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SEMI E49.7-0304 © SEMI 1995, 2004 3 NOTE 2: Use 316L electropolished tubing or PFA tubing for purge piping. (Use tubing that does not degrade N 2 .) 7.2 Ultrapure Water (Uses include cleaning and rinsing.) • Resistiv ity…

SEMI E49.7-0304 © SEMI 1995, 2004 2

3.3 System design issues outside those that directly

impact liquid purity or quality are not within the scope

of this document’s recommendations and are left to the

individual system designers.

3.4 Polymer systems described within this document

are intended for use in ultrapure water and liquid

chemical delivery only. Their performance

requirements may exceed the needs of systems used in

drainage and other lesser quality liquids.

4 Referenced Standards

4.1 SEMI Standards

SEMI C3.28  Standard for Nitrogen (N2), VLSI

Grade in Cylinders, 99.9996% Quality

SEMI C41  Specifications and Guidelines for 2-

Propanol

SEMI E49  Guide for Standard Performance,

Practices, and Sub-Assembly for High Purity Piping

Systems and Final Assembly for Semiconductor

Manufacturing Equipment

SEMI E49.4  Guide for High Purity Solvent

Distribution Systems in Semiconductor Manufacturing

Equipment

SEMI E49.5  Guide for Ultrahigh Purity Solvent

Distribution Systems in Semiconductor Manufacturing

Equipment

SEMI E49.6  Guide for Subsystem Assembly and

Testing Procedures – Stainless Steel Systems

SEMI F34  Guide for Liquid Chemical Pipe Labeling

SEMI F57  Provisional Specification for Polymer

Components Used in Ultrapure Water and Liquid

Chemical Distribution Systems

SEMI F61  Guide for Ultrapure Water System Used

in Semiconductor Processing

4.2 Federal Standard (FED-STD)

Fed Stand 209E — Airborne Particulate Cleanliness

Classes in Cleanrooms and Clean Zones

1 Available from General Service Administration, Federal Supply

Service Bureau, Specification Section, Suite 8167, 470 East L' Enfant

Place SW, Washington, D.C. 20407.

4.3 ISO Document

ISO 14644  Cleanrooms and Associated Controlled

Environments – Part 1 Classification of Air Cleanliness

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 See Section 4 of SEMI E49.

6 Manufacturing Facility Recommendations

6.1 Cleanroom Class designations as used within this

document are defined within Federal Standard 209E

Airborne Particulate Cleanliness Classes in Clean

rooms and Clean Zones. (ISO standard 14644-1

classifications are listed parenthetically.)

6.2 Materials Storage Area  The storage area for

components and assemblies should be a dedicated

enclosed area, protected from the elements and

separated from other materials. Only components and

assemblies that have passed inspection, and are clean

and packaged should be placed in the storage area.

6.3 Gowning Area  Gowning area should be Class

10,000 (ISO Class 7) or better. All personnel working

in cleanrooms should follow appropriate gowning

protocol such as: wear booties prior to entering the

gowning area; and wear gowns, hood, boots, gloves,

and safety glasses before entering clean areas.

6.4 Staging Area  Staging Area should be Class

10,000 (ISO Class 7) or better. The staging area (if

used) should be located immediately outside the

assembly cleanroom, with appropriate access to the

assembly cleanroom.

6.5 Assembly Areas  All production operations such

as cutting, welding, cleaning, assembly, final

integration, final test, and packaging (if applicable)

should be performed in a class 10,000 (ISO Class 7)

cleanroom or better.

7 Utility Recommendations

7.1 Nitrogen (Uses include leak testing of non-brittle

materials, drying, and purging.)

• Nitrogen quality should meet requirements of

SEMI C3.28.

• Particle filtration should be 99.99999% removal of

0.003 micron particles.

2 International Organization for Standardization, ISO Central

Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,

Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30

Website: www.iso.ch

SEMI E49.7-0304 © SEMI 1995, 2004 3

NOTE 2: Use 316L electropolished tubing or PFA tubing for

purge piping. (Use tubing that does not degrade N

7.2 Ultrapure Water (Uses include cleaning and

rinsing.)

