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SEMI E122-0703 © SEMI 2003 10 9.2.4 Data Variables are valid only upo n the occurrence of specific collection events. Data variables may be queried by the host. An attempt to read a data variable item at the wrong ti me …

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Example: A test system with three test-heads might require the use of virtual tester 1 to address test-head 1, virtual
tester 2 to address test-head 2, and virtual tester 3 to address test-head 3. If a process-program requiring the
resources of two test-heads is loaded on virtual tester 1, it might assign both test-head 1 and test-head 2 to that
virtual tester. An attempt to load a program on virtual tester 2 would then fail, but a program might still be loaded
to virtual tester 3.
7.6.5 If all test-sites on a test-head are disabled, the test-head itself may be considered to be disabled. If a test-head
is disabled the test-head may be undocked from the unit handling equipment and the test-board may be removed
from the test-head. Commands to enable test-sites on a test-head that is not connected to the test-board or is not
docked should fail. Testing should be able to proceed on test-sites on other test-heads.
7.6.5.1 If a virtual tester includes test-sites on more than one test-head, disabling a test-head should not prevent
testing from continuing on the test-sites on other test-heads.
8 Collection Event List
8.1 Requirements
8.1.1 All defined TSEM process state model state transitions are required collection events. In addition to defined
process state model state transition collection events, the following collection events are also required.
Table 3 Additional Required Collection Events
Collection Event Name Collection Event Description
TestBoardChange A test-board is attached, removed, or changed.
DockStatusChange The test-head is docked or undocked from the materials handler.
EnableSite A previously disabled test-site is enabled.
DisableSite A previously enabled test-site is disabled.
9 Variable Items
9.1 The purpose of this section is to define the list of variable items required by the TSEM. Values of these
variables will be available to the host through collection event reports and host status queries.
9.2 Requirements
9.2.1 Variable items required by TSEM are categorized as follows:
• Common Variables (CVs) — Variables common to all testers.
• Configuration-Specific Variables (CSVs) — Variables associated with a specific configuration of the above
equipment class.
9.2.2 Equipment constants have various uses in TSEM, including the following:
• Equipment offsets that match the performance of several pieces of equipment that would otherwise perform
differently due to inherent manufacturing differences. Examples are home values and motion axis scaling
factors.
• Setting the configuration of the equipment to allow for different material specifications, equipment options,
material flows, frequency of automatic functions, etc. An example is yield check frequency.
• Managing optional machine features. Examples are constants that indicate whether optional features such as
automated media stackers are present and control the configuration and function of these optional subsystems
when they are present.
• Equipment Constants can be changed by the user but are not modified by the equipment. Its value can be
queried by the host at any time. Equipment constants remain in effect until they are modified by the user.
9.2.3 Status Variables are valid at all times. A status variable may not be changed by the host but may be changed
by the equipment or operator. The value of status variables may be queried by the host at anytime.
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9.2.4 Data Variables are valid only upon the occurrence of specific collection events. Data variables may be
queried by the host. An attempt to read a data variable item at the wrong time does not generate an error, but the
data reported may not have relevant meaning.
9.2.5 Data Item Requirements for Multi-Head, Multi-Site Equipment — Some variables may change value
depending on the processing state (whether or not resources are allocated to a virtual tester). See definition of
Virtual Tester.
Example: If calibration is done separately on two test-heads, and a virtual tester has been allocated resources only
from the more recently calibrated test-head, CalDate for that virtual tester may have a more recent date in the
READY state than it did in the IDLE state.
9.3 class, hard-bin, and soft-bin — Equipment is to maintain variables that provide three levels of granularity for
test results: class, hard-bin, and soft-bin. Classes, hard-bins, and soft-bins are defined within a process program, and
their values are made available during events. When unit testing has completed, the process program is to determine
the class, hard-bin, and soft-bin with which the unit is to be associated, based on the results of the testing.
9.4 Variable Item Tables
Table 4 Variable Item Table
Variable Name Category Description Format Comments
ActiveSites CV List of test-sites that are to be tested. List of integer
Address CSV Address of the reported vector. Integer Valid only in Datalog
reports.
