semi合集-English.pdf - 第1272页

SEMI E5-1104 © SEMI 1982, 2004 214 Stream,Function Name (Mnemonic) Direction S15,F32 Recipe Upload Data M,H<-E Description This message is used to send an execution recipe from a recipe executor. Structure L,4 1. <…

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SEMI E5-1104 © SEMI 1982, 2004 213
Stream,Function Name (Mnemonic) Direction
S15,F30 Recipe Verify Acknowledge M,H<-E
Description
This message is used to acknowledge the request to verify one or more recipes. If a single recipe verification was requested and
the recipe was successfully verified, the results are returned to the sender in this message, and RCPID contains the identifier of a
derived object form recipe if created during verification. If multiple recipe verifications were requested, then LINKID shall be
non-zero.
Structure
L,5
1. <OPID>
2. <LINKID>
3. <RCPID>
4. L,n (n = # attributes)
1. L,2
1. <RCPATTRID
1
>
2. <RCPATTRDATA
1
>
.
.
n. L,2
1. <RCPATTRID
n
>
2. <RCPATTRDATA
n
>
5. L,2
1. <RMACK>
2. L,p
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
p. L,2
1. <ERRCODE
p
>
2. <ERRTEXT
p
>
Exception
LINKID is zero if and only if a single recipe verification was requested and has been completed. If item 3 is zero length item, no
derived object form recipe was originated. n = 0 if and only if the recipe was not verified or failed verification. p = 0 if and only
if RMACK indicates no errors.
Stream,Function Name (Mnemonic) Direction
S15,F31 Recipe Upload Request S,H->E,reply
Description
This message is used to request an execution recipe from a recipe executor.
Structure
<RCPSPEC>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 214
Stream,Function Name (Mnemonic) Direction
S15,F32 Recipe Upload Data M,H<-E
Description
This message is used to send an execution recipe from a recipe executor.
Structure
L,4
1. <RCPSPEC>
2. L,m (m = # attributes)
1. L,2
1. <RCPATTRID
1
>
2. <RCPATTRDATA
1
>
.
.
m. L,2
1. <RCPATTRID
m
>
2. <RCPATTRDATA
m
>
3. <RCPBODY>
4. L,2
1. <RMACK>
2. L,p
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
p. L,2
1. <ERRCODE
p
>
2. <ERRTEXT
p
>
Exception
p = 0 if and only if RMACK indicates no errors.
SEMI E5-1104 © SEMI 1982, 2004 215
Stream,Function Name (Mnemonic) Direction
S15,F33 Recipe Select Request M,H->E,reply
Description
This message is used to request the selection of one or more execution recipes. If multi-block, it shall be preceded by the
S15,F1/S15,F2 inquire/grant transaction.
Structure
L,3
1. <DATAID>
2. <RESPEC>
3. L,r (r = # selections)
1. L,2
1. <RCPID
1
> (1st recipe selection)
2. L,p (p = # parameter settings for 1st recipe)
1. L,2
1. <RCPPARNM
11
>
2. <RCPPARVAL
11
>
.
.
p. L,2
1. <RCPPARNM
1p
>
2. <RCPPARVAL
1p
>
.
.
r. L,2
1. <RCPID
r
> (rth recipe selection)
2. L,s (s = # parameter settings for rth recipe)
1. L,2
1. <RCPPARNM
r1
>
2. <RCPPARVAL
r1
>
.
.
s. L,2
1. <RCPPARNM
rs
>
2. <RCPPARVAL
rs
>
Exception
If the list of parameter settings for a recipe selection is of zero length, then no parameter settings are specified for the
corresponding recipe.