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SEMI D17-0200 © SEMI 1998, 2000 3 float surface are located on the botto m of the cassette and mat e with the tw o v-rail rollers an d one float surface roller, respectively, mounted on the tool interface. T he f acial d…

SEMI D17-0200 © SEMI 1998, 2000 2

side of the carrier (where substrates are removed or

inserted) and is perpendicular to the bilateral datum

plane. On tool load ports, it is also parallel to the load

face plane (as defined in SEMI E15) on the side of the

tool where the carrier is loaded and unloaded.

5.14 first nominal substrate height — the distance (z5)

from the horizontal datum plane to the first nominal

substrate seating plane.

5.15 first substrate end-effector clearance — the

distance (dimension z9) between the top of the cassette

bottom domain and the first nominal substrate seating

plane.

5.16 horizontal datum plane — loa d height as defined

in SEMI E15.

5.17 mizo plate — a plate that contains mizo teeth and

may provide structure to the cassette.

5.18 mizo teeth — elements that sup port the substrates

in the cassette.

5.19 nominal center line — the inte rsection of the

facial and bilateral datum planes.

5.20 nominal substrate seating plane — a horizontal

plane that contains the nominal bottom surface of the

substrate as it rests on the mizo teeth.

5.21 optical substrate sensing paths — lines of sight

for optically sensing the positions of the substrates.

5.22 polystyrene latex sphere (PSL) — Reference

material used to calibrate surface inspection systems.

5.23 robotic handling flanges — projections on the

cassette for handling of the cassette.

5.24 substrate extraction volume — the open space for

extracting a substrate from the cassette.

5.25 substrate pick-up zone — the space that includes

the volume in which the substrate bottom may be

found.

5.26 substrate pitch — the distance between adjacent

nominal substrate seating planes.

6 Requirements

6.1 Physical Protection of Substrate

6.1.1 No chipping, scratching, or oth er damage shall

occur under normal handling and shipping conditions.

6.1.2 Substrates shall be contained t o prevent excess

movement during shipment.

6.2 Provisions for Tracking and Identification —

Provision for a printed label should be made.

6.3 Thermal Requirements — Construction materials

shall withstand cleaning temperatures of 90ºC,

following which the cassette shall meet the dimensional

and other requirements of this specification.

6.4 Loading/Unloading of Substrates

6.4.1 Cassettes furnished to this spe cification must be

compatible with manual and automated loading/

unloading systems, while minimizing cassette volume.

6.4.2 Such cassettes must also facili tate transfer of

substrates to and from, a Transportation/Automation

Cassette.

6.5 Cassette Physical Alignment In terface — The

cassette should be registered to the tool interface by one

of the three following registration types, A, B, or C.

The locations of the registration features have been

chosen such that all three types may coexist on the

same cassette.

6.5.1 Cassette Physical Alignment Interface Type A —

This interface consists of three features (not specified,

but recommended to be inverted V-shaped grooves)

placed on the bottom of the cassette that mate with

three coupling pins located on the tool interface. The

coupling pins are located by dimensions x14 and y13

relative to the bilateral and facial datum planes

respectively.

6.5.1.1 Coupling Pin Shapes — The p hysical

alignment mechanism on the bottom of the wafer

carrier consists of features (not specified in this

standard) that mate with three pins underneath. As

shown in Figure 5 and defined in Table 3, each pin is

radially symmetric about the vertical center axis line

and can be seen as the intersection of a cylinder of

diameter d1 and a sphere of radius r3 (which might

contact a flat plate). An additional rounding radius r5

provides contact with angled mating surfaces, and blend

radii r4 and r6 smooth the resulting edges. The final

roughness height of the overall surface finish must be

less than or equal to r7. Dimensions r2 and z13 have

zero tolerance because they only give a distance to

another toleranced dimension. (Dimensions in

parenthesis are not part of the requirements in this

standard but are intended to clarify the preparation of

manufacturing instructions.)

6.5.1.2 The three features on the botto m of the cassette

that mate with the coupling pins must provide a lead-in

capability that corrects a cassette misalignment of up to

10 mm (0.4 in.) in any horizontal direction, although 15

mm (0.6 in.) is recommended. The exclusion zones for

the three coupling features on the cassette are shown in

Figure 3 and Table 1 and specified by dimensions x14,

z9 and r1.

