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SEMI E36.1-0704 © SEMI 2004 2 5.3 Attributes associated with the elements appearing below are multi-valued; no restrictions on cardin ality are expressed or implied. If an attribute has multiple values, the attributes st…

SEMI E36.1-0704 © SEMI 2004 1

SEMI E36.1-0704

SPECIFICATION FOR THE SEMICONDUCTOR EQUIPMENT

MANUFACTURING INFORMATION TAGGING STANDARD E36

This specification was technically approved by the Global Information & Control Committee and is the direct

responsibility of the North American Information & Control Committee. Current edition approved by the

North American Regional Standards Committee on March 14, 2004. Initially available at www.semi.org

May 2004; to be published July 2004.

NOTICE: The Document Type Definitions, schemas, and Tag Library defined in this standard may be used freely

without permission or payment of royalties or other licensing charge, provided this source and/or its associated

specifications are cited.

1 Purpose

1.1 The purpose of this specification provides the consolidated Tag Library required in implementing the

SEMI E36-0699 standard.

2 Scope

2.1 The specification contains two levels of compliance necessary in implementing the electronic documentation

standard. The following two components make up the compliance levels.

2.1.1 Level One Identity — Allows for content to be uniquely identified, most notably the Item ID and Edition ID

attributes.

2.1.2 Level Two Type and Metadata — Association of semantic detail with items. Important information about the

item that allows us to interpret the item correctly. Compliance is established for this level by ensuring that the item

uses a standard tag name and is equipped with a small standard set of metadata properties as defined by the

specification.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish appropriate safety and health practices and determine the

applicability of regulatory or other limitations prior to use.

3 Referenced Standards

3.1 See

http://www.w3.org/TR/2000/CR-RDF-schema-20000327/

- RDF specification.

3.2 See

http://www.w3.org/TR/2000/CR-rdf-schema-20000327/#s2.3.1 for the related RDF schema.

3.3 See

http://dublincore.org/schemas/xmls/simpledc20020312.xsd for the related XML schema.

3.4 See

http://dublincore.org/ - Dublin Core Metadata Initiative (DCMI).

3.5 For a list of Dublin Core metadata elements, see

http://dublincore.org/documents/dces/.

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

4 Terminology

4.1 None.

5 Consolidated Tag Library

5.1 The consolidated tag library is required to implement SEMI E36-0699. The first layer, identity, is supported by

the element “E36Item”, which identifies the tagged information as complying with SEMI E36-0699. The second

layer, metadata, provides the tags most important for managing and retrieving the documentation.

5.2 Level two compliance is achieved by the inclusion of one or more of the metadata elements described below.

For elements inserted for Level 2 compliance, all attributes are considered optional, unless otherwise indicated.

SEMI E36.1-0704 © SEMI 2004 2

5.3 Attributes associated with the elements appearing below are multi-valued; no restrictions on cardinality are

expressed or implied. If an attribute has multiple values, the attributes statement must be repeated, once for each

value.

5.4 Element Name — E36Item

5.4.1 Element Description — This element serves as the basic super type from which, by default, all of the elements

in the SEMI E36 tag set are derived. An E36Item element can contain arbitrary content. The E36Item element has

the following attributes:

• ItemID — Globally unique URI

used to distinguish each E36Item. This attribute partitions the space of

E36Items into equivalence classes, each of which represents an individual item of information.

• EditionID — Globally unique URI

used to distinguish each member of an equivalence class, as defined by the

ItemID. This attribute is used to control variation within an equivalence class.

5.4.2 Metadata  The following namespaces are defined for E36Item metadata:

5.4.2.1 DC — representing the Dublin Core

namespace.

5.4.2.2 RDF — representing the Resource Description Framework

namespace.

5.4.2.3 e36base — representing the E36 basic namespace.

