semi合集-English.pdf - 第5668页
SEMI P10-0705 © SEMI 1990, 2005 163 LOCATION 0,-57500 LOCATION -11000,57500 END_CELL C1 !END TOP CELL DEFINITION ! CELL_ID C2 !MAIN ARRAY DEFINITION END_CELL_OPTIONS C2 PATTERN_GROUP_INSTANCE PG1 !PRIMARY DIE LOCATION -1…
SEMI P10-0705 © SEMI 1990, 2005 162
MASK_ID 1 !First write and process step
DELIVERABLE_MASK F
MULTIWRITE (1,1)
START_PHASE_SHIFT 1
PSM_WAVELENGTH
248
TRANSMISSION_TARGET 6
TRANSMISSION_TOLERANCE 0.4
TRANSMISSION_RANGE 0.8
PHASE_ANGLE_TARGET 180
PHASE_ANGLE_TOLERANCE 4
PHASE_ANGLE_RANGE 8
END_PHASE_SHIFT 1
START_REGISTR 1
REGISTR_ERROR 0.10
END_REGISTR 1
MIN_MASK_FEATURE_SIZE 0.8
END_MASK 1
!
MASK_ID 2 !Second write and process step
DELIVERABLE_MASK T
MULTIWRITE (1,2)
START_PHASE_SHIFT 2
PSM_WAVELENGTH 248
TRANSMISSION_TARGET 6
TRANSMISSION_TOLERANCE 0.4
TRANSMISSION_RANGE 0.8
PHASE_ANGLE_TARGET 180
PHASE_ANGLE_TOLERANCE 4
PHASE_ANGLE_RANGE 8
END_PHASE_SHIFT 2
TOP_PELLICLE_TYPE CA627P-7043L
MIN_MASK_FEATURE_SIZE 0.8
START_DEFECT_DEFINITION C
DEFECT_SIZE 0.3
DEFECT_COUNT 0
INSPECTION_AREA -30000,-35000,30000,35000
END_DEFECT C
END_MASK 2
!
CELL_ID C1 !<cell_definition>
END_CELL_OPTIONS C1
CELL_INSTANCE C2 !MAIN ARRAY
END_CELL_INSTANCE C2
LOCATION 0,0
PATTERN_GROUP_INSTANCE PG3 !RMS ALIGNMENT KEYS
SEMI P10-0705 © SEMI 1990, 2005 163
LOCATION 0,-57500
LOCATION -11000,57500
END_CELL C1 !END TOP CELL DEFINITION
!
CELL_ID C2 !MAIN ARRAY DEFINITION
END_CELL_OPTIONS C2
PATTERN_GROUP_INSTANCE PG1 !PRIMARY DIE
LOCATION -15000,-17500
STEPPING_DISTANCE 30000,35000
STEPPING_COUNT 2,2
PATTERN_GROUP_INSTANCE PG2 !SCRIBE LINE
LOCATION 0,0
END_CELL C2
!
PATTERN_GROUP_ID PG1 !PRIMARY PATTERN GROUP
PATTERN_ADDRESS_SIZE 0.05
SCALE_FACTOR 1.0
STRIPE_HEIGHT 1024
UNSCALED_PATTERN_SIZE 25000,30000
END_PATTERN_GROUP_OPTIONS PG1
LEVEL_ID 1
PATTERN_NAME VT9999X-1A-26
DIGITIZED_DATA_DARK T
END_PATTERN_DEFINITION 1
LEVEL_ID 2
PATTERN_NAME VT9999X-1A-10
DIGITIZED_DATA_DARK F
END_PATTERN_DEFINITION 2
END_PATTERN_GROUP PG1
!
PATTERN_GROUP_ID PG2 !SCRIBE PATTERN GROUP
PATTERN_ADDRESS_SIZE 0.05
SCALE_FACTOR 1.0
STRIPE_HEIGHT 1024
UNSCALED_PATTERN_SIZE 65000,75000
START_CD CD_SITES
CD_SITE_ID CD_1
CD_LOCATION -40000,0
CD_SITE_ID CD_2
CD_LOCATION 0,-40000
CD_SITE_ID CD_3
CD_LOCATION 0,40000
CD_SITE_ID CD_4
CD_LOCATION 0,0
END_CD CD_SITES
SEMI P10-0705 © SEMI 1990, 2005 164
END_PATTERN_GROUP_OPTIONS PG2
LEVEL_ID 1
PATTERN_NAME SC9999X-1A-26
DIGITIZED_DATA_DARK T
START_CD DIMENSION
CD_DATA 0.8
CD_DIGITIZED T
CD_TARGET 0.8
END_CD DIMENSION
END_PATTERN_DEFINITION 1
LEVEL_ID 2
PATTERN_NAME SC9999X-1A-10
DIGITIZED_DATA_DARK F
START_CD DIMENSION
CD_DATA 0.8
CD_DIGITIZED T
CD_TARGET 0.8
END_CD DIMENSION
END_PATTERN_DEFINITION 2
END_PATTERN_GROUP PG2 !END SCRIBE GROUP
!
PATTERN_GROUP_ID PG3 !RMS ALIGNMENT MARK
PATTERN_ADDRESS_SIZE 0.5
SCALE_FACTOR 1.0
STRIPE_HEIGHT 1024
UNSCALED_PATTERN_SIZE 2000,2000
INSPECTION_AREA -3000,-3000,3000,3000
END_PATTERN_GROUP_OPTIONS PG3
LEVEL_ID A
PATTERN_NAME GCARMSB-OX-AA
DIGITIZED_DATA_DARK F
END_PATTERN_DEFINITION A
END_PATTERN_GROUP PG3 !END ALIGNMENT MARK
!
END_MASK_GROUP PSM
END_MASK_SET 9999
END_ORDER MS9999
CHECKSUM computed checksum