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SEMI E1.3-0697 © SEMI 1983, 2002 1 SEMI E1.3-0697 (Reapproved 1102) STANDARD FOR 125 mm PLASTIC AND METAL WAFER CARRIERS, GENERAL USAGE This standard was technicall y approved by the Global Physical In terfaces and Carri…
SEMI E1.2-0697 © SEMI 1983, 2002 2
Figure 3
100 mm Plastic and Metal Wafer Carrier General Usage
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These standards are subject to change without notice.
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respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
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the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E1.3-0697 © SEMI 1983, 2002 1
SEMI E1.3-0697 (Reapproved 1102)
STANDARD FOR 125 mm PLASTIC AND METAL WAFER CARRIERS,
GENERAL USAGE
This standard was technically approved by the Global Physical Interfaces and Carriers Committee and is the
direct responsibility of the North American Physical Interfaces and Carriers Committee. Current edition
approved by the North American Physical Interfaces and Carriers Committee on July 21, 2002. Initially
available at www.semi.org October 2002; to be published November 2002. Orignally published in 1983;
previously published June 1997.
Figure 4
Reference
Metal
Carrier
with
Type I
Crossbar
Plastic
Carrier
with
Type II
Crossbar
Overall Dimensions
A1 See section for 20 or 25
capacity carriers.
X X
A2 152.40 mm (6.000 inch) max. X X
A3 146.05 mm (5.75 inch) max. X X
Capacity
B1 See section for 20 or 25
capacity carriers.
X X
B2 See section for 20 or 25
capacity carriers.
X X
B3 See section for 20 or 25
capacity carriers.
X X
Detail Dimensions
C1 (C3) + 0.50 mm (0.020 inch)
min.
X X
C2 9.53 mm (0.375 inch) min./
12.70 mm (0.500 inch) max.
X X
C3 2.67 mm (0.105 inch) max./
1.38 mm (0.055 inch) min. or
2.03 mm (0.080 inch) max./
1.38 mm (0.055 inch) min.
X
N/A
N/A
X
C4 128.5 mm ± 1.0 mm
(5.06 inch ± 0.040 inch)
X X
C5 See section for 20 or 25
capacity carriers.
X X
C6 See section for 20 or 25
capacity carriers.
X X
C7 3.56 mm + 0.50 mm – 0.00
mm (0.140 inch + 0.000 inch –
0.015 inch)
by 4.32 mm ± 0.50 mm
(0.170 inch ± 0.020 inch) high
X X
C8 3.96 mm + 0.50 mm – 0.00
mm (0.156 inch + 0.020 inch –
0.000 inch)
X X
C9 10.11 mm ± 0.25 mm
(0.398 inch ± 0.010 inch)
X X
Machine Fit Specifications
D1 14.54 mm ± 0.25 mm
(
0.5725 inch ± 0.010 inch
)
or
X X
Figure 4
Reference
Metal
Carrier
with
Type I
Crossbar
Plastic
Carrier
with
Type II
Crossbar
13.97 mm ± 0.25 mm
(0.550 inch ± 0.010 inch)
N/A X
D2 4.76 mm (0.188 inch) min. X X
D3 1.57 mm (0.062 inch) max. X X
D4 68.25 mm ± 0.25 mm
(2.687 inch ± 0.10 inch)
X X
D5 Crossbar specifications X X
D5a 25.40 mm (1.000 inch) max. NA X
D5b 6.35 mm + 0.00 mm – 0.38
mm (0.250 inch + 0.00 inch –
0.15 inch)
X X
D6 Track clearance specifications X X
D6a 66.68 mm (2.625 inch) min. X X
D6b 102.11 mm (4.020 inch) min. X X
D6c 45° min. X X
D7 1.57 mm (0.062 inch) min. X X
Wafer Tilt 0.64 mm (0.025 inch) max. X X
The following applies to 20-capacity carriers with
6.35 mm spacing:
A1 150.37 mm (5.920 inch) max.
B1 20 capacity
B2 6.35 mm ± 0.25 mm
(0.250 inch ± 0.010 inch)
B3 120.65 mm ± 0.25 mm
(4.750 inch ± 0.010 inch)
C5 132.69 mm ± 0.38 mm
(5.224 inch ± 0.015 inch)
C6 140.87 mm ± 0.25 mm
(5.546 inch ± 0.010 inch)
The following applies to 25-capacity carriers with
4.76 mm spacing:
A1 144.02 mm (5.670 inch) max.
B1 25 capacity
B2 4.76 mm ± 0.25 mm
(0.1875 inch ± 0.010 inch)
B3 114.30 mm ± 0.25 mm
(4.500 inch ± 0.010 inch)
SEMI E1.3-0697 © SEMI 1983, 2002 2
Figure 4
Reference
Metal
Carrier
with
Type I
Crossbar
Plastic
Carrier
with
Type II
Crossbar
C5 130.66 mm ± 0.38 mm
(5.144 inch ± 0.015 inch)
C6 134.52 mm ± 0.25 mm
(5.296 inch ± 0.010 inch)
Usage Note: Because of the range of wafer carrier designs and wafer
carrier feature tolerances allowed by this standard, and because of the
range of wafer shapes and tolerances allowed by the wafer
dimensional standards, not every possible SEMI Standards wafer
carrier is compatible with every possible SEMI Standard wafer.
Please verify the compatibility of your specific wafer and carrier with
the respective vendors.
Figure 4
125 mm Plastic & Metal Wafer Carrier — General Usage