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SEMI F62-0701 © SEMI 2001 10 Figure 8 Transient Gas T e mperature Effect Flow Setpoint (% of Reading) Time (Hr) .5 1 2.0 3.0 1.5 2.5 3.5 4.0 Tg ( O C) Time (Hr) .5 1 2.0 3.0 1.5 2.5 3.5 4.0 -.1 -.05 .05 .1 0 40 35 30 25 …
SEMI F62-0701 © SEMI 20019
Figure 7
Gas Temperature Effect on Steady State Span
0%
X
X
X
X
TGg (% Reading/
O
C)
Flow Setpoint (% F.S.)
25 50 75 100
SEMI F62-0701 © SEMI 2001 10
Figure 8
Transient Gas Temperature Effect
Flow Setpoint (% of
Reading)
Time (Hr)
.5 1
2.0
3.0
1.5 2.5
3.5 4.0
Tg (
O
C)
Time (Hr)
.5 1
2.0
3.0
1.5 2.5
3.5 4.0
-.1
-.05
.05
.1
0
40
35
30
25
20
25%
50%
75%
100%
SEMI F62-0701 © SEMI 200111
Table 1 TC
e
Readings
TC
e
(% Reading/
°
C)
T
e2
-T
e1
T
e3
-T
e2
T
e4
-T
e3
T
e5
-T
e4
T
e5
-T
e6
T
e6
-T
e7
T
e7
-T
e8
T
e8
-T
e9
Flow Setpoint %
F.S.
25
50
75
100
0
NOTE 1: Plot as in Figure 7.
Table 2 TC
g
Readings
Flow Setpoint (%F.S.) TC
g
(% reading/°C)
25 -0.06
50 -0.08
75 -0.09
100 -0.11
0
NOTE 1: Plot as in Figure 5.