6.5.2 Cassette Physical Alignment Interface Type B —

This interface consists of three features, a v-rail, float

surface, and facial datum plane v-groove. The v-rail and

SEMI D17-0200 © SEMI 1998, 20003

float surface are located on the bottom of the cassette

and mate with the two v-rail rollers and one float

surface roller, respectively, mounted on the tool

interface. The facial datum plane v-groove is located

about the facial datum plane through the bottom surface

of the cassette and mates with the facial datum plane

lock pin located on the tool interface shown in Figure 3.

The v-rail roller and the float surface roller are located

by dimensions x15 and x16 relative to the bilateral

datum plane, respectively, shown in Figure 6. The

dimensiona relative to the facial datum plane for the v-

rail rollers are not specified but recommended to be

located furthest from and symmetrical about the facial

datum plane as shown in Figures 3 and 6. The float

surface roller revolute axis must lie on the facial datum

plane.

6.5.2.1 The v-rail and float surface rollers are defined

in Figure 7 and Table 4. Each roller is radially

symmetric about the revolute axis. The rollers are

circumferentially radiused of dimension r8. The

diameter of the rollers is not specified, but the

tangential surface created by dimension r8 must lie on

the horizontal datum plane. The facial datum plane lock

pin radius is equal to r8 and must be positioned into the

facial datum plane v-groove to fully constrain the

cassette to the facial datum plane. The facial datum

plane lock pin is translated out of the facial datum plane

v-groove to allow the cassette to be rolled in and out of

the tool interface. Although only three rollers are

specified, it is recommended to increase the total

number of rollers so that the cassette is fully supported

while being loaded and unloaded to the tool interface.

All rollers, except for the v-rail and float roller, must be

positioned so that the tangent of the r8 dimension lies

below the horizontal datum plane.

6.5.2.2 The three features on the botto m of the cassette

that mate with the rollers and lock pin must provide a

lead-in capability that corrects a cassette misalignment

of up to 10 mm (0.4 in.) in any horizontal direction,

although 15 mm (0.6 in.) is recommended. The v-rail

and facial datum plane v-groove are not specified but

recommended to be inverted v-shaped grooves. The v-

rail is recommended to extend the full length of the

cassette from the cassette front to the cassette rear. The

float surface is not specified but recommended to be a

flat surface extending the full length of the cassette

from the cassette front to the cassette rear. The

exclusion zones for these features are shown in Figures

3 and 6 and specified by dimensions x15 and x16

through x22.

6.5.3 Cassette Physical Alignment Interface Type C —

To be developed.

6.6 Conveyor Rails — If the cassette is to be

transported on roller conveyors, each conveyor rail

should extend the maximum distance from front to

back. The exclusion zones for conveyor rails are shown

in Figures 3 and 6 and specified by dimensions x13 and

x22 and extend to the outer boundary of the cassette.

6.7 Conveying Surface — If the cassette is to be

transported on roller conveyors that support the entire

bottom of the cassette, the bottom surface excluding the

v-rail, v-groove, and float roller zones is to be used.

The location of this surface with respect to the

horizontal datum plane is specified by dimension z3.

6.8 Substrate Orientation — The s ubstrates must be

horizontal when the carrier is placed on the coupling.

6.9 Cassette Sides and Rear — Fig ure 2 shows a top

view of the boundaries of the cassette side domains

(which contain the parts of the cassette higher than z4

above the horizontal datum plane and lower than z9

above the top substrate). Table 1 defines the dimensions

shown in this and following figures.

6.10 Cassette Top — The boundaries of the cassette

top domain contain any part of the cassette hither than

z9 above the top substrate.

6.11 Cassette Bottom — Figure 3 shows a bottom

view of the boundaries of the cassette bottom domain

(which contains any part of the cassette lower than z4

above the horizontal datum plane). When the cassette is

fully down, the cassette placement sensing pads must

be z2 above the horizontal datum plane.

