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SEMI S13-0305 © SEMI 1998, 2005 7 16 Related Documents 16.1 International SEMATECH 4 01104197AXFR — Guidelin es for Environmental Characterization of Semiconductor Equi pment 4 SEMATECH, 2706 Montopolis Drive, Aus tin, T…

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SEMI S13-0305 © SEMI 1998, 2005 6
Ecological information
Disposal considerations
Transport information
Regulatory information
Other information
12 Personal Protective Equipment (PPE)
12.1 The documents provided to the equipment user should clarify which tasks require personal protective
equipment and which kind of PPE (e.g., goggles, aprons, gloves, masks, safety shoes, helmets) is needed for each
task.
12.2 The documents should identify the characteristics, such as being shatterproof or acid resistant, of the personal
protective equipment to be used.
12.3 The equipment supplier should state in the documents provided to the equipment user that PPE should be used
in accordance with the instructions provided by the PPE supplier, except where additional instructions by the
equipment supplier are required.
13 Equipment Inspection, Consumables, and Maintenance
13.1 The documents provided to the equipment user should describe the recommended methods of periodic
inspections including the frequency of each inspection.
13.1.1 Periodic inspections include periodic situations that have long intervals between procedures (e.g., changing
memory batteries in computers, replacing UPS batteries, replacing sensor modules for detection systems).
13.2 The equipment supplier should provide a list of consumable parts and materials, with their replacement
intervals, maintenance methods, and part/material number in the documents provided to the equipment user.
13.3 The equipment supplier should provide information on the specific tools necessary for inspections and
maintenance in the documents provided to the equipment user.
14 Training Requirement
14.1 The equipment supplier should describe the training required for safe operations and maintenance in the
documents provided to the equipment user.
14.2 Documents provided to the equipment user should define what level of training is considered, by the supplier,
to be sufficient.
15 Emergency Contact and Response
15.1 The documents provided to the equipment user should include information on how to contact the equipment
supplier in case of EHS issues related to the equipment.
15.2 The documents provided to the equipment user should include an explanation of how the user may keep the
supplier notified of the appropriate user contact information for EHS related issues and notified of what supplier
equipment models are in use at which user locations.
15.3 When supplier contact information changes for EHS issues or the supplier wishes to communicate regarding
EHS issues, the supplier should notify equipment users through their most recently provided EHS contacts. Which
contacts are notified may depend on which equipment models are of concern.
SEMI S13-0305 © SEMI 1998, 2005 7
16 Related Documents
16.1 International SEMATECH
4
01104197AXFR — Guidelines for Environmental Characterization of Semiconductor Equipment
4 SEMATECH, 2706 Montopolis Drive, Austin, TX, website: http://www.sematech.org
SEMI S13-0305 © SEMI 1998, 2005 8
APPENDIX 1
DOCUMENT CRITERIA RELATING TO SEMI S2
NOTICE: The material in this Appendix is an official part of SEMI S13 and was approved by full letter ballot
procedures on November 24, 2004.
NOTE 1: Documentation criteria described in §A1-2 regarding safety interlock systems are part of conformance criteria to this
guideline.
A1-1 Purpose of this Appendix
A1-1.1 This appendix contains criteria for documents that relate to technical criteria that are presented in SEMI S2.
A1-1.2 The criteria in this appendix are not included in SEMI S2 as of the time this Appendix was written, but are
included herein as criteria for determining whether the documents provided to the equipment user conform to SEMI
S13.
A1-1.3 The criteria in this appendix were included in SEMI S13-0298.
A1-1.4 The criteria in this appendix are arranged to correspond with the sections of SEMI S2.
NOTE 1: It was the intent of the Task Force responsible for SEMI S13 that the criteria in this appendix be incorporated in a
future revision of SEMI S2 and that this appendix be removed from SEMI S13 by revising SEMI S13 with the same effective
date as the effective date of the addition of these criteria to SEMI S2.
A1-2 Safety Interlock Systems
A1-2.1 The equipment supplier should describe the safety interlock systems provided for the equipment and their
operation in a list or similar format in the documents provided to the equipment user. Each interlock system
description should include at least the hazard for which the interlock system is provided, the detection methods
utilized, and equipment condition after the interlock system is activated.
A1-2.2 The locations of safety interlock sensors (e.g. door switches, pressure sensors, gas detectors) should be
clearly indicated using a layout sketch.