Channel CV Hardware channel or resource
identifier.
Text List by PinID.
ClassID CV Test result class number. Integer Valid in PROCESS
states. List by test-site.
ClassName CV Test result class name. Text Valid at BIN-DATA-
AVAILABLE state. List
by ClassID.
ConfigInfo CSV Physical configuration information. Format is determined by
vendor.
Valid in all states.
Cycle CV Cycle count for this report. Integer Valid only in Datalog
reports.
DatalogConfig CV Datalog Configuration. Text Valid in all states.
DatalogPlanName CV Datalog report plan name. Text Valid in all states.
DockingStatus CSV Information on handler/prober
docking status.
Boolean Valid in all states.
EnabledSites CV List of test-sites initially enabled at
process program download.
List of integer
EquipMake CV Tool Manufacturer. Text Valid in all states.
EquipSerialID CV Unique Equipment identifier. Text Valid in all states.
FunctionalResult CSV Vector of bits indicating pass or fail
for each pin. Where 0 = Fail and
1 = Pass.
Binary Valid only in Datalog
reports.
HardBinID CV Test result hard-bin number. Integer Valid in PROCESS
states. List by test-site.
HardBinName CV Test result hard-bin name. Text Valid at BIN-DATA-
AVAILABLE Event.
List by HardBbinID.
HighLimit CSV Higher limit for measurement.
Multiple instances of this variable
exist. See TEST-LIST report.
Float List by TestID.
LowLimit CSV Lower limit for measurement.
Multiple instances of this variable
exist. See TEST-LIST report.
Float List by TestID.
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Variable Name Category Description Format Comments
NumberOfHeads CV The number of test-heads on the
system.
Integer
NumberOfPins CV The number of pins for each test-head. Integer
OperatorID CV Current Operator ID. Text Valid in all states.
Pass CV Where 0 = Fail and 1 = Pass. Boolean Valid only in Datalog
reports.
PatternName CSV This must identify the location to
which the vector address and cycle
count are relative.
Text Valid only in Datalog
reports.
PinID CV Pin identifier used to identify the pin
results in pin result reports.
Integer List by PinID.
PPExecVersion CV Test program version. Text.
ProcessProgramID CV Process program identifier. Text Valid in the processing
active states.
Range CSV Range used by the measurement unit. Float Valid only in Datalog
reports.
RealResult CSV Measured value. Float Valid only in Datalog
reports.
Signal CV Signal name. Text List by PinID.
SiteID CV Test-board test-site number for multi-
site (parallel) testing.
Integer
SoftBinID CV Test result soft-bin number. Integer Valid in PROCESS
states. List by test-site.
SoftBinName CV Test result soft-bin name. Text Valid at BIN-DATA-
AVAILABLE Event.
List by SoftBinID.
SoftwareBuildID CV The build ID of this software list
element. Multiple instances of this
variable exist. See SOFTWARE-
LIST report.
Text
SoftwareName CV The name of this software list element
(e.g. Solaris, IG9000, etc.) Multiple
instances of this variable exist. See
SOFTWARE-LIST report.
Text
SoftwareType CV The type of this software list element
(e.g. Operating System, Tool Control
System, etc.) Multiple instances of
this variable exist. See SOFTWARE-
LIST report.
Text
SoftwareVersion CV The version of this software list
element. Multiple instances of this
variable exist. See SOFTWARE-
LIST report.
Text
StartTestPortID CSV Start Test Source (i.e. hand, keyboard,
host).
Text Valid in all states.
TestBoardCalStatus CV Test-board calibration status. Where
0 = Fail and 1 = Pass.
Boolean
TestBoardID CV ID of current test-board. Text Valid in all states.
TestBoardPosition CV A relative location of a test-site on a
test-board.
Integer[2] X and Y position. Site 1
is 0,0.
TestBoardSiteID CV A mapping of a test-site to a physical
location on the tester.
List of
SiteId
TestBoardID
TestBoardPosition