5.4.3 In the DC namespace, standard interpretations of the following items of metadata are utilized:

5.4.3.1 Title

5.4.3.2 Publisher

5.4.3.3 Subject

5.4.3.4 Description

5.4.3.5 Format

5.4.3.6 Source

5.4.3.7 Language

5.4.3.8 Rights

5.4.4 In the e36base namespace, the following items of metadata are utilized:

5.4.4.1 ReleaseDate — This item is a Date describing the moment when the content contained in the tag becomes

valid. (mandatory)

5.4.4.2 ExpirationDate — This item is a Date describing the moment when the content contained in the tag

becomes invalid.

5.4.4.3 VersionString — This is a string to be used in assigning a human-readable version name to an individual

edition of an E36Item.

5.4.5 In the RDF namespace, we make use of the following metadata item:

5.4.5.1 Type (see:

http://www.w3.org/TR/2000/CR-rdf-schema-20000327/#s2.3.1

5.5 Element Name — Manual

1 We recommend using GUID-based URI for this function, although any scheme which generates URI which are guaranteed to be globally

unique is acceptable.

2 See footnote number one.

3 See

http://dublincore.org/ for information relating to the Dublin Core Metadata Initiative (DCMI). See

http://dublincore.org/schemas/xmls/simpledc20020312.xsd

for the related XML schema. For a list of Dublin Core metadata elements, see

http://dublincore.org/documents/dces

4 See

http://www.w3.org/TR/2000/CR-RDF-schema-20000327/ for the latest RDF specification.

5.5.1 Element Description — The Manual element is used to define the documents in a document manual set. The

content of the Manual element is not interpreted.

5.5.2 Metadata — In addition to the metadata available from the E36Item tag, the Manual element supports the

following additional metadata, all in the e36base namespace:

5.5.2.1 ManualType

5.5.2.1.1 OperationsManual — Manual type typically used by equipment operators at customer sites to perform the

tasks for which the equipment was designed.

5.5.2.1.2 InstallationManual — Manual type typically used by supplier and customer engineers to install the

equipment at the customer site.

5.5.2.1.3 MaintenanceManual — Manual type typically used by trained maintenance technicians at customer sites

to perform repair and upkeep of equipment.

5.5.2.1.4 MaintenanceSchedule — Manual type typically used by site coordinators and customer facility managers

to schedule and document normal preventive maintenance.

5.5.2.1.5 PartsList — Manual type typically used by on-site field service engineers and customers to identify parts

to order and to maintain a sufficient stocking level to ensure prompt delivery of parts.

5.5.2.1.6 TroubleshootingManual — Manual type typically used by equipment operators and qualified maintenance

technicians to identify and correct equipment problems.

5.5.2.1.7 ReleaseNotes — Manual type typically used by operators, technicians and system administrators to

identify changes in software configuration.

5.5.2.1.8 TrainingManual — Manual type typically used by supplier training personnel and customers to train

operators and maintenance technicians.

5.6 Element Name — Configuration

5.6.1 Element Description — The Configuration element is used to describe a unique piece of semiconductor

manufacturing equipment. The content of the Configuration element is not interpreted.

5.6.2 Metadata — In addition to the metadata available from the E36Item tag, the Configuration element supports

the following additional metadata, all in the e36base namespace:

5.6.2.1 WaferSize — Specific to the wafer size for the specific semiconductor manufacturing equipment set; may be

200mm, 300mm, or “Other”. (mandatory)

5.6.2.2 Mainframe — Designation of mainframe type for the specific semiconductor manufacturing equipment set.

5.6.2.3 TechnologyArea — The area in which the semiconductor manufacturing equipment set is located in the

semiconductor manufacturing process.

5.6.2.3.1 Lithography

5.6.2.3.2 Etch

5.6.2.3.3 Planarization

5.6.2.3.4 Diffusion

5.6.2.3.5 Thin Film

5.6.2.3.6 Implant

5.6.2.3.7 Analytical

5.6.2.3.8 Sort

5.6.2.3.9 Assembly/Test

5.6.2.4 Process — Free text field allowable for process type used in the specific semiconductor manufacturing

equipment.