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SEMI E42-0704 © SEMI 1995, 2004 45 verification , or that have bee n requested to be discarded without storage after verification , may be rem oved from this area more easily when it is separate. A recipe temporarily pla…

SEMI E42-0704 © SEMI 1995, 2004 44

Attribute Name Definition Access Rqmt Form Default Value

UD * Non-standard attribute defined by

supplier or user. Asterisk indicates

the part of the attribute name that is

provided in this definition. Shall be

preserved exactly, except by the

entity that defined it.

RO N Varies with definition.

Text form is limited to

80 characters.

6.4 Default Namespace — The default namespace is a dedicated centralized namespace (see Section 4.4) that is

used for all agent-specific recipes. A recipe executor that uses agent-specific recipes, such as thermocouple

calibration tables, shall be provided with a namespace for such recipes. Equipment that may be operated in a stand-

alone mode, and that requires agent-specific recipes, shall also provide a local namespace to be used for this

purpose. A single namespace shall be used to satisfy both requirements.

The recipe executor shall provide a user-settable attribute DefaultNamespace

that contains the name of the default

namespace. The default namespace shall be available on power-up for stand-alone operation. For executing agents

intended to operate only in a supervised configuration, such as cluster process modules, the default namespace may

be provided by the supervisor.

A recipe in a default namespace is referenced within a recipe body by specifying a namespace named “Default”.

This allows controlled specification by namespace role for hardware-specific recipes.

6.5 Recipe Storage — Discussion of types of storage used by the recipe executor is provided to clarify terminology.

Storage is generally assumed to consume space in some form, and the amount of space available for recipes is

assumed to be finite, so that adding recipes reduces the amount of space available and deleting recipes increases the

amount of space available. These assumptions are based on current technologies and are not requirements.

The recipe executor may have one or more types of storage area for recipes, shown in Figure 6.3. The storage area

used for the current process cycle is called the recipe execution area. This is the minimum storage capacity

required. Executable copy recipes in the recipe execution area may or may not be transformed for execution

purposes but shall retain the attributes of the execution recipe. The recipe execution area shall be protected from all

inadvertent and unintentional change, including change resulting from transferring a recipe to or from a recipe

namespace or from editing a recipe.

Figure 6.3

Object Model for Recipe Executor

Extra storage area, for additional recipes that are not

currently selected, when provided, is called the

execution recipe storage.

A separate intermediate area for temporary storage of

unverified downloaded recipes may also be provided.

This area is the verification area. The separation of

this area provides protection for the executable copy

recipes and the execution recipes. Recipes that fail

SEMI E42-0704 © SEMI 1995, 2004 45

verification, or that have been requested to be discarded

without storage after verification, may be removed from

this area more easily when it is separate.

A recipe temporarily placed in a verification area shall

be immediately either discarded or else moved to

execution recipe storage following a successful

verification.

The term stored recipes in this section refers to recipes

in execution recipe storage.

The storage areas of the recipe executor may or may

not be volatile. The verification area, recipe execution

area, and the execution recipe storage are not required

to be physically separate, so long as recipes in each

logical area are protected from change caused by

activities in the other areas.

6.6 Change Control — Storage provided by the recipe

executor is intended as temporary, and only minimum

management capability is required, such as the ability

to rename or delete recipes.

Some recipe executors may choose to provide

additional capabilities, such as the ability to create new

recipes, to edit existing recipes, to build a compressed

derived object form recipe, to modify existing recipes

through the execution process itself, and/or to save the

last value used for variable parameter settings. Certain

restrictions apply to these activities. Each different

capability provided for creating and changing recipes

shall be explicitly documented by the supplier.

In general, change is controlled by the user through the

attribute ExecChgCtrl

. ExecChgCtrl specified four

separate types of control related to change, including

permission to subsequently select or re-select a changed

recipe and a requirement that the originating recipe be

notified of all protected changes to the recipe.

The recipe executor is prohibited from setting the

Linked

attribute of any recipe to TRUE.

The recipe executor is responsible for ensuring the

uniqueness of the identifiers of the recipes that it stores.

Detailed requirements governing the creation of new

recipes and the changes protected by ExecChgCtrl

are

defined in Section 11.

6.6.1 Recipe Creation — Certain recipe executors may

be able to create recipes. This capability is allowed to

cover the hardware-dependent recipes and the provision

of editing services. Mechanisms for creating and

changing recipes are beyond the scope of RMS. Change

notification is required for all newly created recipes.

6.6.2 Recipe Compression — A source form recipe

may be compressed to obtain a derived object form

recipe, described in Section 3.2.2.1.2. This is not

considered as a newly created recipe, as the source form

and derived object form recipes achieve the identical

process results. For this reason, most of the attributes of

the source form recipe, including the Linked

and

ExecChgCtrl

attributes, are passed to the derived object

form. A change notification requirement for the source

form recipe extends to the derived object form as well,

including notification when the derived object form is

built. Requirements for the derived object form recipe

are defined in detail in Section 11.2.2.1.

