semi合集-English.pdf - 第2865页

SEMI E105-0701 © SEMI 2000, 2001 16 R2-3 Scenario 3 — Di spatch Li st Ba sed Sched uler /Dispa tche r, Stoc ker is No t mana ged by Sche duli ng Co mponent R2-3.1 Dispatch list based. EQ1- >EQ2. After lot 1 process in…

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SEMI E105-0701 © SEMI 2000, 200115
FO checks the logistic condition.
(1) Start time of Lot-1 on EQ2 (10:00).
(2) EQ2 is ready to load.
(3) Lot-1 has arrived at Operation 20.
If all conditions are OK, FO issues the Macro Command to MTSC
(1) Source : Port-1 of EQ1
(2) Destination : Port-1 of EQ2
(3) Carrier-1
10: P1 Start
11: P1 Complete
At 09:45
FO checks the condition to issue
Macro Command to MTSC.
(1) Lot-1 start time is 10:00
(2) It is 9:40 (Before 09:45)
(3) Next EQ2 is ready to load.
(4) Lot-1 has arrived at Operation 20.
FO decides to keep Lot-1 on Port-1
of EQ1 until 09:45.
8: Macro Command (Carrier 1)
9: Complete
Factory
Operations
Scheduling
Component
Material Transport
& Storage
Production
Machine (EQ2)
Production
Machine(EQ1)
Figure R2-4
Scenario Case 2 Continued
SEMI E105-0701 © SEMI 2000, 2001 16
R2-3 Scenario 3 — Dispatch List Based Scheduler/Dispatcher, Stocker is Not managed by Scheduling Component
R2-3.1 Dispatch list based. EQ1->EQ2. After lot 1 processing on EQ1 is finished, Scheduler assigns lot 1 to EQ2.
FO checks the EQ2 port status and finds the available port. FO makes the logistic decision to transfer lot 1 from
EQ1 to EQ2 directly. Scheduler does not assign lots to Stocker. In this scenario 3, the direct transfer “from EQ1 to
EQ2” is described.
Stocker 1
Production
EQ1
Stocker 2
Production
EQ2
Operation 1000 Operation 2000
lot 1 in C1
AGV 1 OHT 1
OHS 2
S/D assigns lot 1 to EQ2.
FO decides to transfer lot 1 to EQ2
Operation Description Step MES
Factory
Ops
Scheduler /
Dispatcher
MTSC
Production
Machine
EQ1
Production
Machine
EQ2
AMHS
Equipment
1
Inform State Transition (resource:EQ1, from: Down to:Available)
2
Inform (resource:EQ1LP1, to :Available)
3
Inform (resource:EQ1LP2, to :Available)
Dispatch Decision for EQ1
4
whatNextForResourceByCount (resource:EQ1)
5
Reply Production Activity (resource:EQ1, material:lot 1)
Port Reservation for EQ1LP1
6
Get Port Reservation (machine:EQ1, port:EQ1LP1, carrier:C1)
7
Production Job Setup (get Lot Info, verify job properties)
8
Reply Port Reservation (port:EQ1LP1, carrier:C1)
Request Transport Job for C1
from Stocker to EQ1
9
Request Transport Job (carrier:C1 dest:EQ1LP1, deadline: , priority)
10
Reply Transport Job (TJ1)
Request Production Job for
C1
11
Request Production Job (Lot:lot 1, machine:EQ1)
12
Reply Production Job (ProdJ1)
Determine EQ1 Lot to be
Processed after L1
13
whatNextForResourceByCount (resource:EQ1)
14
Reply Production Activity (resource:EQ1, material:L2)
Move C1 via AMHS
15
MTSC controls movement of TJ1 via AMHS
16
TransportJob State Change (job:TJ1, from:Queued, to:Executing)
17
<> MTSC publishes location updates as C1 moves through
AMHS
Port Reservation for EQ1LP2
18
Get Port Reservation (machine:EQ1, port:EQ1LP2, carrier:C2)
19
Production Job Setup (get Lot Info, verify job properties)
20
Reply Port Reservation (port:EQ1LP2, carrier:C2)
Request Transport Job for C2
from Stocker to EQ1LP2
21
Request Transport Job (carrier:C2 dest:EQ1LP2)
22
Reply Transport Job (TJ2)
Request Production Job for
C1
23
Request Production Job (Lot:L2, machine:EQ1)
24
Reply Production Job (ProdJ2)
25
TransportJob State Change (job:TJ2, from:Queued, to:Executing)
26
TransportJob State Change (job:TJ1, from:Executing, to:Completed)
SEMI E105-0701 © SEMI 2000, 200117
Operation Description Step MES
Factory
Ops
Scheduler /
Dispatcher
MTSC
Production
Machine
EQ1
Production
Machine
EQ2
AMHS
Equipment
27
<> FO updates EQ1LP1 port availability status
Login lot 1 & change EQ1
status
28
Login lot 1, change equipment status, etc.
29
Notify Carrier C1 Arrives at EQP1
Process lot L1
30
ProductionJob State Change (job:ProdJ1, from:Queued, to:Executing)
31
L1 Processing
32
TransportJob State Change (job:TJ2, from:Executing, to:Completed)
33
<> FO updates EQ1LP2 port availability status
Logout lot 1 & change EQ1
status
34
Logout lot 1, change equipment status, etc.
35
ProductionJob State Change (job:ProdJ1, from:Executing, to:Completed)
36
Notify WIP State Change
Process lot 2
37
ProductionJob State Change (job:ProdJ2, from:Queued, to:Executing)
38
L2 Processing
Login lot 2 & change EQ1
status
39
Login lot 2, change equipment status, etc.
Disposition Decision for C1
40
whatNextForMaterialGroupByCount (lot 1)
41
Reply (ProductionActivity on EQ2, MaterialGroup:lot 1)
Port Reservation for EQ1LP1
42
Get Port Reservation (machine:EQ2, port:EQ2LP1, carrier:C1) (*1)
43
Production Job Setup (get Lot Info, verify job properties)
44
Reply Port Reservation (port:EQ2LP1, carrier:C1)
Request Transport Job for C1
45
Request Transport Job (carrier:C1 source EQ1LP1, dest:EQ2LP1)
46
Reply Transport Job (TJ3)
Request Production Job for
C1
47
Request Production Job (Lot:L1, machine:EQ2)
48
Reply Production Job (ProdJ3)
Transport Job to Store C1
Complete
49
TransportJob State Change (job:TJ3, from:Executing, to:Completed)
(*1) FO checks port status on tool. Finds port available. Delivers lot directly to EQ2.