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SEMI E5-1104 © SEMI 1982, 2004 54 Attribute Name Descrip tion Access Format Value “ExecChgCtrl” Specifies change contro l requirements for recipe . Default is 0. Com binations of bits are used to indicate multiple permis…

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SEMI E5-1104 © SEMI 1982, 2004 53
Attribute Name Definition Acc. Rqmt Form Default Value
UD_* Non-standard attribute defined by
supplier or user. Asterisk indicates the
part of the attribute name that is provided
in this definition. Shall be preserved
exactly except by the entity that defined
it.
RO N Varies with definition.
Text form is limited to 80
characters.
-
Table 16 Managed Recipe Attribute Definition
Attribute Name Description Access Format Value
“ObjType” The object type. RO 20 “MRcp”
“ObjID” An identifier derived from Class, Name, and
Version
. No part of a recipe’s identifier shall be
changed except through renaming.
RO 20
(other) Description of the information contained. RO
or
RW
Varies with
definition.
Varies with definition.
“Name” A logical name assigned by the user when the
recipe is created or renamed.
RO 20
“Class” The recipe’s class (e.g., “/PROCESS/” or
“/PROCESS/LOADER/”).
RO 20 Formatted text:
“CLASS/CLASS/../CLASS/”
“Version” The version of the recipe. RO 20
“AttrLength” The total length of the generic attributes, in bytes.
Mandatory.
RO 5()
“AttrChgTime” Timestamp of the last change to a generic attribute.
Mandatory.
RO 20
“BodyLength” Length of the recipe’s body, in bytes. Mandatory. RO 5()
“EditTime” Timestamp of when the body was created or last
updated. Mandatory.
RO 20 Timestamp format:
“YYYYMMDDhhmmsscc”
“BodyFormat” Indicates the form and format of the recipe’s body.
Default is zero.
RO 52 0 = source,
1 = object,
>1 reserved.
“Verified” Indicates whether the recipe’s body is syntactically
correct. Reset when the recipe is created or
updated. Default is FALSE.
RO 11
“Linked” Indicates whether the recipe is linked. Reset when
the recipe is originated, verified, or unlinked.
Default is FALSE.
RO 11
“ApprovalLevel” Indicates the level of approval assigned by an
authorized user. Default is zero. Reset when the
recipe is originated or linked. For a linked recipe,
may not be higher than any of its subrecipes.
RW 52
“Comments” User comments. RW 20 Maximum length is 80 characters.
“EditedBy” The name of the person who last edited the recipe. RO 20 Maximum length is 40 characters.
“EstRunTime” The nominal or estimated execution (run) time of
the recipe, in seconds. Reset when the recipe, is
created or updated. Set when the recipe is verified.
May be recalculated to total time for a main recipe
when linked. Used for scheduling purposes.
Algorithm for calculation shall be documented.
Default is 0.
RW 54
SEMI E5-1104 © SEMI 1982, 2004 54
Attribute Name Description Access Format Value
“ExecChgCtrl” Specifies change control requirements for recipe.
Default is 0. Combinations of bits are used to
indicate multiple permissions.
RW 10 Binary.
Bitwise (MSB = 8):
1 - the recipe body may be changed
2 - change notification required
4 - recipe may be selected after
change,
8 - most recent parameter settings
shall be saved.
Any combination of these four bits
is allowed
“ExtRef” A list of all recipe specifiers as referenced within
the recipe. Explicit versions not required. Reset
when the recipe is created, updated, and verified.
RO 00 List of items of format 20.
“LinkList” A complete list of recipe specifiers found in the
ExtRef
attribute of a main recipe and all of its
subrecipes, with duplicates removed and all
versions explicitly determined. Set for the main
recipe when linked
. Reset when the recipe is
originated or verified. Required for multi-part
recipe support.
RO 00 List of items of format 20.
“LinkParam” A list of all variable parameter definitions
contained in the Parameters
attribute of a main
recipe and all of its subrecipes, with duplicates
removed. Reset when the recipe is created,
updated, or verified. Set when the recipe is linked.
