppt max 10 ppt max 0.02 ppm max
Cadmium (Cd) -- 10 ppb max 1 ppb max 100 ppt max 10 ppt max 0.01 ppm max
Calcium (Ca) 0.2 ppm max 10 ppb max 1 ppb max 100 ppt max 10 ppt max 0.05 ppm max