• Resistivity ≥ 18 mega ohm-cm @ 25° C (77° F)

• TOC — < 20 ppb

• Silica — < 5 ppb

• Particles — < 1 particle/milliliter @ 0.1 µ m size

• Bacteria — < 10 colonies/100 milliliter

• Hot Ultrapure Water Temperature — 80° C

(176° F), minimum

NOTE 3: If testing requirements dictate, access to higher

quality ultrapure water may be appropriate in portions of the

facility. Additional information related to ultrapure water

facility design and terminology may be obtained in SEMI

F61.

7.3 2-Propanol/IPA (Uses include cleaning.)

• 2-Propanol/IPA quality should meet requirements

of SEMI C41, Grade 1

7.4 Clean Dry Air (CDA) or Oil Free Air (Uses include

pneumatic control and air actuation.)

7.4.1 CDA is not recommended for use on cleaned

wetted surfaces. Nitrogen is recommended for drying

cleaned wetted surfaces because the purity level is

clearly defined and controlled.

8 System Design Recommendations

8.1 General Recommendations — The intent of this

section is to recommend design practices that ensure the

quality of the liquid being delivered. These

recommendations should be considered along with

design constraints such as minimizing liquid

consumption, cost, ensuring maintainability, and

limiting complexity. In addition, the appropriateness

and simplicity of the facility interface should be

considered.

8.2 Component Recommendations — Components

should limit system exposure to ionic, metallic, total

organic carbon, and particle contamination.

8.2.1 All applicable components should comply with

SEMI F57.

8.2.2 For components not addressed in SEMI F57, a

discussion of recommended materials (similar to that

found in SEMI F57) may benefit the reader and is

therefore provided.

8.2.2.1 Care should be taken to ensure that the

materials are compatible with the liquid streams for

long term applications. Additionally, it is important

that the materials used be compatible with the

application temperature and/or sanitization methods

such as ozone, UV light and/or hydrogen peroxide.

8.2.2.2 These recommendations often imply the use of

existing materials of choice, such as high purity grades

of perfluoroalkoxy (PFA), polytetrafluoroethylene

(PTFE), and polyvinylidene fluoride (PVDF).

However, unique design specifications or new materials

may result in instances where significant efficiencies

may be achieved while maintaining substantially

equivalent performance. These scenarios could result

in the use of new or existing materials such as

ethylenechlorotrifluoroethylene (ECTFE), polyether-

etherketone (PEEK), polypropylene (PP), acetal resin

(such as Delrin®™

, Celcon®™

and others),

polyvinyl chloride (PVC), perfluoromethylether-based

perfluoroalkoxy (MFA), etc.

8.2.2.3 Due to purity and traceability issues,

reprocessed or regrind material is not recommended.

8.3 Joining Recommendations — Joining technology

that is free of dead space and entrapment areas is

recommended to reduce negative effects such as

microbial proliferation and impacts to slurry particle

size distribution. For this reason pipe thread

connections are not recommended.

8.3.1 Tubing should be joined with flare fittings, or

similar dead space free technology. Preparation and

joining of fittings should be performed in accordance

with component manufacturer recommendations.

8.3.1.1 Care should be taken to ensure that dissimilar

flare fittings are not joined together. When possible,

one style of fitting should be used throughout the

system. Manufacturers should be consulted prior to

using similar style fittings from different manufacturers

interchangeably.

8.3.2 Pipe should be joined with welds that minimize

dead space and entrapment areas. Preparation and

welding should be performed in accordance with

component manufacturer’s recommendations.

NOTE 4: Users of this guideline are cautioned that suitable

welding methods, such as thermal butt welding, may be

covered by patents or other intellectual property.

8.3.2.1 Glue, solvent, or thermal socket welding of

pipe is not recommended.

