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SEMI D17-0200 © SEMI 1998, 2000 7 Figure 1 Isometric Vie ws

SEMI D17-0200 © SEMI 1998, 2000 6

Symbol

Used

Shown In Datum Measured From Boundary or Feature Measured To Algebraic

Relation or Value

y9 Figure 2 facial datum plane outside edge of cassette top and bottom

plate domain

≤ L * 1.21

y10 Figure 3 facial datum plane inside edge of cassette top and bottom

plate indent

≤ L * 0.985

y11 Figure 3 facial datum plane inside edge of cassette sensing pad areas ≥ L * 0.708

y12 Figure 3 facial datum plane outside edge of cassette sensing pad

areas

≤ L * 0.954

y13 Figure 3 facial datum plane center of coupling exclusion zones

= L * 0.923 ±

0.1 mm

z1 Figure 4 horizontal datum plane bottom of cassette bottom domain

≥ 2 mm

z2 Figure 4 horizontal datum plane bottom of cassette sensing pads

= 3 ± 0.5 mm

z3 Figure 6 horizontal datum plane bottom surface of conveying surface

= 2 ± 0.5 mm

z4 Figure 4 horizontal datum plane top of cassette bottom domain

≤ 40 mm

z5 Figure 4 horizontal datum plane bottom nominal substrate seating plane = 60 mm

z6 Figure 4 each nominal substrate seating plane bottom of substrate

= ± 0.5 mm

z7 Figure 4 each nominal substrate seating plane encroachment of cassette side domains

on clearance above the substrate

See Table 4.

z8 Figure 4 each nominal substrate seating plane adjacent nominal substrate seating planes See Table 4.

z9 Figure 4 top nominal substrate seating plane bottom of cassette top domain

≥ z7 + 1 mm

z10 Figure 4 top nominal substrate seating plane bottom of clearance under robotic

handling flange

≤ 30 mm

z11 Figure 4 top nominal substrate seating plane top of clearance under robotic handling

flange

= 40 ± 1 mm

z12 Figure 4 top nominal substrate seating plane top of top cassette domain

≤ 50 mm

z14 Figure 6 horizontal datum plane top of v-rail, v-groove, and float roller

exclusion zones

= 24.86 ±

0.12 mm

Figure 1

Isometric Views

Figure 2

Cassette Side Domains