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SEMI E118.1-1104 © SEMI 2003, 2004 3 8 Data 8.1 WIDR Attributes 8.1.1 Table 4 specifies the values for the WIDR attribute id entifiers and limitations on values. Table 4 WIDR A ttribute Definitions Attribute Name Descrip…

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SEMI E118.1-1104 © SEMI 2003, 2004 2
7 Service Parameter to Data Item Mapping
7.1 Table 2 shows the mapping between message parameters defined by WIDR and data items defined by SECS-II.
For parameters specified in the definitions of a WIDR service, either the parameters themselves, or individual
elements of complex parameters, map to a specific data item.
Table 2 Service Parameters to Data Item Mapping
Parameter Name SECS-II Data Item Format Values
Attribute ID ATTRID 20 Name of attribute
Attribute Value ATTRVAL 20
HeadID TARGETID 20 “00”-“31”
Identifies either an individual head (“01”-
“31”) or the WIDR subsystem itself (“00”).
PM Information STATUS 20 “NE” = Normal execution, “MR” =
Maintenance required
Result Status SSACK 20 “NO” = Normal operation;
“EE” = Execution error;
“CE” = Communication error;
“HE” = Hardware error
StateRequest CPVAL 20 “OP”, “MT”
Status STATUSLIST L,4
1. <PMInformation>
2. <AlarmStatus>
3. <OperationalStatus>
4. <HeadStatus>
Current values of PM Information with the
corresponding attributes for WIDR and Head
(if applicable). See Tables 4 and 5.
Wafer ID MID 20
2D Code Read Condition CONDITIONLIST L,7
1. <Cell Size>
2. <Contrast>
3. <Damage Percent>
4. <Number Error Bits>
5. <Read Time>
6. <Matrix Style>
7. <Matrix Polarity>
Current values of Cell Size, Contrast,
Damage Percent, Number Error Bits, Read
Time, Matrix Style, Matrix Polarity with the
corresponding attributes for Code Condition.
See Table 6.
CONDITIONLIST data shall be formatted in
the fixed order as in Format column.
NOTE 1: There are also data items used in SECS-II messages that do not map to specific services parameters. Services with the same set of
parameters are mapped to the same SECS-II message by adding an additional data item to differentiate between the services. Table 3 contains the
SECS-II data items that have not a corresponding WIDR service parameter.
Table 3 Additional Data Requirements Table
SECS-II Data Item Function Value
SSCMD Used to differentiate between different subsystem commands
indicated.
“ChangeState”
“GetStatus”
“Perform Diagnostics”
“Reset”
SEMI E118.1-1104 © SEMI 2003, 2004 3
8 Data
8.1 WIDR Attributes
8.1.1 Table 4 specifies the values for the WIDR attribute identifiers and limitations on values.
Table 4 WIDR Attribute Definitions
Attribute Name Description Access Format Value
Fundamental
“Configuration” Number of heads. RO 20
“01”“31”
“AlarmStatus” Current WIDR substate of ALARM STATUS. RO 20 “0” = NO ALARMS
“1” = ALARMS
“OperationalStatus” Current WIDR substate of OPERATIONAL. RO 20 “IDLE”, “BUSY”,
“MANT”
“SoftwareRevisionLevel” Revision (version) of software. RO 20 8 byte maximum
Optional
“DateInstalled” Date the subsystem was installed. RO 20 “YYYYMMDD” format
“DeviceType” Identifies subsystem as a Wafer ID Reader. RO 20 “WIDR”
“HardwareRevisionLevel” Revision number of the hardware. RO 20 8 byte maximum
“MaintenanceData” Supplier dependent. RO 20 80 byte maximum
“Manufacturer” The name or identifier of the manufacturer. RO 20 20 byte maximum
“ModelNumber” The manufacturers model designation. RO 20 20 byte maximum
“SerialNumber” Subsystem serial number assigned by
manufacturer.
RO 20 20 byte maximum
8.2 Read Head Attributes
8.2.1 Table 5 shows the format and values for the Read Head.
Table 5 Read Head Attribute Definitions
Attribute Name Description Access Format Value
Fundamental
“HeadStatus” The current state. RO 20 “IDLE”,
“BUSY”,
“NOOP”
“HeadID” Head number 0–31. RO 20 2 digits, “00” through “31”.
Optional
“HeadCondition” The current Maintenance
status.
RO 20 Enumerated:
“NO” = No alarms
“NM” = Needs maintenance
“NP” = No power
“RW” = Read fault
“HeadDateInstalled” Date this head was installed. RO 20 “YYYYMMDD” format
“HeadMaintenanceData” Supplier dependent. RO 20 Text
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8.3 2D Code Read Condition Attributes
8.3.1 Table 6 specifies the values for the 2D Code Read Condition attribute identifiers and limitations on values.
Table 6 2D Code Read Condition Attribute Definitions
Attribute Name Description Access Format Value
Optional
“CellSize” Number of Pixels in a Cell RO 20 “000”–“999”
“Contrast” Contrast Percentage of Dark / Light RO 20 “000”–“100”
“Damage Percent” Percentage of Damage Cell RO 20 “000”–“100”
“Number Error Bits” Number of the Damage Cell RO 20 “000”–“999”
“Read Time” Time for Readout, in seconds RO 20 “000”–“120”
“Matrix Style” Normal Mode or Mirror Mode RO 20 “NO” = Normal Mode
“MR” = Mirror Mode
“Matrix Polarity” Dark on Light or Light on Dark RO 20 “DON” = Dark on Light
“LON” = Light on Dark
To show that data is not available for an attribute, the attribute value is set to a zero-length string.
Note 1: A zero-length item for an attribute value means that does not exist.
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