Required for variable parameter support.
RO 00 List of parameter definition
structures composed of parameter
name, initial value, and restrictions.
“Parameters” A list of variable parameter definitions contained in
the recipe. Reset when the recipe is created,
updated, and verified. Set when the recipe is
verified. Required only for variable parameter
support.
RO 00 List of parameter definition
structures composed of parameter
name, initial value, and restrictions.
“SrcRecID” Identifier of the source form recipe from which a
derived object form recipe is derived. Value
determined by the verifier of the recipe. Required
only for support of derived object form recipes.
RO 20
“VerificationID” Identification code set by the verifier of the recipe.
May be used to determine out-of-date formats that
need to be re-verified.
RO 20 Maximum length is 40 characters.
“UD_” Non-standard attribute defined by supplier or user.
Asterisk indicates the part of the attribute name that
is provided in this definition. Shall be preserved
exactly except by the entity that defined it.
RO 10, 11, 20,
3(), 4(), 5()
Text form is limited to a maximum
of 80 characters.
Table 17 Process Job Attributes
Attribute Name Description Access Format Related
Data Item
Value
“ObjType” Name of the Object Type RO 20 - “PROCESSJOB”
“ObjID” Identifier of a Process Job RO 20 PRJOBID -
“PRMt1Type” Type of material being processed RO 20 - allowed values:
“css”
“wfr”
“PRMt1NameList” Process Material Name, identifies material
being processed by a job, which could be
more than one item.
RO 20 - (list of) Text
SEMI E5-1104 © SEMI 1982, 2004 55
Attribute Name Description Access Format Related
Data Item
Value
“RecID” Object Specifier of Recipe used by a Process
Job, see SEMI E39 and SEMI E42
RO 20 - -
“PRRecipeMethod” Indicates any special handling for a Process
Job’s Recipe
RO 20 - allowed values:
“STANDARD”
“USETUNING”
“PRJobState” Indicates the current state of a Process Job.
The state of a job may be a combination of
sub-states and concurrent states.
RO 20 - Composed from the set:
“WAITINGFOR JOB”
“JOBQUEUED”
“JOB CANCELLED”
“JOBACTIVE”
“SETUP”
“WAITINGFORSTART”
“PROCESSING”
“NOTPAUSED”
“PAUSING”
“PAUSED”
“NOTSTOPPING”
“STOPPING”
“NOTABORTING”
“ABORTING”
“PROCESSCOMPLETE”
“JOBCOMPLETE”
“PRProcessStart” Processing should start automatically after Job
is defined when this Boolean is set TRUE
RO 11 - Boolean
Table 18 Recipe Executor Attribute Definition
Attribute Name Description Access Rqmt Form
“ObjType” The object type RO Y Text = “RcpExec”
“ObjID” Text RO Y Text
“DefaultNamespace” The name of an executing agent’s name-space used
for all hardware-dependent and other agent-specific
recipes.
RW Y Text
“ProdApprove” The minimum value of a recipe’s approval level
accepted during productive and standby states.
Required for SEMI E10 support only.
RW N Unsigned integer
“ProdCertify” The minimum value of a recipe’s certification level
accepted during productive and standby states.
Required for SEMI E10 support only.
RW N Unsigned integer
“RunCycleUnit” The process unit on which the calculation of the
estimated value of the recipe generic attribute
EstRunTime is based.
RO N Case-sensitive formatted text
composed of a unit of measure and
an optional numeric suffix.
Compliant with SEMI E5, Section
12.
“RecipeSelectID” A list of recipe identifiers for the currently selected
recipes.
RO Y List of formatted text.
“RecipeSelect-
Parameters”
A list of all parameter definitions in effect for the ith
recipe identifier in RecipeSelectID. The maximum
value for i is determined by the equipment supplier
as the maximum number of recipes which may be
selected at the same time. Required if variable
parameters are supported.
RO N List of structures composed of
parameter name, parameter value,
parameter restriction.