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SEMI S13-0305 © SEMI 1998, 2005 17 RELATED INFORMATION 6 DOCUMENT CRITERIA WHICH MAY BE DISCUSSED IN A FUTURE REVISION OF SEMI S6 NOTICE : This relat ed information is not an offi cial part of SEMI S1 3 and was deri ved …

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SEMI S13-0305 © SEMI 1998, 2005 16
R5-5.4 Operation, maintenance, and test procedures for fire suppression and alarm system should be described.
R5-5.5 A list of any special apparatus needed to test the fire detection or suppression features of the equipment
should be provided. The list should note whether the apparatus is included with the equipment, or is sold separately.
R5-6 Industrial Hygiene Information
R5-6.1 Byproducts expected from the baseline process should be described.
R5-6.2 Documents provided to the equipment user should describe any exposure risk that is present.
R5-6.3 Methods for reducing exposure risk during performance of tasks (e.g., use of portable exhaust, use of
respirators, use of portable detection equipment to warn the worker) should be described.
R5-6.4 Radiation including ionizing (e.g., implanters, static elimination bars, X-ray) and non-ionizing (e.g., lasers,
Ultraviolet, infrared, RF, EMF) should be described.
SEMI S13-0305 © SEMI 1998, 2005 17
RELATED INFORMATION 6
DOCUMENT CRITERIA WHICH MAY BE DISCUSSED IN A FUTURE
REVISION OF SEMI S6
NOTICE: This related information is not an official part of SEMI S13 and was derived from the work of the SEMI
S13 Revision TF. This related information was approved for publication by a letter ballot on November 24, 2004.
R6-1 Purpose of this Related Information
R6-1.1 This related information contains criteria for documents that relate to technical criteria that may be
discussed for a future revision of SEMI S6.
R6-1.2 The criteria in this related information are not included in SEMI S6 as of the time this related information
was written, but are newly suggested as necessary criteria for determining whether the documents provided to the
equipment user conform to SEMI S13.
R6-1.3 The criteria in this related information are arranged to correspond with the sections of SEMI S6.
NOTE 1: It was the intent of the Task Force responsible for SEMI S13 that the criteria in this related information be
incorporated in a future revision of SEMI S6 and that this related information be removed from SEMI S13 by revising SEMI S13
with the same effective date as the effective date of the addition of these criteria to SEMI S6.
R6-2 Equipment Parameter Change
R6-2.1 Documents provided to the equipment user should describe changing any parameter of the systems in the
equipment (e.g., changing exhaust monitoring set points, working with portions of the enclosure removed) may
cause an unexpected condition.
SEMI S13-0305 © SEMI 1998, 2005 18
RELATED INFORMATION 7
DOCUMENT CRITERIA WHICH MAY BE DISCUSSED IN A FUTURE
REVISION OF SEMI S8
NOTICE: This related information is not an official part of SEMI S13 and was derived from the work of the SEMI
S13 Revision TF. This related information was approved for publication by a letter ballot on November 24, 2004.
R7-1 Purpose of this Related Information
R7-1.1 This related information contains criteria for documents that relate to technical criteria that may be
discussed for a future revision of SEMI S8.
R7-1.2 The criteria in this related information are not included in SEMI S8 as of the time this related information
was written, but are newly suggested as necessary criteria for determining whether the documents provided to the
equipment user conform to SEMI S13.
R7-1.3 The criteria in this related information are arranged to correspond with the sections of SEMI S8.
R7-1.3.1 It was the intent of the Task Force responsible for SEMI S13 that the criteria in this related information be
incorporated in a future revision of SEMI S8 and that this related information be removed from SEMI S13 by
revising SEMI S13 with the same effective date as the effective date of the addition of these criteria to SEMI S8.
R7-2 Supporting Device
R7-2.1 When supporting device provided by the equipment supplier is to be used by the equipment users as a
measure of ergonomic risk mitigation, the documentation should describe how to use it. For example, supporting
devices are appliances that support the user’s body (e.g., a platform to step on), the user’s hands (e.g., palm rest for a
keyboard), or a heavy object (e.g., hoist).