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SEMI T6-0697 © SEMI 1997, 2004 30 Limits set on each measurement of the specified productcharacteristic or manufacturing process so that any single test whose value falls outside these l imits causes the product or proce…

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SEMI T6-0697 © SEMI 1997, 2004 29
31 Mean
32 Minimum Value
The least or smallest value; the allowed lower limit
33 Maximum Value
The largest value; the allowed upper limit
AD Anderson Darling Test
CF Cochran's Procedure
CS Chi-Square Test
See Appendix 2 EC Equivalent Cpk (Add definition)
See Appendix 2 PE Percentile
See Appendix 2 GM Geometric Mean
See Appendix 2 GS Geometric Sigma
HG Histogram
See Appendix 2 HC Histogram Class Count (Count of classes or bars)
See Appendix 2 HS Histogram Start (Left side of first class or bar)
See Appendix 2 HW Histogram Width (Width of class or bar)
KS Kolmogrov-Smirnov Test
See Appendix 2 OC Outlier Count
See Appendix 2 PK Peak Value of Distribution Curve
SK Moment Tests, Skewness and Kurtosis (Weighted Average)
SW Shapiro-Wilk Test
ZZ Mutually Defined
M STA02 739 Measurement Value M R 1/20
The value of the measurement.
O STA03 C001 Composite Unit of Measure O
To identify a composite unit of measure (see figures in appendix for example of use).
M C00101 355 Unit or Basis for Measurement Code M ID 2/2
Code specifying the units in which a value is being expressed, or manner in which a
measurement has been taken.
Refer to 003050 Data Element Dictionary for acceptable code values.
O C00102 1018 Exponent O R 1/15
Power to which a unit is raised.
O C00103 649 Multiplier O R 1/10
Value to be used as a multiplier to obtain a new value.
O STA04 738 Measurement Qualifier O ID 1/3
Code identifying a specific product or process characteristic to which a meas. applies.
Refer to 003050 Data Element Dictionary for acceptable code values.
O STA05 737 Measurement Reference ID Code O ID 2/2
Code identifying the broad category to which a measurement applies.
H
R
Historical Result
LS Lot Status
LT Lot Limits
Limits set on test results from all product contained in a single
shipment (which may involve any multiple or fraction
oftransportation carrier units) to one customer.
TS Single Test Limits
SEMI T6-0697 © SEMI 1997, 2004 30
Limits set on each measurement of the specified
productcharacteristic or manufacturing process so that any single test
whose value falls outside these limits causes the product or process
to be declared out-of-specification.
O STA06 740 Range Minimum O R 1/20
The value specifying the minimum of the measurement range.
O STA07 741 Range Maximum O R 1/20
The value specifying the maximum of the measurement range.
SEMI T6-0697 © SEMI 1997, 2004 31
Segment: REF Reference Numbers
Level: Detail
Loop: STA
Usage: Optional
Max Use: 10
Purpose: To specify identifying numbers.
Syntax Notes: 1 At lease one of REF02 or REF03 is required.
Data Element Summary
SEMI USE: Ref. Des. Data Element Name Attributes
M REF01 128 Reference Number Qualifier M ID 2/2
Code qualifying the Reference Number.
Refer to 003050 Data Element Dictionary for acceptable code values.
X REF02 127 Reference Number X AN 1/30
Reference number or identification number as defined for a particular Transaction Set,
or as specified by the Reference Number Qualifier.
X REF03 352 Description X AN 1/80
A free-form description to clarify the related data elements and their content.