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SEMI E32-0997 © SEMI 1994 , 1997 43 G GEM............................................................................................................................ ........................................ 1.2, 1.3 GetA…

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SEMI E32-0997 © SEMI 1994, 1997 42
Index
NOTE: The numbers in this index represent the section, table, and/or figure that contains the corresponding subject.
A
abort ................................................................................................................4.1.1, 4.2.2, 4.3, 4.3.3, 4.4, 4.4.3, A1-3.2
ABORTING.................................................................................................4.3.1, 4.3.2, 4.3, 4.3.3, 4.4, A1-3.1, A1-3.2
Acquire.................................................................................................................................................................... 5.4.3
active transfer partner.................................................................................................................................... 2.0, A1-3.1
AGV.............................................................................................................................................. 4.1.1, A1-4.1–A1-4.4
alarm .......................................................................................................................................................................... 1.2
allocate...........................................................................................................................................................4.1.1, 4.2.1
allocated..................................................................................................... 4.1.1, 4.2.1, 4.2.2, Table 4.1, A1-1.1, A1-1
allocation........................................................................................................................................................4.1.1, 4.2.1
atomic transfer ...................................... 2.0, 3.1, 4.1.1–4.3.1, 4.3.2, 4.3.3–4.4.1, 4.2.2, 4.4.3, 5.1.2, 5.2.1, 5.4.1, 5.4.2,
...............................................................................................................................Table A1-1, A1-3.1, A1-4.1–A1-4.3
ATOMIC TRANSFER ACTIVE........................................................................................4.2.2, 4.2.3, Table 4.2, 4.3.3
Atomic Transfer Complete............................4.2.2, Table 4.1, 4.2.3, Table 4.2, Table 4.4, 4.4.3, 5.2.1, A1-4.1, A1-4.2
ATOMIC TRANSFER CREATED................................................................................................................. Table 4.2
ATOMIC TRANSFER QUEUED .........................................................................................4.2.3, Table 4.2, Table 4.4
Atomic Transfer Started........................................................................ 4.2.1–4.2.1.2, Table 4.2, 4.4.3, A1-4.1, A1-4.2
AttrData .................................................................................................................................................................. 4.4.2
Attribute...........................................................................................................................3.2, 4.2.1.1, 4.4.1, 4.4.2–4.4.3
AttrStatus ................................................................................................................................................................... 3.2
AWAIT JOB COMPLETION .......................................................................................................................4.2.2, 4.3.2
AWAITING TRANSFER PARTNER............................................................................ 4.2.3, Table 4.2, 5.2.1, A1-3.2
C
commit .................................................................................................................................................................... 4.1.1
committed ......................................................................4.2.1.2, 4.2.3, Table 4.2, Table 4.4, 4.4.3, 5.3, A1-4.1, A1-4.2
Committed To Transfer.................................................................. 4.2.1.2, Table 4.2, Table 4.4, 4.4.3, A1-4.1, A1-4.2
compound.........................................................................................................................2.0, 4.1.2, 4.1.3, 4.1.7, 4.2.1.1
compound transfer.........................................................................................................................2.0, 4.1.2, 4.1.3, 4.1.7
concurrent ......................................................................................................................................................4.3.2, 4.3.3
D
deallocate .......................................................................................................................................................4.1.1, 4.2.3
deallocated .............................................................................................................................................................. 4.1.7
deallocation............................................................................................................................................................. 4.1.7
dynamic................................................................................................................................................2.0, 4.1.4, 4.2.1.1
dynamic port .............................................................................................................................................................. 2.0
E
E30............................................................................................................................................................................. 1.3
E5............................................................................................................................................................................... 1.3
EQName...............................................................................................................................................4.4.2, 4.4.3, 5.4.2
ErrorCode.......................................................................................................................................................4.4.2, 4.4.3
ErrorText................................................................................................................................................................. 4.4.2
event.................4.2.1-4.2.1.2, Table 4.1, Table 4.2, 4.3.1, Table 4.4, 4.4.1, 4.4.2, 4.4.3, 4A.1.2, A3.2, A1-4.1, A1-4.2
exchange of cassettes ........................................................................................................................................... A1-4.2
