semi合集-English.pdf - 第5518页

SEMI P10-0705 © SEMI 1990, 2005 13 <surface_definition> = START_SURFACE_DEFINITION [SURFACE_INSPECT ION] [ SURFACE_QUALITY_ID ] { [SURF_INSP_EQUIP_REQD] {EQUIP_ SITE_REQD} [SURF_INSP_MODE_REQD] [SURF_INSP_PIXE L_SI…

SEMI P10-0705 © SEMI 1990, 2005 12

<opc_definition> = START_OPC

[OPC_TYPE [OPC_MINIMUM_FEATURE_SIZE] [OPC_MINIMUM_GAP]

[OPC_PATTERN_SEPARATE] [OPC_PATTERN_MODIFIABLE] ]

END_OPC

<defect_definition> = START_DEFECT_DEFINITION [DEFECT_QUALITY_ID]

[VISUAL_INSPECTION_OK] [VISUAL_INSPECTION_REQD]

{VISUAL_INSP_CRITERIA}

[AUTO_INSPECTION_REQD] [DIE_TO_DIE_INSPECTION]

[DEFECT_SIZE] [DEFECT_SIZE_CL] [DEFECT_SIZE_DK]

[DEFECT_SIZE_CL_ADJ] [DEFECT_SIZE_CL_ADJ_REP]

[DEFECT_SIZE_DK_ADJ] [DEFECT_SIZE_DK_ADJ_REP]

[DEFECT_SIZE_CL_ISO] [DEFECT_SIZE_CL_ISO_REP]

[DEFECT_SIZE_DK_ISO] [DEFECT_SIZE_DK_ISO_REP]

[DEFECT_DENSITY] [DEFECT_COUNT] [DEFECT_COUNT_REP]

[DEFECTIVE_DIE_DENSITY] [DEFECTIVE_DIE_COUNT]

[DEFECTIVE_DIE_COUNT_REP]

[PERCENT_DEFECTIVE_DIE]

[EDGE_ROUGHNESS]

{INSPECTION_AREA} {INSPECTION_AREA_EXCLUDE}

{SCRATCH_SIZE_FRONT {SCRATCH_INSP_AREA {SCRATCH_INSP_EXCLUDE }}}

{SCRATCH_SIZE_BACK {SCRATCH_INSP_AREA {SCRATCH_INSP_EXCLUDE }}}

[GOOD_FIELDS]

{DEFECT_EQUIP_REQD {EQUIP_SITE_REQD}

[DEFECT_INSP_MODE_REQD]

[DEFECT_INSP_PIXEL_SIZE_REQD]

{ DEFECT_TYPE DEFECT_INSP_SENSITIVITY_REQD

{ BIN_SIZE SEVERITY_CRITERION_REQD } }

[ DEFECT_SETUP_FILE_NAME_REQD] }

database_inspection>]

[<repair_definition>]

END_DEFECT_DEFINITION

<database_inspection> = DATABASE_INSPECTION [PRICE]

[DATABASE_SOURCE]

[DATABASE_TOP_CELL DATABASE_LAYER]

[DATABASE_FILE_NAME]

[DATABASE_UNIT] [USER_UNIT]

[DATABASE_WITH_JOB [DATABASE_JOB_NAME DATABASE_JOB_LEVEL] ]

{DATABASE_AREA}

<repair_definition> = START_REPAIR_DEFINITION

{ REPAIR_EQUIP_REQD {EQUIP_SITE_REQD} }

END_REPAIR_DEFINITION

SEMI P10-0705 © SEMI 1990, 2005 13

<surface_definition> = START_SURFACE_DEFINITION

[SURFACE_INSPECTION] [

SURFACE_QUALITY_ID]

{ [SURF_INSP_EQUIP_REQD] {EQUIP_SITE_REQD} [SURF_INSP_MODE_REQD]

[SURF_INSP_PIXEL_SIZE_REQD]

{SURF_DEFECT_TYPE

SURF_INSP_SENSITIVITY_REQD

{

BIN_SIZE SEVERITY_CRITERION_REQD } }

[SURF_INSP_SETUP_FILE_NAME_REQD] }

[SURF_INSP_METHOD] [SURF_INSP_AREA]

[

SURF_INSP_PELL_TOP]

