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SEMI E79-0304 © SEMI 1999, 2004 2 4.1.6 equipme nt-assigna ble rework (units) — any units being rewor ked due to a faul t or defect assignable to the subject equipment. The uni ts may be reworked at the equipment where t…

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SEMI E79-0304 © SEMI 1999, 2004 1
SEMI E79-0304
SPECIFICATION FOR DEFINITION AND MEASUREMENT OF
EQUIPMENT PRODUCTIVITY
This specification was technically approved by the Global Metrics Committee and is the direct responsibility
of the North American Metrics Committee. Current edition approved by the North American Regional
Standards Committee on October 15, 2003 and December 4, 2003. Initially available at www.semi.org
February 2004; to be published March 2004. Originally published February 1999; last published February
2000.
1 Purpose
1.1 The document provides metrics for measuring
equipment productivity.
2 Scope
2.1 The document defines metrics and calculations for
measurement of equipment productivity.
2.2 In the context of this document, it is important to
note that “equipment productivity” is impacted greatly
by factors far beyond the equipment itself, including
operator, recipe, facilities, material availability,
scheduling requirements, etc.
2.3 Effective application of this specification requires
that equipment performance is tracked using the metrics
for Equipment Reliability, Availability, and
Maintainability (RAM) established in SEMI E10.
Additionally, the Automated Reliability, Availability,
and Maintainability Standard (ARAMS) SEMI E58 can
be used for equipment with ARAMS capability.
Productivity metrics for flexible-sequence cluster tools
require tracking of SEMI E10 equipment states and
recipes at the level of individual processing modules.
The Equipment Performance Tracking (EPT) Standard
SEMI E116 assists SEMI E79 by providing the status
of the major modules of the equipment allowing
performance metrics to be tracked at the module level.
SEMI E116 also assists SEMI E79 by providing task-
level detail of the equipment or module’s current
activity, allowing performance metrics to be tracked at
the task level. Productivity performance of a flexible-
sequence cluster tool is then calculated as the aggregate
productivity performance of its individual processing
modules.
2.4 This document is currently limited to measuring
equipment productivity using Overall Equipment
Efficiency (OEE) as the metric, and does not address
the impact of productivity changes on cost, cycle time,
or other measures. This document does not address any
RAM issues over and above those in SEMI E10.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI E10 — Specification for Definition and
Measurement of Equipment Reliability, Availability,
and Maintainability (RAM)
SEMI E38 — Cluster Tool Module Communications
(CTMC)
SEMI E58 — Automated Reliability, Availability, and
Maintainability Standard (ARAMS): Concepts,
Behavior, and Services
SEMI E116 — Provisional Specification for Equipment
Performance Tracking
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Terminology
4.1 Terminology Applicable to Computation of the
OEE Metric
4.1.1 actual unit output (units) — the number of units
processed by the equipment during production time.
4.1.2 availability efficiency (time divided by time) —
the fraction of total time that the equipment is in a
condition to perform its intended function.
4.1.3 cluster tool — a manufacturing system made up
of integrated processing modules mechanically linked
together (the modules may or may not come from the
same supplier) (SEMI E10).
4.1.4 downtime (equipment downtime) (time) — the
time when the equipment is not in a condition, or is not
available, to perform its intended function. It does not
include any portion of non-scheduled time (SEMI E10).
4.1.5 effective unit output (units) — the number of
units processed by the equipment during production
time that were of acceptable quality, i.e., actual unit
output less equipment assignable rework and equipment
assignable scrap.
SEMI E79-0304 © SEMI 1999, 2004 2
4.1.6 equipment-assignable rework (units) — any units
being reworked due to a fault or defect assignable to the
subject equipment. The units may be reworked at the
equipment where the fault or defect occurred, or at
other equipment.
4.1.7 equipment-assignable scrap (units) — any units
that are permanently removed from production due to a
fault or defect assignable to the subject equipment. The
units may be removed from production at the operation
where the fault or defect occurred, or at a subsequent
operation.
4.1.8 equipment module — an indivisible entity within
a system.
4.1.9 fixed-sequence cluster tool — a cluster tool in
which all units of production visit all processing
modules making up the tool in a fixed sequence.
1
4.1.10 flexible-sequence cluster tool — a cluster tool in
which the units of production visit a subset of the
processing modules of the tool in sequences that may
vary from unit to unit. In such tools, the processing
modules that are engaged in processing activity vary
from unit to unit according to dispatching decisions
made by software internal to the tool (CSM 42).
4.1.11 non-processing module — an equipment entity
that supports the movement or conditioning of units
through the system, such as,
• robotic handler
• load/unload lock
• pre-aligner
4.1.12 non-scheduled time (time) — time when the
equipment is not scheduled to be used in production
(SEMI E10).
4.1.13 operational efficiency (time divided by time) —
the fraction of equipment uptime that the equipment is
processing actual units.
4.1.14 operations time (time) — total time minus non-
scheduled time (SEMI E10).
4.1.15 overall equipment efficiency (OEE) (time
divided by time) — a metric of equipment performance,
expressing the theoretical production time for the
effective unit output divided by the total time.
2
.
NOTE 1: The overall equipment efficiency metric accounts
for all losses that reduce equipment performance from its
1 CSM 42: Productivity Metrics for Flexible-Sequence Cluster
Tools,
Engineering Systems Research Center, University of
California, Berkeley, 1998
2 CSM 21: Closed-Loop Measurement of Equipment Efficiency and
Equipment Capacity, Engineering Systems Research Center,
University of California, Berkeley, 1997.
maximum potential performance taking the existing
equipment design and recipe specifications as given.
4.1.16 performance efficiency (time divided by time)
— the fraction of equipment uptime that the equipment
is processing actual units at theoretically efficient rates.
