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SEMI E135-0704 © SEMI 2004 4 shall continue until the RF o utput power has stabilized, which typically takes a few milli-seconds. An example of data collected from a Digital Oscilloscop e for a RF generator test is shown…

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Sampler, and connect the output of the RF Signal
Sampler to the High-Power RF Dummy Load. If any
coaxial cable assemblies or adapters are used to make
any of the connections between the output of the DUT
and the High-Power RF Dummy Load, they shall have
power handling capability that is consistent with the
maximum output power of the DUT. Connect the
reduced-level signal output of the RF Signal Sampler to
the input of the RF Rectifier/Diode detector. Connect
the output of the RF Set Point Signal Generator and the
output of the RF Rectifier/Diode Detector to the input
channels of the Digital Oscilloscope. Inspect all
connections of the Test Setup to ensure proper contact.
9.2.2 Set up the Digital Oscilloscope to trigger off of
the signal level change of the RF Set Point Signal
Generator.
9.2.3 Turn on the RF Enable Signal Generator to a
level that will allow the DUT to produce output power.
9.2.4 Change the RF Set Point Signal Generator output
level to produce the desired change in RF output power.
Measure and record the RF Set Point Signal Generator
signal and the RF Rectifier/Diode Detector signal with
the Digital Oscilloscope. Also record the indicated RF
power levels from before and after the Set Point change
as measured by the RF Power Meter. The measurement
by the Digital Oscilloscope shall continue until the RF
output power has stabilized, which typically takes a few
milli-seconds.
9.2.5 The data shall be recorded and then presented in
both graphical and tabular forms. An example of data
collected from a Digital Oscilloscope for an RF
generator test is shown in Figure 2, where the Set Point
was changed from 3% to 33% of full power, and in
Figure 3, where the Set Point was changed from 33% to
3% of full power.
10 Test Setup for Measuring the Transient
Response of the RF Generator as a Function of
the Change in RF Enable Signal
10.1 The Test Setup for the measuring the transient
response of the RF generator as a function of the RF
Enable signal consists of a RF Enable Signal Generator,
a RF Set Point Signal Generator, a Digital Oscilloscope,
the RF Generator (DUT), a RF Signal Sampler, a RF
Rectifier/Diode Detector, a RF Power Meter, and a
High-Power Dummy Load. A schematic of the Test
Setup is shown in Figure 4. All signal cables that are
used to connect to the Digital Oscilloscope should be of
comparable length so that there is no significant time
delay between the signals measured by the
Oscilloscope.
10.2 Prior to making any measurements, the Digital
Oscilloscope and other electronic test equipment shall
be turned on and allowed to warm up per the
manufacturer’s guidelines before the testing is to take
place. This time will allow for electronics to come to a
stable operating condition for the measurements.
11 Test Procedure for Measuring the Transient
Response of the RF Generator as a Function of
the Change in RF Enable Signal
11.1 The test procedure described below compares the
change in the RF Enable signal (produced by the RF
Enable Signal Generator) to the signal produced by the
DUT. The Enable signal is an input to the DUT and is
used by the DUT to turn on and turn off the output
power. The DUT output power level is measured with
the RF Signal Sampler. The signal from the RF Signal
Sampler is used by the RF Rectifier/Diode Detector to
produce a DC signal that corresponds to the RF output
power from the DUT. The Digital Oscilloscope
measures both the RF Enable signal and the RF
Detector signal.
11.2 Test Method for Measuring the Transient
Response of the RF Generator as a Function of the
Change in RF Enable Signal
11.2.1 Connect the outputs of the RF Enable Signal
Generator and the RF Set Point Signal Generator to the
controller input of the DUT. Connect the RF power
output of the DUT to the input of the RF Signal
Sampler, and connect the output of the RF Signal
Sampler to the High-Power RF Dummy Load. If any
coaxial cable assemblies or adapters are used to make
any of the connections between the output of the DUT
and the High-Power RF Dummy Load, they shall have
power handling capability that is consistent with the
maximum output power of the DUT. Connect the
reduced-level signal output of the RF Signal Sampler to
the input of the RF Rectifier/Diode detector. Connect
the output of the RF Enable Signal Generator and the
output of the RF Rectifier/Diode Detector to the input
channels of the Digital Oscilloscope. Inspect all
connections of the Test Setup to ensure proper contact.