Extend..................................................................................................................................................................... 5.4.3
SEMI E32-0997 © SEMI 1994, 199743
G
GEM.................................................................................................................................................................... 1.2, 1.3
GetAttribute ...................................................................................................................................................4.4.2, 4.4.3
H
handoff................................................... 3.1, 4.1.1–4.1.6, 4.2.1.2, 4.2.3, 4.3.1, Table 4.4, 4.4.2, 5.1, 5.1.1, 5.2.1, 5.4.3
HOCancelAccept .................................................................................................................................................... 5.4.3
HOCancelReady......................................................................................................................................5.3, 5.4.1, 5.4.3
HOCmd..........................................................................................................................................................5.4.2, 5.4.3
HOCmdParm..................................................................................................................................................5.4.2, 5.4.3
HOCommand...................................................................................................5.2.1, 5.4.1, 5.4.2, 5.4.3, A1-4.1–A1-4.3
HOErrorCode.................................................................................................................................................5.4.2, 5.4.3
HOErrorText........................................................................................................................................................... 5.4.2
HOHalt.................................................................................................................................................5.4.1, 5.4.2, 5.4.3
HOReady..............................................5.2.1, Figure 5.1, Figure 5.2, 5.3, 5.4.1, 5.4.2, A1-3.2, A1-4.1, A1-4.2, A1-4.4
HOStatus................................................................................................................................................................. 5.4.2
HOStatusCode......................................................................................................................................................... 5.4.2
HOVerify ..................................................................................................... 5.2.1, 5.4.2, 5.4.3, A1-4.1, A1-4.2, A1-4.4
HOVerify Response...................................................................................................................... 5.2.1, A1-4.1, A1-4.2
human transfer agent............................................................................................................................................ A1-4.5
I
INIT .............................................................................................................................................. A1-1.1, Table A1-1.2
input port.................................................................................................................................................................... 2.0
interactive............................................................................................................................2.0, 4.1, 4.1.1, 5.4.2, A1-4.2
interactive transfer........................................................................................................................ 2.0, 4.1, 4.1.1, A1-4.2
interference ...................................................................................................................................................... 2.0, 4.2.3
interfering................................................................................................................................................................... 2.0
L
linked lithography................................................................................................................................................ A1-4.4
location....................................................................................1.2, 2.0, 3.2, 4.1.1, 4.1.6, 4.2.2, 4.2.3, 4.4.2, 4.4.3, 5.4.2
M
macro level......................................................... 2.0, 3.1, 4.1.1, 4.2.1–4.2.1/Figure 4.3, 4.4, 5.1.2, 5.2.1, 5.1.2, A1-3.1
material location..............................................................................................2.0, 4.1.1, 4.1.7, 4.2.3, 4.4.3, 5.4.2, 5.4.3
micro command ................................................................................................................................................... A1-3.2
micro level .................................................................................... 2, 3.1, 3.3, 4, 4.1.1, 4.1.5, 4.2.1.2, Table 4.2, 5 (all)
micro move ....................................................................................................................................................5.1.1, 5.2.1
MoveTo................................................................................................................................................................... 5.4.3
moving ...........................................................................................................................................................2.0, 4A.1.2
N
NOT ABORTING........................................................................................................4.3.2, Table 4.3, 4.3.3, Table 4.4
NOT PAUSED........................................................................... 4.3.2–Table 4.3, 4.3.3, Table 4.4, A1-1.1, Table A1-1
NOT STOPPING ................................................................................................................................... 4.3.2, Table 4.3
O
ObjectID.........................................................................................................................................................4.4.2, 4.4.3
ObjID ........................................................................................................................................................Tables 4.5-4.7
ObjType ................................................................................................................................ 4.4.2- 4.43, Tables 4.5-4.7
output port........................................................................................................................................................ 2.0, 4.1.7
SEMI E32-0997 © SEMI 1994, 1997 44