8.4 System Volume Recommendations — When

possible, dead volumes should be eliminated and

overall system volume should be minimized to reduce

negative effects on purity as well as flush times.

3 Delrin is a trademark of DuPont; Celcon is a trademark of Hoechst

Celanese.

SEMI E49.7-0304 © SEMI 1995, 2004 4

8.4.1 In instances where dead volumes are

unavoidable, the dead leg should be <

3 nominal flow

path diameters.

8.4.2 Examples of components and practices which

help minimize system volume include:

• Dead-space-free branch valves

• Multi-component integrated assemblies

• Use of direct flow paths

• Trickle bypass valves

• Sampling valves

8.5 Flow Recommendations — Due to issues related to

equipment complexity and the cost of excessive liquid

consumption, general flow recommendations for

ultrapure water and liquid chemical delivery systems

are not provided. However, Related Information 1

provides a list of practices that tend to reduce microbial

proliferation in ultrapure water Systems. Because not

all liquid chemicals are subject to these effects, the user

is advised to obtain additional flow information related

to ensuring the quality of liquid chemicals from the

liquid chemical manufacturer.

8.6 Slurry System Recommendations — In addition to

the other design recommendations within this section,

the following recommendations are provided

specifically for slurry liquid delivery systems used

within CMP process equipment.

8.6.1 Areas of high shear can damage the quality of

many slurries resulting in large particle count (LPC)

growth. Sharp edges projecting into flow path, large

pressure drops, tight bends, and sudden large reductions

in tubing size can cause high shear.

8.6.2 Dead legs are of particular importance with

respect to slurries because the abrasives may settle and

agglomerate, creating LPC growth. To help minimize

this issue branch lines should be oriented such that they

project vertically above the main line to prevent the

abrasive from settling and agglomerating.

8.6.3 If point of use filtration is incorporated,

provisions to sample the slurry before and after the

filter should be provided for LPC monitoring.

8.7 Protection and Sampling Recommendations 

These recommendations are intended to protect liquids

from back flow or cross contamination and to ensure

that sampling is adequate for evaluating liquid quality

throughout system.

8.7.1 Backflow/back pressure and cross contamination

protection should be included in the system.

8.7.2 The system should have provisions to accomplish

sampling. Sampling ports should be located as close as

possible to the liquid supply point, to bath/tank or

process chamber, and to the return header immediately

before exit.

8.7.3 Provisions to completely flush, drain, and sanitize

the liquid system completely (with ultrapure water or 2-

propanol/IPA for example) should be included in the

system.

8.8 Filtration Recommendations  These

recommendations are intended to reduce negative

effects such as particle contamination, metallic

contamination, and micro bubbles.

8.8.1 Filters should be considered for all liquid

delivery systems. Location, selection, installation, start

up, and rinse of filters should be based on input from

customer, chemical manufacturer and equipment

manufacturer.

8.8.2 Process stream isolation should be provided for

all filters to allow for maintenance and replacement.

8.9 Labeling Recommendations — In addition to the

recommendations in Section 10.7, functional

labels/schematics should be included with assembly for

vents, drains, and other components as necessary to

ensure the proper operation of the system(s).

8.10 Maintainability Recommendations

8.10.1 Components that require operation, inspection,

or maintenance (i.e., valves, filters, pumps, gauges,

etc.) should be located where readily accessible.

8.10.2 Provide support on each side of components,

such as valves, where operation or assembly transmits

torque to the piping/tubing.

8.10.3 Design should allow for thermal expansion if

system operates at an elevated temperature.

9 Pre-Production Acceptance and Inspection

Recommendations

9.1 Identification Recommendations

9.1.1 Applicable components should meet the

traceability requirements found in SEMI F57. Where

practical, the traceability requirements of SEMI F57

should also be followed for components not covered

within SEMI F57 and assemblies, to ensure traceability

is provided from the resin source. Component and

assembly identification should provide nondestructive

post installation traceability. In addition, packaging

should have labels allowing for traceability as described

above that are clearly visible (without the need to open

the package).