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SEMI E94.1-1101 © SEMI 2001, 2004 2 Table 1 Services Message Mapp ing Table Service Name Stream, Function SECS-II Message Name Create Object S14,F9/10 Create Object Request/Ac knowledge (SEMI E39 .1) CJAbort S16,F27/28 C…

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SEMI E94.1-1104 © SEMI 2001, 2004 1
SEMI E94.1-1104
SPECIFICATION FOR SECS-II PROTOCOL FOR CONTROL JOB
MANAGEMENT (CJM)
This specification was technically approved by the Global Silicon Wafer Committee and is the direct
responsibility of the North American Silicon Wafer Committee. Current edition approved by the North
American Regional Standards Committee on August 16, 2004. Initially available at www.semi.org
September 2004, to be published November 2004. Previously published November 2001.
1 Purpose
1.1 This document maps the services and data of SEMI
E94 to SECS-II streams and functions and data
definitions.
2 Scope
2.1 This is a specification covering equipment
supporting automated control job management.
2.2 This document applies to all implementations of
SEMI E94 that use the SECS-II message protocol
(SEMI E5). Compliance to this standard requires
compliance to both SEMI E94 and SEMI E5.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Limitations
3.1 This specification applies to semiconductor
equipment that also uses SEMI E40 Process Jobs.
4 Referenced Standards
4.1 SEMI Standards
SEMI E5 SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
SEMI E30 Generic Model for Communications and
Control of Manufacturing Equipment (GEM)
SEMI E39.1 SECS-II Protocol for Object Services
Standard (OSS)
SEMI E40 Standard for Processing Management
(PJM)
SEMI E53 Event Reporting (ER)
SEMI E94 Specification for Control Job
Management (CJM)
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
5 Terminology
5.1 None.
6 Mapping
6.1 This section shows the specific SECS-II streams
and functions that shall be used for SECS-II
implementation of the services defined in SEMI E94, as
well as the parameter mapping for data attached to
services.
6.2 Message Mapping
6.2.1 Services Message Mapping
6.2.1.1 Table 1 defines the relationships between SEMI
E94 services and SECS-II messages.
SEMI E94.1-1101 © SEMI 2001, 2004 2
Table 1 Services Message Mapping Table
Service Name Stream, Function SECS-II Message Name
Create Object S14,F9/10 Create Object Request/Acknowledge (SEMI E39.1)
CJAbort S16,F27/28 Control Job Command Request/Acknowledge
CJCancel S16,F27/28 Control Job Command Request/Acknowledge
CJDeselect S16,F27/28 Control Job Command Request/Acknowledge
CJHOQ S16,F27/28 Control Job Command Request/Acknowledge
CJPause S16,F27/28 Control Job Command Request/Acknowledge
CJResume S16,F27/28 Control Job Command Request/Acknowledge
CJStart S16,F27/28 Control Job Command Request/Acknowledge
CJStop S16,F27/28 Control Job Command Request/Acknowledge
6.2.2 Event Message Mapping
6.2.2.1 Table 2 defines the relationships between SEMI E94 collection events and SECS-II messages.
Table 2 Event Message Mapping Table
Event Name Stream, Function SECS-II Message Name
All state model transitions If SEMI E30 style events:
S6,F11/12
If SEMI E53 style events:
S6,F11/12
S6,F13/14
If SEMI E30 style events:
Event Report Send/Acknowledge
If SEM E53 style events:
Event Report Send/Acknowledge
Annotated Event Report Send/Ack
6.2.3 Parameter Mapping
6.2.3.1 Table 3 defines the relationships between SEMI E94 service parameters and SECS-II data definitions.
Table 3 Parameter to SECS-II Data Items Mapping
Parameter Name Range SECS-II Data Item
ACKcode TRUE, FALSE ACKA
Action SAVEJOBS, REMOVEJOBS CPVAL (U1)
0 = SAVEJOBS. This
command does not destroy the
Process Jobs
specified by this Control Job.
1 = REMOVEJOBS. This
command destroys all Process
Jobs specified by
this Control Job.
CtrlJobID 1–80 characters (Conforms to ObjID in SEMI E39.1,
Section 6.)
OBJID
ErrorCode Enumerated ERRCODE
ErrorInfo Error L,2
1. ErrorCode
2. ErrorText
ErrorText 1–80 characters ERRTEXT
Status Acknowledgement and error L,2
1. ACKcode
2. ErrorInfo
SEMI E94.1-1104 © SEMI 2001, 2004 3
6.2.4 SECS-II Data Items without Corresponding SEMI E94 Parameters
6.2.4.1 Table 4 contains the SECS-II data items that do not correspond to SEMI E94’s service parameter.
Table 4 Additional Data Item Requirements Table
Function SECS-II Data Item
Used to identify control job commands. CTLJOBCMD
Used to satisfy SECS-II conventions for linking a multi block inquiry with
subsequent multi block message.
DATAID
6.2.5 Variable Data Item Mapping
6.2.5.1 Table 5 shows the specific SECS-II data classes, and formats needed for SECS-II implementations of SEMI
E94 variable data items.
Table 5 Variable Data Item Mapping
Variable Name Class Format
CtrlJobID DVVAL <OBJID>
QueueAvailableSpace SV 5() (U1, U2, U4, U8)
QueuedCJobs SV L,n n = number of queued control jobs
1. <CtrlJobID
1
>
…
n. <CtrlJobID
n
>
SetUpName ECV 20 (A[1..80])
Zero length string is used by the equipment to indicate “unknown”.
7 SECS-II Attribute Definitions
7.1 ControlJob Object SECS-II Attributes Definitions
7.1.1 The following are the SECS-II structure definitions for the E94 ControlJob Object.
Table 6 ControlJob Object Attribute Definitions
Attribute Name Attribute Data Form: SECS-II Structure
“ObjType” 20 (A) “ControlJob”
“ObjID” <OBJID> CtrlJobID (Conforms to the restrictions of ObjID as specified in SEMI
E39.1, Section 6.)
“CarrierInputSpec” L,n n = number of input carriers
1. <CARRIERID
1
>
…
n. <CARRIERID
n
>
“CurrentPRJob” L,n n = number of process jobs
1. <PRJOBID
1
>
…
n. <PRJOBID
n
>
“DataCollectionPlan” 20 (A) DataCollectionPlan