4.1.17 processing module — an indivisible production
entity within an equipment system, e.g., a processing
chamber or station within a cluster tool.
4.1.18 processing module recipe — all processing
steps of a recipe performed within a single processing
module without requiring reloading of that processing
module (CSM 42).
4.1.19 production time (time) — sum of all periods of
time in which a processing module is performing its
intended function.
• For a non-cluster tool, a fixed-sequence cluster
tool, or an individual processing module within a
flexible-sequence cluster tool, production time is
equivalent to the SEMI E10 productive time for
that entity.
• For a flexible-sequence cluster tool, production
time is the sum of the productive times of all
processing modules encompassed by the cluster
tool (CSM 42).
4.1.20 productive state — a period of time (productive
time) when the equipment is performing its intended
function (SEMI E10).
4.1.21 quality efficiency (time divided by time) — the
theoretical production time for Effective Units divided
by the theoretical production time for Actual Units.
4.1.22 rate efficiency (time divided by time) — the
fraction of production time that equipment is
processing actual units at theoretically efficient rates.
4.1.23 recipe — the pre-planned and reusable portion
of the set of instructions, settings, and parameters under
control of a processing agent that determines the
processing environment seen by the material. Recipes
may be subject to change between runs or processing
cycles (SEMI E38).
4.1.24 system — an integrated structure of components
and subsystems capable of performing, in aggregate,
one or more specific functions. For the purpose of this
specification, a system consists of one or more
processing or non-processing modules.
SEMI E79-0304 © SEMI 1999, 2004 3
4.1.25 theoretical production time per unit (THT) (time
per unit) — the minimum rate of time per unit to
complete processing, given:
• the specified recipe
• the equipment design
• continuous operation
• no efficiency losses
NOTE 2: Recipe specifications and settings for THT are the
ones actually used in production and are not idealized.
Equipment of the same design (e.g., same make and model)
are expected to have the same THTs, whereas equipment of a
different design may have different THTs even if they
perform the same intended function. Continuous operation
requires that equipment loading is optimized for throughput
and there are no internal or external interruptions or delays to
processing. Given the constraints of specified recipe,
equipment design, and continuous operation, THTs shall
not include allowances for any other efficiency losses (e.g.,
slower than ideal changes in temperature or pressure, longer
than ideal reaction times for valves or moving parts, different
moments within a maintenance cycle or the life-cycle of a
consumable, etc.).
4.1.26 theoretical production time (time) — production
time during a period that is theoretically required to
complete the unit quantities of the production recipes
undertaken during the period. Theoretical production
time is computed as the aggregation over all recipes of
the theoretical production time per unit for the recipe
applied to the unit quantity of that recipe (CSM 21,
CSM 42). For flexible-sequence cluster tools,
theoretical production time is the sum of the theoretical
production times for the set of virtual machines.
4.1.27 theoretical unit throughput by recipe (units per
time) — for a given production recipe, the number of
units per period of time that theoretically could be
processed by the equipment. For each recipe,
theoretical unit throughput is equal to the reciprocal of
theoretical production time per unit.
4.1.28 total time (time) — all time (at the rate of 24
hours per day, seven days per week) during the period
being measured. In order to have a valid representation
of total time all six basic equipment states shall be
accounted for and tracked accurately (SEMI E10). For a
flexible-sequence cluster tool, total time is defined as
the aggregate total time of the set of virtual machines
encompassed by the cluster tool (CSM 42).
4.1.29 unit — any wafer, die, packaged device, or
piece part thereof (includes product and non-product
units) (SEMI E10).
4.1.30 uptime (equipment uptime) (time) — the time
when the equipment is in a condition to perform its
intended function. It includes productive, standby, and
engineering time, and does not include any portion of
non-scheduled time (SEMI E10). For a flexible-
sequence cluster tool, uptime is defined as the
aggregate uptime of the set of virtual machines
encompassed by the cluster tool (CSM 42).
4.1.31 virtual machine — an individual processing
module within a flexible-sequence cluster tool, in
combination with the transport module(s) serving that
processing module. A flexible-sequence cluster tool has
one virtual machine defined for each of its processing
modules (CSM 42).
4.2 Terminology Applicable to Computation of
Additional Productivity Metrics Defined in Appendix 2
4.2.1 demand equipment efficiency (DEE) (time
divided by time) — a measure of equipment
productivity during the time that products are planned
to be available to process at the equipment.
4.2.2 engineering overall equipment efficiency (E-
OEE) (time divided by time) — a measure of
equipment productivity assuming process specifications
are optimized for minimum production time.
4.2.3 engineering theoretical production time per unit
(ETHT) – (time per unit) — the theoretical time
required to process a given recipe assuming the recipe
specification is optimized for minimum production
time. ETHT is based on minimum durations for the
objective processing steps, e.g., implant time for ion
implant systems, plus minimum allowances for any
additional supporting process steps, e.g., heating,
cooling, gas stabilization, that are deemed absolutely
necessary. ETHT
shall be defined to be less than or
equal to the corresponding theoretical time per unit
(THT) used in calculating OEE.
4.2.4 equipment down no product time (time) — the
period of equipment downtime during which there are
no units available at the equipment to process.
4.2.5 intrinsic equipment efficiency (IEE) (time divided
by time) — a measure of equipment productivity that
considers the combined effect of rate efficiency losses,
recipe design, and equipment design.
4.2.6 no product time (time) — the period of standby
time that the equipment is idle because there are no
units available at the equipment to process.
4.2.7 planned no product time (time) — the period of
operations time that the factory model or production
schedule expects the equipment to be idle because there
are no units available to process at the equipment.
4.2.8 production equipment efficiency (PEE) (time
divided by time) — a measure of equipment
productivity during the time that products are available
to process at the tool.