semi合集-English.pdf - 第1173页
SEMI E5-1104 © SEMI 1982, 2004 115 Stream,Function Name (Mnemonic) Direction S5,F5 List Alar ms Request (LAR) S, H->E,reply Description This message requests the equip ment to send binary and analog alarm inform ation…

SEMI E5-1104 © SEMI 1982, 2004 114
Stream,Function Name (Mnemonic) Direction
S5,F1 Alarm Report Send (ARS) S,H<-E,[reply]
Description
This message reports a change in or presence of an alarm condition. One message will be issued when the alarm is set and one
message will be issued when the alarm is cleared. Irrecoverable errors and attention flags may not have a corresponding clear
message.
Structure
L,3
1. <ALCD>
2. <ALID>
3. <ALTX>
Exception
None
Stream,Function Name (Mnemonic) Direction
S5,F2 Alarm Report Acknowledge (ARA) S,H->E
Description
Acknowledge or error
Structure
<ACKC5>
Exception
None
Stream,Function Name (Mnemonic) Direction
S5,F3 Enable/Disable Alarm Send (EAS) S,H->E,[reply]
Description
This message will change the state of the enable bit in the equipment. The enable bit determines if the alarm will be sent to the
host. Alarms which are not controllable in this way are unaffected by this message.
Structure
L,2
1. <ALED>
2. <ALID>
Exception
A zero-length item for ALID means all alarms.
Stream,Function Name (Mnemonic) Direction
S5,F4 Enable/Disable Alarm Acknowledge (EAA) S,H<-E
Description
Acknowledge or error
Structure
<ACKC5>
Exception
None

SEMI E5-1104 © SEMI 1982, 2004 115
Stream,Function Name (Mnemonic) Direction
S5,F5 List Alarms Request (LAR) S,H->E,reply
Description
This message requests the equipment to send binary and analog alarm information to the host.
Structure
<ALID
1
, . . . ,ALID
n
>
Exception
A zero-length item means send all possible alarms regardless of the state of ALED.
Stream,Function Name (Mnemonic) Direction
S5,F6 List Alarm Data (LAD) M,H<-E
Description
This message contains the alarm data known to the equipment. There are “m” alarms in the list.
Structure
L,m
1. L,3
1. <ALCD
1
>
2. <ALID
1
>
3. <ALTX
1
>
2. L,3
.
.
m. L,3
1. <ALCD
m
>
2. <ALID
m
>
3. <ALTX
m
>
Exception
If m = 0, no response can be made. A zero-length item returned for ALCD
i
or ALTX
i
means that value does not exist.
Stream,Function Name (Mnemonic) Direction
S5,F7 List Enabled Alarm Request (LEAR) S,H->E,reply
Description
List alarms which are enabled.
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S5,F8 List Enabled Alarm Data (LEAD) M,H<-E
Description
This message is similar to S5,F6 except that it lists only alarms which are enabled.
Structure
Same as S5,F6
Exception
None

SEMI E5-1104 © SEMI 1982, 2004 116
Stream,Function Name (Mnemonic) Direction
S5,F9 Exception Post Notify (EXPN) S,H<-E,[reply]
Description
This message provides the means to inform a host system that an exception condition is ‘set’. Optionally, recovery actions for
the exception may be sent.
Structure
L,5
1. <TIMESTAMP>
2. <EXID>
3. <EXTYPE>
4. <EXMESSAGE>
5. L,n
1. <EXRECVRA
1
>
.
.
.
n. <EXRECVRA
n
>
Exception
A zero-length list (n = 0) shall be sent when there are no possible recovery actions.
This is a single block message. The text in each of the EXRECVRA data items may need to be restricted in length to meet the
single block requirement.
Stream,Function Name (Mnemonic) Direction
S5,F10 Exception Post Confirm (EXPC) S,H->E
Description
Host confirms receipt of S5,F9 message from the equipment.
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S5,F11 Exception Clear Notify (EXCN) S,H<-E,[reply]
Description
This message provides the means to inform a host system that an exception/alarm condition is no longer active (set).
Structure
L,4
1. <TIMESTAMP>
2. <EXID>
3. <EXTYPE>
4. <EXMESSAGE>
Exception
EXMESSAGE can be used to provide the reason that the exception cleared.