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SEMI E7-91 © SEMI 1984, 2004 2 Figure 1 Dead front plugs are preferre d. 6.1.2 120 Volt, Ø, 30 AMPs max., locking type. Figure 2 6.1.3 120 Volt , 1Ø, 30 AMPs m ax., locking blade t ype. Figure 3 6.1.4 250 Volt , 1Ø, 30 A…

SEMI E7-91 © SEMI 1984, 2004 1

SEMI E7-91 (Reapproved 1104)

SPECIFICATION FOR ELECTRICAL INTERFACES FOR THE U.S. ONLY

This specification was technically approved by the Global Physical Interfaces & Carriers Committee and is

the direct responsibility of the North American Physical Interfaces & Carriers Committee. Current edition

approved by the North American Regional Standards Committee on July 11, 2004. Initially available at

www.semi.org September 2004; to be published November 2004. Originally published in 1984; last

published June 1999.

For Japan electrical interface requirements, see SEMI E31.

1 Purpose

1.1 The purpose of this standard is to simplify the

design and implementation of future semiconductor

facilities where both equipment suppliers and users can

be assured of the exact electrical interfaces required.

2 Scope

2.1 This standard presents recommendations for the

selection of specific electrical power interfaces:

 Service categories by voltage, current and phase

for systems, motors, and other electrical loads

 Electrical connectors

 Cordage

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Referenced Standards

3.1 Other Standards

NEMA — National Electrical Manufacturer’s

Association

NFPA 70-1981 — National Electrical Code, (NEC)

National Fire Protection Association

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

4 Terminology

None.

1 National Electrical Manufacturer’s Association, 1300 N. 17th

Street, Suite 1847, Rosslyn, VA, 22209, (703) 841-3200, fax (703)

841-5900, http://www.nema.org/

2 National Fire Protection Association, 1 Batterymarch Park

Quincy, Massachusetts, 02169-7471, +1 617 770-3000, fax +1 617

770-0700, http://www.nfpa.org

5 Service Categories

5.1 Voltage, current, and phase for motors and other

electrical/electronic loads:

5.2 Motors — (From Article 430-148, 150 of National

Electrical Code)

Power Recommended

Phase & Voltage

Recommended

Current Range

Motors 1/6 to 3/4 HP 120V 1Ø

208V 1Ø

230V 1Ø

4.4 to 13.8 AMPs

2.4 to 7.6 AMPs

2.2 to 6.9 AMPs

Motors 3/4 to 5 HP 208V 3Ø

230V 3Ø

3.1 to 16.7 AMPs

2.8 to 15.2 AMPs

Motors 5 HP and

Larger

480V 3Ø 7.6 AMPs and up

5.3 Other Loads — (By Calculation)

Ampere Range for Recommended Volts &

Phases

Power 120V 1Ø 208V 1Ø 208V 3Ø 480V 3Ø

0-3000 Watts 0 to 25

0 to 14 A. 0 to 8 A.

3000-5000 Watts 14 to

24 A.

8 to 14 A.

5000-

30,000 Watts

13 to

83 A.

30,000 and

Above

36 A. and

6 Electrical Connectors

6.1 The NEMA types listed below are available in

many forms from many manufacturers. For example,

the “receptacle” configurations shown also apply to

connectors and flanged outlets.

6.1.1 125 Volt, 1Ø, 20 AMPs max., straight blade

SEMI E7-91 © SEMI 1984, 2004 2

Figure 1

Dead front plugs are preferred.

6.1.2 120 Volt, Ø, 30 AMPs max., locking type.

Figure 2

6.1.3 120 Volt, 1Ø, 30 AMPs max., locking blade type.

Figure 3

6.1.4 250 Volt, 1Ø, 30 AMPs max., locking type

Figure 4

6.1.5 120/208 Volt, 3ØY, 30 AMPs max., locking type

(4 pole, 5-wire grounding)

Figure 5

6.1.6 Above 10,000 watts, use of connectors is

discouraged. Wherever possible, such loads should be

wired into junction boxes using appropriate crimped or

pressure terminations.

7 Cordage and Cables

7.1 The flexible cord and cable types shown are

examples; for more detail see the National Electrical

Code.

7.2 The following table gives the allowable ampacity

for the specified number of current-carrying copper

conductors in a cord.

7.3 Type SO-ST-STO preferred with 600 Volt

insulation.

AWG #18 #16 #14 #12 #10 #8 #6 #4

2 cond. 10 13 18 25 30 40 55 70

3 cond. 7 10 15 20 25 35 45 60

4 cond. 5.6 8 12 16 20 28 36 48

5 cond. 5.6 8 12 16 20 28 36 48

SEMI E7-91 © SEMI 1984, 2004 3

Table 1 Flexible Cord and Cable Conductor Color

Code

No.

Phases

No.

Wires

Voltage ØA BØ CØ N Grd

1 2

120 Blk Wht

1 2

208 Blk Red

1 3 120 Blk Wht

Green

1 3 208 Blk Red Green

1 4 208/480 Blk Red Wht

Green

3 4 208/480 Blk Red Orange Green

3 5 208/480 Blk Red Orange Wht

Green

#1: Natural Grey or Light Blue may be used. Under no circumstances

may White, Natural Grey or Light Blue be used for any purpose other

than to identify neutral or rounded conductors.

#2: Green/Yellow may be used. Green/Yellow willbe Green with one

or more Yellow stripes (Green = 50 to 70%; Yellow = 50 to 30%).

Green/Yellow is the only color internationally accepted for use as an

equipment grounding conductor. Under no circumstances may

Green/Yellow, Green or Yellow be used for any purpose other than to

identify grounding conductors.

#3: For double insulated machines only.

8 Related Documents

8.1 The following are sources of further information

concerning electrical interfaces:

Electrical Industries Association (EIA), 2001 I Street,

N.W., Washington, DC 20006

Joint Industrial Council (JlC), 7901 Westpark Dr.,

McLean, VA 22101

Western Electric Co., Inc. (WECO), “Standards for

Electrical Design and Construction,” Drawing #C-

284805, Machine Design Dept., Allentown Works,

Allentown, PA 18103

Occupational Safety & Health Administration,

Standards (OSHA) Part 1910, Title 29, Code of Federal

Regulations, Dated 7 Nov. 1978, Dept. of Labor,

Washington, DC

Underwriter’s Laboratories, Inc. (UL), 207 E. Ohio St.,

Chicago, IL 60611

IBM Corporate Bulletin, “Nonproduct Equipment

Design Standard,” “CB 3-0502-202 Support Equipment

Standard,” 1983-05, or succession thereto

American National Standards Institute, C73.73,

American National Standards Institute, 1430 Broadway,

New York, NY 10018

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer's instructions, product labels,

product data sheets, and other relevant literature,

respecting any materials or equipment mentioned

herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor

Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any items

mentioned in this standard. Users of this standard are

expressly advised that determination of any such patent

rights or copyrights, and the risk of infringement of

such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of

the contents in whole or in part is forbidden without express written

consent of SEMI.