semi合集-English.pdf - 第5979页

SEMI P42-0304 © SEMI 2004 12 ShotAreaID ReticleID ShotA reaSize X Y UnitType ShotMap ShotA reaInforma tion Shot AreaS hift X Y UnitType Shot Area Posit ionS hift X Y UnitType ShotAreaID C R ShotL ocation Shot Position X …

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SEMI P42-0304 © SEMI 2004 11
RELATED INFORMATION 1
APPLICATION NOTES
NOTICE: This related information is not an official part of SEMI P42 and was derived from work by the
originating task force. This related information was approved for publication by full letter ballot procedures on
January 9, 2004.
R1-1 Diagram Sample of Reticle Frame Data
WaferType
WaferInformation
EdgeClearance
WaferThickness
WaferRotation
Clearance
UnitType
WaferSize
Size
UnitType
Thickness
UnitType
C
R
ShotMapArray
ShotMapOffset
X
Y
UnitType
ShotMapInformarion
StepPitch
X
Y
UnitType
FormulationInformation
Date
Person
UseEx
p
osureMachine
MachineTypeInformation
SEMI P42-0304 © SEMI 2004 12
ShotAreaID
ReticleID
ShotAreaSize
X
Y
UnitType
ShotMap
ShotAreaInformation
ShotAreaShift
X
Y
UnitType
ShotAreaPositionShift
X
Y
UnitType
ShotAreaID
C
R
ShotLocation
ShotPosition
X
Y
UnitType
ShotID
ShotInformation
rdm
SEMI P42-0304 © SEMI 2004 13
ReticleID
ReticleType
ReticleMarkType
ReticleMarkID ReticleDesign
BarCode
ReticleName
ReticleSize
Size
UnitType
ReticleInformation
ProjectionMagnification
FileName
MarkUseRule
AlignmentMarkDesign
AlignmentMark
Information
Comment
Wa
f
erMarkType
Group
AlignmentMarkID
WaferMark
Position
Y
X
X-Mark
Y
X
Y-Mark
UnitType