semi合集-English.pdf - 第2431页
SEMI E86-0200 © SEMI 1999 , 2000 31 }; // end Skill // -------------------------- SkillRequirement -------------------------- interface SkillRequirement : NamedEntity { void setDescription (in string description) raises …
SEMI E86-0200 © SEMI 1999, 2000 30
TimeStamp certificationDate ( ) raises (FrameworkErrorSignal);
}; // end QualificationData
}; // end PersonManagement
// Skill Management Component
module SkillManagement {
// -------------------------- SkillManager --------------------------
interface SkillManager : ComponentManager {
exception SkillDuplicateSignal {string skillName;};
exception SkillNotAssignedSignal {string skillName;};
exception SkillRemovalFailedSignal {string skillName;};
exception SkillNotFoundSignal {string skillName;};
Skill createSkillNamed (in string skillName)
raises (FrameworkErrorSignal, SkillDuplicateSignal);
void removeSkillNamed (in string skillName)
raises (FrameworkErrorSignal, SkillNotAssignedSignal,
SkillRemovalFailedSignal);
SkillSequence skills ( ) raises (FrameworkErrorSignal);
Skill findSkillNamed (in string skillName)
raises (FrameworkErrorSignal, SkillNotFoundSignal );
}; // end SkillManager
// -------------------------- Skill --------------------------
interface Skill : NamedEntity {
exception SkillRequirementDuplicateSignal {string requirementName;};
exception SkillRequirementRemovalFailedSignal
{SkillRequirement aRequirement;};
exception SkillRequirementNotFoundSignal {string requirementName;};
void setSkillCategories (in CategorySequence Categories)
raises (FrameworkErrorSignal);
CategorySequence getSkillCategories ( ) raises (FrameworkErrorSignal);
SkillRequirement createSkillRequirementNamed (in string requirementName)
raises (FrameworkErrorSignal, SkillRequirementDuplicateSignal);
void removeSkillRequirement (in SkillRequirement aRequirement)
raises (FrameworkErrorSignal, SkillRequirementRemovalFailedSignal,
SkillRequirementNotFoundSignal);
SkillRequirement findSkillRequirementNamed (in string requirementName)
raises (FrameworkErrorSignal, SkillRequirementNotFoundSignal);
ProcessCapabilitySequence processCapabilities ( )
raises (FrameworkErrorSignal);
RequirementSequence requirements ( ) raises (FrameworkErrorSignal);
SEMI E86-0200 © SEMI 1999, 200031
}; // end Skill
// -------------------------- SkillRequirement --------------------------
interface SkillRequirement : NamedEntity {
void setDescription (in string description) raises (FrameworkErrorSignal);
string getDescription ( ) raises (FrameworkErrorSignal);
void setDesignator (in string designator) raises (FrameworkErrorSignal);
string getDesignator ( ) raises (FrameworkErrorSignal);
void setRequiredResult (in string result) raises (FrameworkErrorSignal);
string getRequiredResult ( ) raises (FrameworkErrorSignal);
TimeWindow effectivity ( ) raises (FrameworkErrorSignal);
}; // end SkillRequirement
}; // end SkillManagement
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for
any particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These standards are subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
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the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E87-0705 © SEMI 1999, 2005 1
SEMI E87-0705
SPECIFICATION FOR CARRIER MANAGEMENT (CMS)
This specification was technically approved by the global Information & Control Committee. This edition
was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was
available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published September
1999; previously published March 2004.
1 Purpose
1.1 This document provides a standardized behavior for host view communication with production equipment
during the coordination, execution, and completion of automated and manual carrier transfers to and from the
equipment and, if it exists, its internal buffer space.
2 Scope
2.1 This is a standard that covers host and equipment communication for SEMI E15.1 300 mm load ports.
2.2 The scope of this document is to define standards that facilitate the host’s knowledge and role in automated and
manual carrier transfers, as well as internal buffer equipment carrier transfers. Specifically, this document provides
state models and scenarios that define the host interaction with the equipment for the following:
Carrier transfer between AMHS vehicles and production equipment load ports.
Carrier transfers to/from production equipment internal buffer space.
Equipment and load port access mode switching.
Carrier to load port association.
CarrierID verification and Carrier slot map verification.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This standard applies to semiconductor equipment with SEMI E15.1 compliant load ports. It may also be
applied to other manufacturing equipment that supports automated carrier transfers, and/or contains an internal
buffer. This standard is intended to be used for production equipment. It may or may not be applied to other types of
equipment. Also, stocker load ports are not addressed by this standard.
4 Referenced Standards and Documents
4.1 SEMI Standards
SEMI E15 — Specification for Tool Load Port
SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E41 — Exception Management (EM) Standard
SEMI E53 — Event Reporting
SEMI E62 — Provisional Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface
SEMI E90 — Specification for Substrate Tracking