semi合集-English.pdf - 第5562页

SEMI P10-0705 © SEMI 1990, 2005 57 <xs:element name="DefectSizeClIsoRep" type="xs:double"/> </xs:sequence> <xs:sequence minOccurs="0"> <xs:element name="DefectSizeD…

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SEMI P10-0705 © SEMI 1990, 2005 56
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartOpcDefinition"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndOpcDefinition"/>
</xs:complexType>
<xs:complexType name="DefectDefinitionType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectQualityId" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="VisualInspectionOk"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="VisualInspectionReqd"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="VisualInspCriteria"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="AutoInspectionReqd"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DieToDieInspection"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSize" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSizeCl" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSizeDk" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSizeClAdj" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSizeClAdjRep"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSizeDkAdj" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSizeDkAdjRep"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSizeClIso" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
SEMI P10-0705 © SEMI 1990, 2005 57
<xs:element name="DefectSizeClIsoRep"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSizeDkIso" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSizeDkIsoRep"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectDensity" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectCount" type="xs:integer"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectCountRep" type="xs:integer"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectiveDieDensity"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectiveDieCount"
type="xs:integer"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectiveDieCountRep"
type="xs:integer"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PercentDefectiveDie"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="EdgeRoughness" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="InspectionArea" type="WindowType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="InspectionAreaExclude"
type="WindowType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ScratchSizeFront"
type="xs:double"/>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ScratchInspArea"
type="WindowType"/>
<xs:sequence minOccurs="0"
maxOccurs="unbounded">
<xs:element name="ScratchInspExclude"
type="WindowType"/>
</xs:sequence>
</xs:sequence>
SEMI P10-0705 © SEMI 1990, 2005 58
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ScratchSizeBack" type="xs:double"/>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ScratchInspArea"
type="WindowType"/>
<xs:sequence minOccurs="0"
maxOccurs="unbounded">
<xs:element name="ScratchInspExclude"
type="WindowType"/>
</xs:sequence>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="GoodFields" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="DefectEquipReqd" type="xs:string"/>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="EquipSiteReqd"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectInspModeReqd"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectInspPixelSizeReqd"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="DefectType"
type="xs:string"/>
<xs:element name="DefectInspSensitivityReqd"
type="xs:string"/>
<xs:sequence minOccurs="0"
maxOccurs="unbounded">
<xs:element name="BinSize"
type="xs:string"/>
<xs:element name="SeverityCriterionReqd"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DefectSetupFileNameReqd"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DatabaseInspection"
type="DatabaseInspectionType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="RepairDefinition"
type="RepairDefinitionType"/>
</xs:sequence>
</xs:sequence>