6.12 Vertical Dimensions

6.12.1 Figure 4 shows the vertical dimensions of the

left half of the cassette as viewed from the rear. Note

that z5 (the height of the bottom nominal substrate

seating plane above the horizontal datum plane) and z8

(the distance between adjacent nominal substrate

seating planes) are given as reference dimensions with

no tolerance. This means that the sum of actual height

variations in the cassette from the horizontal datum

plane to the mizo tooth or slot holding each substrate

must be contained within the tolerance of z6 with no

further stack-up at each higher substrate.

6.12.2 The open space for the substrate extraction

volume is indicated by dimensions x6 and y7 and is

symmetric about the bilateral and facial datum planes,

respectively. The top of the extraction volume is z7

above the nominal substrate seating plane and its

bottom is half of the minimum z7 dimension above the

nominal substrate seating plane. The cassette must give

extra horizontal clearance once the substrate is picked

up from wherever it ends up (within the bounds of the

substrate pick-up volume) after transport in the cassette.

6.12.3 The open space for the substrate set-down

volume is indicated by dimensions x5 and y6 and is

symmetric about the bilateral and facial datum planes,

respectively. The top of this volume is half of z7 above

the nominal substrate seating plane and its bottom is z6

above the nominal substrate seating plane. The

substrate should be placed within the bounds of the

substrate set-down volume to avoid touching the edge

of the substrate to the side of the cassette.

6.12.4 The substrate pickup zone is defined by an area

indicated by dimensions x5 and y5 and is symmetric

about the bilateral and facial datum planes,

respectively. Its top and bottom are the upper and lower

tolerance of z6 around the nominal substrate seating

plane. If a substrate is placed in the substrate set-down

volume and is then pushed to the rear of the cassette,

then the entire bottom of the substrate must be

contained in the substrate pick-up zone.

6.13 Particle Generation — The cassette will not add

more than 0.05 particles/cm

of a size ≥ 0.5 µm (PSL

equivalent) per substrate pass per shipping cycle. The

shipping cycle is to be defined by the customer.

6.14 Inner and Outer Radii — All concave features

may have as much as a 1 mm (0.04 in.) radius to allow

for cleaning and to prevent contaminant build-up. All

required convex features (such as the robotic handling

flanges and the corners of the cassette top and bottom

domains) must also have a minimum radius of 1 mm

(0.04 in.) to prevent large stress contacts of the cassette

that might cause wear and particles.

6.15 Dimensional Tolerances — Width (W), Length

(L), and Height (H): ± 5 mm

6.16 Special Design Features

6.16.1 Compatible with automated cl eaning tools.

6.16.2 External features that are comp atible with

material handling systems such as, but not limited to,

Guided Vehicles, Stocker, and Conveyors.

Table 1 Cassette Registration Type A Coupling Pin Dimensions

Symbol

Used

Shown In Dimensions Description Algebraic Relation or Value

d1 Figure 5 diameter of pin centered on the center axis line = 12 ± 0.05 mm

(0.4724 ± 0.002 in.)

r2 Figure 5 radial distance from the center axis line to the origin of shoulder

radius r5

= 6 mm

(0.2362 in.)

r3 Figure 5 radial distance from the intersection of the center axis line and z13 to

the top of the pin

= 15 ± 0.05 mm

(0.5906 ± 0.002 in.)

r4 Figure 5 blend radius for the intersection of r3 and r5 = 2 ± 0.1 mm

(0.0787 ± 0.004 in.)

r5 Figure 5 radial distance from the intersection of the horizontal datum plane

and r2 to the far shoulder of the pin

= 15 ± 0.05 mm

(0.5906 ± 0.002 in.)

r6 Figure 5 blend radius for the intersection of r5 and d1 = 2 ± 0.1 mm

(0.0787 ± 0.004 in.)

r7 Figure 5 roughness (R

) as defined in ISO 4287

0.30 µm (12 µin.) max.

z13 Figure 5 vertical distance from the horizontal datum plane to the origin of top

radius r3

= 2 ± 0 mm

(0.08 in.)

Table 2 Cassette Registration Type B Roller Pin Dimensions

Symbol

Used

Shown In Dimensions Description Algebraic Relation or Value

r8 Figure 7 radius about roller circumference revolved about the revolute axis = 4.8 ± 0.12 mm

r9 Figure 7 radius of roller measured from the tangential surface created by r8 to

the revolute axis

≥ 20 ± 0.12 mm