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SEMI C3.35-11 01 © SEMI 1988 , 2001 6 Figure 2 Column C onfiguration for th e Analysis of Methane, Acetyl ene NOTICE: T hese st andards do not pu rport to address safety issues, if any, associated with their use. It is t…
SEMI C3.35-1101 © SEMI 1988, 20015
required. This can be obtained by preparing a standard
of water balance nitrogen and mixing it with dry
hydrogen chloride using a dynamic gas blender with
mass flow controllers or calibrated flowmeters. The
hydrogen chloride gas can be dried by passing it over
activated molecular sieve (5A) or magnesium
perchlorate.
NOTE 5: This method is not applicable if other constituents
in the gas will condense before the moisture condensation,
e.g., carbon dioxide or oil.
4.7.4 Operating Procedure
4.7.4.1 Obtain a continuous flow of sample gas from
the source using a clean stainless steel sampling line
which has been purged dry after exposure to ambient
moisture.
NOTE 6: The sampling system and hygrometer must be
designed to operate under the sample pressure, or the sample
pressure must be reduced to accommodate the pressure
restrictions of the analytical hygrometer using a regulator with
a diaphragm of stainless steel or other suitable material.
4.7.4.2 After prepurging with a dry gas, allow the
sample gas to flow through the sampling system and the
condensation point hygrometer for one-quarter hour to
two hours to allow the entire system to reach
equilibrium with regards to moisture content.
4.7.4.3 After equilibrium has been reached, cool the
mirror to determine the actual condensation point of the
sample.
4.7.4.4 Continue to verify the condensation point for at
least 30 minutes after a stable reading has been
confirmed.
4.7.4.5 Correct the condensation point reading from the
measured pressure to 1 atm of pressure. The result may
not exceed the specification in Section 2 of this
standard.
Figure 1
Metals Analysis Sampling Apparatus Vapor Phase Hydrolysis
SEMI C3.35-1101 © SEMI 1988, 2001 6
Figure 2
Column Configuration for the Analysis of Methane, Acetylene
NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the
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SEMI C3.39-0304 © SEMI 1989, 2004 1
SEMI C3.39-0304
STANDARD FOR NITROGEN TRIFLUORIDE (NF
3
)
This standard was technically approved by the Global Gases Committee and is the direct responsibility of the
North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on October 16, 2003. Initially available at www.semi.org February 2004; to be published March
2004. Originally published in 1989; last published September 1999.
1 Description
1.1 Nitrogen trifluoride is a toxic, odorless, colorless,
nonflammable gas. It is a strong oxidizer and supports
combustion.
2 Specifications
2.1 QUALITY: 99.98%
Impurities Maximum Acceptable Level
(ppm) (see NOTE 1)
Carbon Dioxide (CO
2
) 10
Carbon Monoxide (CO) 10
Carbon Tetrafluoride (CF
4
) 100
Nitrogen (N
2
) 10
Nitrous Oxide (N
2
O) 10
Argon/Oxygen 10
Sulfur Hexafluoride (SF
6
) 10
Water (H
2
O) (v/v) 1
TOTAL IMPURITIES 161 (see NOTE 1)
NOTE 1: An analysis of significant figures has not been considered.
The number of significant figures will be based on analytical
accuracy and the precision of the provided procedure.
3 Chemical Specification
Hydrolyzable Fluorides as HF 1 ppm
4 Physical Constants (for information only)
Metric Units US Units
Molecular weight 71.00 71.00
Density of gas at 21.1° C
(70° F) and 1 atm
2.94 kg/m
3
0.1838 lb./ft.
3
5 Analytical Procedures
5.1 Carbon Tetrafluoride — This procedure is for the
determination of carbon tetrafluoride in nitrogen
trifluoride using a gas chromatograph with a thermal
conductivity detector. (See Figure 1 and Note 1.)
5.1.1 Detection Limit — 1.0 ppm.
5.1.2 Instrument Parameters
5.1.2.1 Column: Super Q (80/100 mesh), 4.9 m (16 ft.)
by 1.75 mm (1/16 in.) ID, 3.2 mm (1/8 in.) OD ss or
equivalent.
5.1.2.2 Carrier Flow: 19 mL/min helium.
5.1.2.3 Sample Volume: 0.1 mL.
5.1.2.4 Temperatures:
Detector 100° C
Oven 42° C
Gas sampling valve 42° C
5.1.2.5 Valve material: Nitronic-60 or equivalent.
5.1.3 Calibration Standard — 100 ppm carbon
tetrafluoride, balance helium.
5.1.4 Operating Procedure
5.1.4.1 Inject the calibration standard into the column
using a gas sampling valve. Record retention time and
peak area.
5.1.4.2 Inject nitrogen trifluoride sample to be tested in
the same manner as the calibration standard. Record the
retention times and peak areas.
5.1.4.3 Repeat Section 5.1.4.1.
5.1.4.4 Compare the average peak area of the
calibration standard to that of the nitrogen trifluoride
sample being tested. Calculate the concentration of
carbon tetrafluoride, using the formula below. The
result may not exceed the specification in Section 2 of
this standard.
Sample Peak Area
Standard Peak Area
×
C
oncentrat
i
on
of Standard
=
C
oncentrat
i
on
of Sample
5.2 Carbon Dioxide, Nitrous Oxide, and Sulfur
Hexafluoride — This procedure is for the determination
of carbon dioxide, nitrous oxide, and sulfur
hexafluoride in nitrogen trifluoride using a gas
chromatograph with a thermal conductivity detector.
(See Figure 1.)
5.2.1 Detection Limit — 1.0 ppm for carbon dioxide,
nitrous oxide, and sulfur hexafluoride.
5.2.2 Instrument Parameters
5.2.2.1 Column: Super Q (80/100 mesh), 4.9 m (16 ft.)
by 1.75 mm (1/16 in.) ID, 3.2 mm (1/8 in.) OD ss or
equivalent.
5.2.2.2 Carrier Flow: 19 mL/min helium.