6.6.3 Changes to Stored Recipes — The recipe

executors may be able to change an existing recipe by

changing its body. Certain hardware-dependent recipes

may sometimes be changed by, or as a result of, the

execution process itself. Recipes also may be changed

through an editing activity, including interactive

“teach” and automated “self-teach” operations provided

by some systems. Except where expressly granted

permission to change an existing recipe through the

ExecChgCtrl

attribute, the bodies of all recipes in

storage shall be protected from change. This is not the

same as the write-protection of the namespace in that

execution recipes may be deleted and renamed by an

authorized user and by the manager of the originating

namespace.

Depending upon the value of the ExecChgCtrl attribute

of the recipe, permission to change the execution recipe

(stored in the execution recipe storage) is granted or

denied in advance and allows case-by-case granularity.

Unless explicitly granted permission, a changed recipe

may not be subsequently selected or re-selected.

Purposeful change during the execution process for

hardware-dependent recipes is included in the

ExecChgCtrl

attribute permission to change the recipe

body. For example, furnaces may be able to update a

“profile recipe” during a normal process cycle. Recipes

changed purposefully by the execution process are

assumed to represent the best, most up-to-date, and

most valid version of a hardware-dependent class of

recipe. Suppliers of recipe executors with this

capability shall provide complete documentation of the

class of recipe changed and the circumstances under

which it is changed.

The ExecChgCtrl

attribute of a recipe may require that

the originating namespace be notified of change.

Change notification consists of a notification message

sent to the originating namespace that alerts the

namespace manager that a recipe has been changed or

originated. Where change notification is required

through ExecChgCtrl, the namespace manager is

responsible for subsequently uploading the recipe,

assigning it a new identifier if necessary, and requesting

the renaming of the execution recipe as necessary to

remain synchronized.

SEMI E42-0704 © SEMI 1995, 2004 46

6.6.4 Last Value — Some recipe executors may also

want to save the last value set by the user for each

variable parameter and use it as the new initial value of

that parameter when the same recipe is rerun.

This is useful when internal conditions drift in a

consistent manner over time, the parameters are

occasionally modified to compensate for such drift, and

the last setting used is, therefore, a better “default” than

the one specified in the recipe itself.

Permission to save the last value may be expressly

granted by the user in the recipe attribute ExecChgCtrl

Care should be taken to prevent unintentional

modifications.

6.7 Production — Equipment utilizations states are

defined by SEMI E10 (Standard for Definition and

Measurement of Equipment Reliability, Availability,

and Maintainability (RAM)). These states include the

PRODUCTIVE and STANDBY states used by the

factory for normal production work. The attributes

ProdApprove

and ProdCertify are defined as required

only for equipment supporting states defined in this

document.

To ensure that only recipes authorized for production

are executed while the executing agent is in the

PRODUCTIVE state, or are selected while in the

STANDBY state, the authorized user may set the

values of the attributes ProdApprove

and/or ProdCertify

to non-zero values. Non-zero values in ProdApprove

ProdCertify

represent minimums for a recipe's

ApprovalLevel

and Certified attributes, respectively.

The recipe executor is responsible for comparing the

corresponding recipe attributes ApprovalLevel

and

Certified

. When a recipe is selected for execution

(implicitly or explicitly) while either of the

PRODUCTIVE or STANDBY states is active, the

value of ApprovalLevel

is required to be equal to or

greater than the value in ProdApprove

, and the value in

Certified

is required to be equal to or greater than the

value in ProdCertify

. Otherwise, the select shall fail.

6.8 Recipe Executor Attributes — The recipe executor

is owned by the agent that provides a recipe execution

resource. The recipe executor in turn owns the recipes

that it has stored. It shall support Object Services for its

owned object types and for itself.

Table 6.2 defines the attributes of the recipe executor in

alphabetical order.

Table 6.2 Recipe Executor Attribute Definition

Attribute Name Definition Access Rqmt Form

ObjType The object type. RO Y Text = "RcpExec"

ObjID Text. RO Y Text.

DefaultNamespace The name of an executing agent’s namespace

used for all hardware-dependent and other

agent-specific recipes.

RW Y Text.

ProdApprove The minimum value of a recipe’s approval

level accepted during productive and standby

states. Required for SEMI E10 support only.

RW N Unsigned integer.

ProdCertify The minimum value of a recipe’s certification

level accepted during productive and standby

states. Required for SEMI E10 support only.

RW N Unsigned integer.

RunCycleUnit The process unit on which the calculation of the

estimated value of the recipe generic attribute

EstRunTime is based.

RO N Case-sensitive formatted text

composed of a unit of

measure and an optional

numeric suffix. Compliant

with SEMI E5, Section 9.

RecipeSelectID A list of recipe identifiers for the currently

selected recipes.

RO Y List of formatted text.

RecipeSelect-

Parameters

A list of all parameter definitions in effect for

the i

recipe identifier in RecipeSelectID. The

maximum value for i is determined by the

equipment supplier as the maximum number of

recipes which may be selected at the same time.

Required if variable parameters are supported.

RO N List of structures composed

of parameter name, parameter

value, parameter restriction.