semi合集-English.pdf - 第4090页
SEMI F57-0301 © SEMI 200 0, 2001 11 NOTICE: SE MI makes no warra nties or representations as to the suitabilit y of the standard set forth herein for any particular application. The determination of the suitability o f t…
SEMI F57-0301 © SEMI 2000, 2001 10
RELATED INFORMATION 1
THEORETICAL DYNAMIC CONCENTRATION (TDC)
NOTE: This related information is not an official part of SEMI F57 and was derived from the work of the originating task force.
This related information was approved for publication by full letter ballot procedures on August 28, 2000.
R1-1 TDC Definition and Calculation
R1-1.1 For purposes of demonstrating a theoretical
mathematical relationship between the maximum
allowed static leach out values (provided in this
specification) and a corresponding concentration which
may result in a flowing stream, this related information
on Theoretical Dynamic Concentration (TDC) is being
provided.
R1-1.2 The Static Value as defined in this document
(see Section 7.3.4) is a measure of the weekly
accumulated mass transfer of contaminant (contaminant
flux per week) from the material being tested into static
ultrapure water (UPW). The value is calculated based
upon measurement of total leached mass of a
contaminant per unit area of the surface that was wetted
in the test apparatus. Since the duration of the static
test is fixed at 7 days, the information is simply
reported as mass/area (Tables 3, 4, and 5 use units of
µg/m
2
).
R1-1.3 The Theoretical Dynamic Concentration (TDC)
is a mathematical conversion of the static value into a
theoretical prediction of concentration of a contaminant
incorporated into the flowing liquid by contact with the
contaminant generating (or transmitting) polymer
component wall. The conversion depends upon a
model which assumes a uniform rate of contaminant
generation that is equal to the average rate over the 7
day Static Value test (7d * 24 hr/d * 3600 sec/hr = 6.05
x 10
5
sec). The model also assumes a non-depleting
source of the contaminant in steady state transport
conditions through the component/liquid interface. In
general, this assumption is only true early in the life of
the piping system installation. Values have been found
to decrease in time. Calculation of TDC for
specification limit purposes can be derived by dividing
the static value limit for the component (adjusted for
wetted surface area of the component) by the volume of
liquid affected by contact with the component.
R1-2 TDC Example
R1-2.1 Referring to the concentrations shown in Tables
3, 4 and 5, a 1 meter long, 60 mm inner diameter pipe
with an UPW constant fluid velocity of 1.5
meters/second is selected as an example. Since several
factors will affect the actual concentration in a flowing
stream the TDC should be considered as approximate,
not absolute.
I.D. d = 60 mm
Length l = 1.0 m
Fluid velocity = 1.5 m/sec
R1- 2.2 Example of TDC Calculation:
a) Surface area of tube I.D.
= πdl
= (π)(0.060 m)(1.0 m)
= 0.188 m
2
= 1.88 × 10
-1
m
2
b) Volume of tube I.D.
= π (d/2)
2
l
= (π)(0.060/2 m)
2
(1.0 m)
= 2.83 × 10
-3
m
3
= (2.83 × 10
-3
m
3
)(1 × 10
3
liter/m
3
)
= 2.83 liter
c) Volume of liquid transported through tube per
second
= (1.5 m/sec) (2.83 liter/m)
= 4.25 liter/sec
d) Volume of liquid transported through tube per
week
= (4.25 liter/sec)(6.05 x 10
5
sec/wk)
= 2.57 × 10
6
liter/wk
e) Assume a Static Value limit of 10µg/m
2
= (10 µg/m
2
)(1.88 × 10
-1
m
2
)
= 1.88 µg
f) Using the values from d and e, above,
TDC = 1.88 µg / 2.57 × 10
6
liter
TDC = 7.3 × 10
-7
µg/liter
(or, 7.3 × 10
-4
parts per trillion in liquids with an
approximate density of 1 gram/cm
3
)
SEMI F57-0301 © SEMI 2000, 200111
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standard set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. These
standards are subject to change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI F58-1000 © SEMI 20001
SEMI F58-1000
TEST METHOD FOR DETERMINATION OF MOISTURE DRY-DOWN
CHARACTERISTICS OF SURFACE-MOUNTED AND CONVENTIONAL
GAS DISTRIBUTION SYSTEMS BY ATMOSPHERIC PRESSURE
IONIZATION MASS SPECTROMETRY (APIMS)
This test method was technically approved by the Global Facilities Committee and is the direct responsibility
of the North American Facilities Committee. Current edition approved by the North American Regional
Standards Committee on August 28, 2000. Initially available on SEMI OnLine August 2000; to be published
October 2000.
1 Purpose
1.1 This document describes the p rocedure for
determination of the moisture dry-down characteristics
(quantity of removable moisture) of surface mounted
and conventional gas distribution systems (integrated
gas distribution systems). APIMS is currently the
method of choice for such dynamic tests because it is
the commercially available technique capable of ppt
moisture analysis with the fastest response time. This
test method may provide guidelines for the application
of other techniques with similar detection limits and
response time to APIMS which are not commercially
available at this time.
1.2 The results of this test can be u sed for qualitative
ranking of gas delivery based on the design. It can also
be used by a sufficiently sophisticated user as input for
numerical simulation of distribution system behavior.
2 Scope
2.1 This test method applies to all types of surface
mounted and conventional gas distribution systems
used in semiconductor processing.
2.2 Test Medium — The test proce dure will be carried
out in nitrogen. Other “inert” gases will have different
purging characteristics and may dry a system more
quickly or slowly. Reactive gases may react chemically
with moisture. Considerations relating to corrosion
resistance are outside the scope of the present
document, although the test procedure may prove useful
in corrosion studies. The results will provide a ranking
with respect to moisture contribution arising as a result
of differences in design, which may be applied with due
caution to systems intended for use in other gas
applications.
2.3 Operating Situations — Moist ure contribution
from a gas delivery system may be the result of
contamination arising in its manufacture, or from
subsequent exposure to ambient air or non-dry gas.
Thus, it is necessary to consider two main situations:
2.3.1 The “initial dry-down” situatio n, which is
determined by the moisture content of the components
in the system (as received) with the effects of
manufacturing process and design, surface quality, pre-
treatment and packaging convoluted together.
2.3.2 The “response to upset” situati on, which is
determined by the amount of moisture taken up by the
system and subsequently released in any exposure after
receipt.
2.4 Safety Issues — This standard does not purport to
address safety issues, if any, associated with its use. It
is the responsibility of the users of this standard to
establish appropriate safety and health practices and
determine the applicability of regulatory limitations
prior to use.
3 Limitations
3.1 This test method allows the de termination of
moisture interactions which can be used, for example,
to rank systems in order of decreasing moisture
interaction. Because different degrees of moisture
interaction are permissible in different situations,
selecting the “best” system requires consideration of
how they will be used, either qualitatively or through a
numerical simulation of distribution system behavior.
The results of this test can only be used for qualification
for gas delivery systems based on different designs. It
cannot be used for production purposes and/or
certification/testing.
4 Referenced Standards
NOTE 1: As listed or revised, all documents cited shall be the
latest publications of adopted standards.
4.1 SEMI Standards
SEMI C15 — Test Method for ppm and ppb Humidity
Standards
SEMI F27 — Test Method for Moisture Interaction and
Content of Gas Distribution Systems and Components
by Atmospheric Pressure Ionization Mass Spectrometry
(APIMS)