[

SURF_INSP_PELL_TOP_ON_CLEAR_PATTERN]

[

SURF_INSP_PELL_TOP_ON_OPAQUE_PATTERN]

[

SURF_INSP_PELL_TOP_OUTSIDE_FRAME]

[

SURF_INSP_PELL_TOP_OUTSIDE_ON_OPAQUE]

[

SURF_INSP_PELL_TOP_OUTSIDE_MEMBRANE]

[

SURF_INSP_PELL_TOP_INSIDE_MEMBRANE]

[

SURF_INSP_PELL_TOP_OUTSIDE_ON_FRAME]

[

SURF_INSP_PELL_TOP_INSIDE_ON_FRAME]

[SURF_INSP_PELL_BOTTOM]

[SURF_INSP_GLASS_SIDE] [SURF_INSP_PATTERN_SIDE]

[TRANSMISSION_DEFECT_CLEAR] [TRANSMISSION_DEFECT_DARK]

END_SURFACE_DEFINITION

<sem_photo> = {

START_SEM_PHOTO

{ [

SEM_PHOTO_SITE_ID] [SEM_PHOTO_LOCATION] }

[

SEM_PHOTO_MATRIX_FILENAME]

[CD_FEATURE] [CD_LOCATION_DRAWING] [CD_DRAWING]

[

SEM_PHOTO_SCALE]

[

SEM_PHOTO_TILT] [SEM_PHOTO_ROTATION]

END_SEM_PHOTO }

<mask_definition> = MASK_ID [MASK_NAME] DELIVERABLE_MASK

mask_options> END_MASK

<cell_definition> = CELL_ID [<

pattern_options>] END_CELL_OPTIONS

cell_instance>} {<pattern_instance>} END_CELL

<pattern_group> = PATTERN_GROUP_ID [<

pattern_options>]

END_PATTERN_GROUP_OPTIONS {<

pattern_definitions>}

END_PATTERN_GROUP

<pattern_definitions> = LEVEL_ID

[PATTERN_NAME] [PATTERN_VISUAL_ID] [FIGURE_COUNT]

[MINIMUM_FEATURE_SIZE {MINIMUM_FEATURE_LOCATION} ]

opc_definition>}

[OPTICAL_MASK_SET_ID [OPTICAL_MASK_ID] ]

[OPTICAL_MASK_TITLE]

pattern_options>]

END_PATTERN_DEFINITION

<cell_instance> = CELL_INSTANCE [<

pattern_options>]

END_CELL_INSTANCE_OPTIONS {<

placement>}

END_CELL_INSTANCE

<pattern_instance> = PATTERN_GROUP_INSTANCE [<

pattern_options>]

placement>}

END_PATTERN_GROUP_INSTANCE

<placement> = START_PLACEMENT { LOCATION [STEPPING_DISTANCE STEPPING_COUNT] }

[ARRAY_DIAMETER ARRAY_CENTER [ARRAY_DIAMETER_INCLUSIVE] ]

[DATA_OFFSET]

{DROPOUT [SCRIBE_TONE SCRIBE_INSIDE_CORNERS

SCRIBE_OUTSIDE_CORNERS] }

[LOCATION_SPEC] [CD_MEASURE_DIE]

END_PLACEMENT

<pattern_options> = START_PATTERN_OPTIONS [

PATTERN_FUNCTION]

[

DATA_FILE_SIZE] [DATA_CHECKSUM DATA_CHECKSUM_TYPE ]

[PATTERN_ADDRESS_SIZE] [SCALE_FACTOR]

[DIGITIZED_DATA_DARK]

[STRIPE_HEIGHT]

[UNSCALED_PATTERN_SIZE]

[

MFG_BIAS_PREAPPLIED]

{ LITHO_MODE_REQD } [VIRTUAL_ADDRESS]

[SURROUNDING_TONE SURROUNDING_WIDTH SURROUNDING_HEIGHT]

[MIRROR_PATTERN]

[<ship_plot>] [PATTERN_PLOT_APPR_REQD]

films>}

phase_shift>]

registration>}

cd_group>}

cd_set>}

cd_xy_definition>}

cd_iso_dense_definition>}

[PERCENT_CLEAR]

[INSPECT_ALL_SITES]

defect_definition>}

[BUTTING_ERROR]

[ADDITIONAL_PATTERN_INFO]