ownership............................................................................................................................................ 2.0, 4.1.2, A1-4.3
P
parallel .......................................................................................1.3, 3.1, 4.1.3/ 4.1.4, 4.1.7, 4.1.6, 5.1.2, 5.2.2, 4.A.1.2
passive transfer.................................................................................................................... 2.0, A1-4.1, A1-4.3, A1-4.5
passive transfer partner ................................................................................................................................. 2.0, A1-4.1
pause .........................................................................................4.2.2, 4.3–4.3.1, 4.3.2, 4.3.2, Table 4.33, 4.4.3, A1-1.1
PAUSED........................................................................... 4.3.1, 4.3.2, Table 4.3, 4.3.3,Table 4.4, A1-1.1, Table A1-1
PAUSING ............................................................................... 4.3.1, 4.3.2, Table 4.3, 4.3.3, A1-1.1/ Table A1-1, A1-3
physical transfer............................................................................................................................2.0, 4.0, 4.2.1.2, 5.1.2
Pick ......................................................................................................................................................................... 5.4.3
Place................................................................................................................................3.0, 4.2.2, 4.3.1, 5.4.3, 4.A.1.2
port............................................................................................. 2.0, 3.2, 4.1.1–4.2.1.2, 4.2.2–4.3.1, 4.3.2, 4.3.3, 5.2.1,
......................................................................................................... 5.4.2, 5.4.3, A1-1–4A1.2, A1-3.1, A1-4.1–A1-4.3
PORT IDLE ......................................................................................................................................................... A1-3.1
port resources.......................................................................................................................................4.1.1, 4.2.2, 4.2.3
primary transfer partner ..........................4.1, 4.1.1, 4.2.3, Table 4.2, 4.4.3, 5.2.1, 5.4.1, 5.4.2, A1-4.1, A1-4.2, A1-4.4
program................................................................................................................................................................ A1-4.3
Q
queue.......................................................................4.1.6, 4.2.1.1, 4.2.2, Table 4.1, 4.2.3, 4.3.1, 4.3.2, Table 4.3, 4.4.3
queuing.................................................................................................................................................4.1.6, 4.2.2, 4.4.3
R
receiving port................................................................................................................................................ 2.0, A1-4.1
recipe.......................................................................................................................................4.1.5, 4.2.1.1, 4.4.2, 5.2.1
Release..........................................................................................................................4.1.1, 4.1.6, 4.2.3, 5.4.3, A1-1.1
report................................................................................................................................................4.2.2, 4.4.3, 4.A.1.2
resource..........................................................................................................................................................4.1.1, 4.1.7
resources ........................................................................................................................................................4.1.1, 4.1.4
RESTORE.................................................................................. 4.1.1–4.1.7, 4.1–4.2.2, 4.2.3, A1-3.1, A1-4.1, A1-4.2,
Retract..................................................................................................................................................................... 5.4.3
Retrieve................................................................................................................................................................... 5.4.3
robot.........................................................................................2.0, 3.0, 3.2, 4.1.4, 5.4.3, A1-1, 4A.1.2, A1-4.1, A1-4.3
S
secondary transfer partner.............................................................................4.1.1, 4.1.5, 4.2.1.1, 4.2.1.2, 5.4.2, A1-4.2
SECS...................................................................................................................................................1.2, 1.3, 4.4, 5.2.2
SECS-I .................................................................................................................................................................... 5.2.2
SECS-II...................................................................................................................................... 1.2, 1.3, Figure 1.1, 4.4
SELECT ATOMIC TRANSFER...............................................................................................4.2.2, Table 4.1.1, 4.3.2
sending port................................................................................................................................................................ 2.0
sequence...................................................................................4.1, 4.1.5, 4.1.7, 4.2.2, 4.2.3, 5.1.1, 5.1.2, 5.4.3, A1-4.3
sequential ................................................................................................................................................... 4.1.3, A1-4.3
sequential moves.................................................................................................................................................. A1-4.3
setup..................................................2.0, 4.1.1–4.1.5, 4.2.1–4.2.1.2, 4.2.3–4.3.1, 4.3.3, 5.2.1, A1-3.1, A1-4.1, A1-4.2
static.......................................................................................................................................2.0, 4.1.4, 4.2.3, Table 4.2
static port..........................................................................................................................................2.0, 4.2.3, Table 4.2
StatusCode .............................................................................................................................................................. 4.4.2
stop..........................................................................4.1.1, 4.2.2, 4.3, 4.3.1–4.3.2, 4.3.3, Table 4.4, 4.4.3, 5.4.1, A1-3.2