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PHOSPHORUS OXYCHLORIDE SEM I C38-0699 © SEMI 1991, 19 99 1 SEMI C38-0699 GUIDELINE FOR PHOSPHORUS OXYCHLORIDE This guideline wa s technically approved by the Global Process Che micals Committee and is the direct responsi…

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SEMI C37-0699 © SEMI 1981, 1999 4
11 Grade 3 Procedures
11.1 This section does not apply to this chemical.
12 Grade 4 Procedures
12.1 This section does not apply to this chemical.
13 Grade 5 Procedures
13.1 This section does not apply to this chemical.
14 VLSI Grade Procedures
14.1 This section does not apply to this chemical.
15 Tier A Procedures
15.1 This section does not apply to this chemical.
16 Tier B Procedures
16.1 This section does not apply to this chemical.
17 Tier C Procedures
17.1 This section does not apply to this chemical.
18 Tier D Procedures
18.1 This section does not apply to this chemical.
Table 1 Impurity Limits and Other Requirements for Phosphoric Etchants
Previous SEMI Reference # C2.3-95
Grade 1
(Specification)
Heavy Metals (as Pb) 5 ppm max
Antimony (Sb) 15 ppm max
Arsenic (As) 0.2 ppm max
Calcium (Ca) 15 ppm max
Copper (Cu) 1.2 ppm max
Iron (Fe) 6 ppm max
Lithium (Li) 0.3 ppm max
Magnesium (Mg) 2 ppm max
Manganese (Mn) 0.2 ppm max
Nickel (Ni) 1 ppm max
Potassium (K) 6 ppm max
Sodium (Na) 10 ppm max
Strontium (Sr) 2 ppm max
Particles in bottles:
size, #/mL
≥1.0 µm, 25 max
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
PHOSPHORUS OXYCHLORIDE SEMI C38-0699 © SEMI 1991, 19991
SEMI C38-0699
GUIDELINE FOR PHOSPHORUS OXYCHLORIDE
This guideline was technically approved by the Global Process Chemicals Committee and is the direct
responsibility of the North American Process Chemicals Committee. Current edition approved by the North
American Regional Standards Committee on April 23, 1999. Initially available on SEMI OnLine May 1999;
to be published June 1999. This document replaces SEMI C7.12 in its entirety. Originally published in
1991.
1 Purpose
1.1 The purpose of this document is to standardize
requirements for phosphorus oxychloride used in the
semiconductor industry and testing procedures to
support those standards. Test methods have been shown
to give statistically valid results. This document also
provides guidelines for grades of phosphorus
oxychloride for which a need has been identified. In the
case of the guidelines, the test methods may not have
been statistically validated yet.
2 Scope
2.1 The scope of this document is all grades of
phosphorus oxychloride used in the semiconductor
industry.
3 Limitations
3.1 None.
4 Referenced Documents
4.1 None.
5 Terminology
5.1 None.
6 Physical Property (for information only)
6.1 Not applicable.
7 Requirements
7.1 The requirements for phosphorus oxychloride for
Tier A are listed in Table 1.
8 Grade 1 Procedures
8.1 This section does not apply to this chemical.
9 Grade 2 Procedures
9.1 This section does not apply to this chemical.
10 Grade 3 Procedures
10.1 This section does not apply to this chemical.
11 Grade 4 Procedures
11.1 This section does not apply to this chemical.
12 Grade 5 Procedures
12.1 This section does not apply to this chemical.
13 VLSI Grade Procedures
13.1 This section does not apply to this chemical.
14 Tier A Procedures
14.1 Standardized test methods are being developed
for all parameters at the purity levels indicated. Until
standardized test methods are published, test
methodology shall be determined by user and producer.
The Process Chemicals Committee considers a test
method to be valid only if there is a documented
recovery study showing a recovery of 75 - 125%.
Recovery is for a known sample spike at 50% of the
specified level.
15 Tier B Procedures
15.1 This section does not apply to this chemical.
16 Tier C Procedures
16.1 This section does not apply to this chemical.
17 Tier D Procedures
17.1 This section does not apply to this chemical.
SEMI C38-0699 © SEMI 1991, 1999 PHOSPHORUS OXYCHLORIDE2
Table 1 Impurity Limits and Other Requirements for Phosphorus Oxychloride
Previous SEMI Reference # C7.12-91
Tier A
(Guideline)
Assay 99.9% min
Color (APHA) 5 max
Hydroxyl 0.1 absorbance units (see NOTE 1)
Aluminum (Al) 10 ppb max
Arsenic (As) 7 ppb max
Barium (Ba) 1 ppb max
Bismuth (Bi) 1 ppb max
Calcium (Ca) 6 ppb max
Chromium (Cr) 1 ppb max
Cobalt (Co) 1 ppb max
Copper (Cu) 3 ppb max
Gallium (Ga) 1 ppb max
Gold (Au) 1 ppb max
Iron (Fe) 5 ppb max
Lead (Pb) 3 ppb max
Lithium (Li) 6 ppb max
Magnesium (Mg) 5 ppb max
Manganese (Mn) 1 ppb max
Mercury (Hg) 8 ppb max
Nickel (Ni) 1 ppb max
Niobium (Nb) 1 ppb max
Potassium (K) 3 ppb max
Silver (Ag) 1 ppb max
Sodium (Na) 5 ppb max
Strontium (Sr) 1 ppb max
Tin (Sn) 1 ppb max
Titanium (Ti) 3 ppb max
Zinc (Zn) 10 ppb max
Particles in bottles:
size, #/mL
≥0.3 µm, 50 max
NOTE 1: Absorbance for the 4000 to 2700 cm
-1
for 5 mm optical path length.