11.2.2 Set up the Digital Oscilloscope to trigger off of
the signal level change of the RF Enable Signal
Generator.
11.2.3 Turn on the RF Set Point Signal Generator to a
level that will produce the desired output power.
11.2.4 Change the RF Enable Signal Generator output
to a level that will turn on the DUT (per the DUT
manufacturer’s specification). Measure and record the
time delay between the RF Enable Signal Generator
signal and the RF Rectifier/Diode Detector signal with
the Digital Oscilloscope. Also record the indicated RF
output power level as measured by the RF Power
Meter. The measurement by the Digital Oscilloscope
SEMI E135-0704 © SEMI 2004 4
shall continue until the RF output power has stabilized,
which typically takes a few milli-seconds. An example
of data collected from a Digital Oscilloscope for a RF
generator test is shown in Figure 5. Repeat this
measurement a minimum of 31 times and record each
condition.
11.2.5 Report the average delay time and standard
deviation between the RF Enable signal turn on signal
and the RF output power signal.
11.2.6 Change the RF Enable Signal Generator output
to a level that will turn off the DUT (per the DUT
manufacturer’s specification). Measure and record the
time delay between the RF Enable Signal Generator
signal and the RF Rectifier/Diode Detector signal with
the Digital Oscilloscope. Also record the indicated RF
output power level as measured by the RF Power
Meter. The measurement by the Digital Oscilloscope
shall continue until the RF output power has stabilized.
Repeat this measurement a minimum of 31 times and
record each condition.
11.2.7 Report the average delay time and standard
deviation between the RF Enable signal turn off signal
and the RF output power signal.
12 Reporting Test Results
12.1 Report the type of Digital Oscilloscope and the
details of the Digital Oscilloscope parameters used for
the tests, including the digitization rate used for the test.
12.2 Report the type of RF Signal Sampler used and
the type of RF Rectifier/Diode Detector used for the
test.
12.3 Report the transient response of the DUT as a
function of RF Set Point change. The data shall be
presented in both graphical and tabular forms. Report
the power level changes measured for the test.
12.4 Report the average and standard deviation of the
time delay for the RF Enable turn on and turn off
conditions. Report the average and standard deviation
of power level changes measured for the test.
13 Related Documents
13.1 IEEE
IEEE-STD-572 — IEEE Standard for Qualification of
Class 1E Connection Assemblies for Nuclear Power
Generating Stations
IEEE-STD-383 — IEEE Standard for Type Test of
Class 1E Electrical Cables, Field Splices, and
Connections for Nuclear Power Generating Stations
13.2 MIL-Spec
MIL-PRF-31031A — General Specification for
Connectors, Electrical, Plugs and Receptacles, Coaxial,
Radio Frequency, High Reliability, for Flexible and
Semirigid Cables
MIL-PRF-39012D — General Specification for
Connectors, Coaxial, Radio Frequency
MIL-STD-348 — General Specification for Radio
Frequency Connector Interfaces
MIL-STD-220B — Test Method Standard: Method of
Insertion Loss Measurement
RF Si gnal Sa mple r
Directional or Non -
dire ctional Coup ler
RF Power
Meter
High-Power
RF Dummy
Load
RF S et-Poi nt/
Signa l G ener ator
RF Enab le
Signa l G ener a tor
RF
Gene r ator
(DUT )
RF Rec tifier/
Diode De tec tor
Digital Scope
NOTE: If cable assemblies are used between the output of the RF Generator (DUT) and the High-Power Dummy Load, they shall
have the same nominal impedance as the DUT and shall have a power handling capability that is consistent with the maximum
output power of the RF Generator (DUT).
Figure 1
Schematic of the Test Setup for the Measuring the Transient Response of the RF Generator (DUT) as a
Function of a Change in the Set Point
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Transient
NOTE: These data are for conditions where the requested power went from 3% to 33% of the full power of the RF Generator
being tested.
Figure 2
Example of Digital Oscilloscope Data that Shows the Transient Response of the RF Output Power (Lower
Trace) Due to a Change in Set Point Signal (Upper Trace)