semi合集-English.pdf - 第5678页
SEMI P10-0705 © SEMI 1990, 2005 173 ! START_CD 1 CD_DATA 1.250 CD_DIGITIZED T CD_TONE_CLEAR T CD_TARGET 1.300 CD_ORIENTATION HORIZONTAL CD_REFERENCE_ONLY F CD_TOLERANCE .12 CD_RANGE .12 NUMBER_OF_CDS 4 CD_LOCATION -53448…
SEMI P10-0705 © SEMI 1990, 2005 172
SURF_INSP_PATTERN_SIDE .75
!
!
INSPECT_THROUGH_PELLICLE T
!
START_DEFECT_DEFINITION 2
DIE_TO_DIE_INSPECTION T
DEFECT_SIZE 1.50
DEFECT_COUNT 0
DATABASE_INSPECTION T
END_DEFECT_DEFINITION 2
!
QUALITY_GROUP_ID Q1
PACKAGE COMPACT PART NUMBER
!
END_MASK M222
!
!
CELL_ID TC
END_CELL_OPTIONS TC
!
PATTERN_GROUP_INSTANCE PRIMARY
START_PLACEMENT 1
LOCATION 0.000, 0.000
STEPPING_DISTANCE 0, 0
STEPPING_COUNT 1, 1
END_PLACEMENT 1
END_PATTERN_GROUP_INSTANCE PRIMARY
!
PATTERN_GROUP_INSTANCE CLEAR_BOX
START_PLACEMENT CBP1
LOCATION 33000, -33000
STEPPING_DISTANCE 0, 0
STEPPING_COUNT 1, 1
END_PLACEMENT CBP1
!
START_PLACEMENT CBP2
LOCATION -33000, 33000
STEPPING_DISTANCE 0, 0
END_PLACEMENT CBP2
STEPPING_COUNT 1, 1
END_PATTERN_GROUP_INSTANCE CLEAR_BOX
!
PATTERN_GROUP_INSTANCE FID
START_PLACEMENT FP1
LOCATION 60000, 60000
STEPPING_DISTANCE 0, 0
STEPPING_COUNT 1, 1
END_PLACEMENT FP1
END_PATTERN_GROUP_INSTANCE FID
!
END_CELL TC
!
!
PATTERN_GROUP_ID PRIMARY
END_PATTERN_GROUP_OPTIONS PRIMARY
!
LEVEL_ID M111
PATTERN_NAME FILESNAME.01
START_PATTERN_OPTIONS 1PPO
PATTERN_ADDRESS_SIZE 0.25
DIGITIZED_DATA_DARK F
SEMI P10-0705 © SEMI 1990, 2005 173
!
START_CD 1
CD_DATA 1.250
CD_DIGITIZED T
CD_TONE_CLEAR T
CD_TARGET 1.300
CD_ORIENTATION HORIZONTAL
CD_REFERENCE_ONLY F
CD_TOLERANCE .12
CD_RANGE .12
NUMBER_OF_CDS 4
CD_LOCATION -53448.100, -43783.375
CD_LOCATION -53448.100, 55576.625
CD_LOCATION -49070.125, -53343.000
CD_LOCATION -49070.125, 47017.000
CD_FEATURE TUNING FORK
END_CD 1
END_PATTERN_OPTIONS 1PPO
END_PATTERN_DEFINITION M111
!
LEVEL_ID M222
PATTERN_NAME FILESNAME.02
START_PATTERN_OPTIONS 2PPO
PATTERN_ADDRESS_SIZE 0.25
DIGITIZED_DATA_DARK T
!
START_CD 1
CD_DATA 2.25
CD_DIGITIZED T
CD_TONE_CLEAR T
CD_TARGET 2.30
CD_ORIENTATION HORIZONTAL
CD_REFERENCE_ONLY F
CD_TOLERANCE .12
CD_RANGE .12
NUMBER_OF_CDS 4
CD_LOCATION -33448.100, -53783.375
CD_LOCATION -33448.100, 45576.625
CD_LOCATION -39070.125, -13343.000
CD_LOCATION -39070.125, 27017.000
CD_FEATURE L BAR
END_CD 1
END_PATTERN_OPTIONS 2PPO
END_PATTERN_DEFINITION M222
!
END_PATTERN_GROUP PRIMARY
!
!
PATTERN_GROUP_ID CLEAR_BOX ! Only for Mask M111
END_PATTERN_GROUP_OPTIONS CLEAR_BOX
!
LEVEL_ID M111
PATTERN_NAME FILESNAME.03
START_PATTERN_OPTIONS 1CPO
PATTERN_ADDRESS_SIZE 0.25
DIGITIZED_DATA_DARK F
END_PATTERN_OPTIONS 1CPO
END_PATTERN_DEFINITION M111
!
END_PATTERN_GROUP CLEAR_BOX
!
PATTERN_GROUP_ID FID
SEMI P10-0705 © SEMI 1990, 2005 174
PATTERN_ADDRESS_SIZE 0.25
END_PATTERN_GROUP_OPTIONS FID
!
LEVEL_ID M111
PATTERN_NAME FILESNAME.04
START_PATTERN_OPTIONS 1CPO
DIGITIZED_DATA_DARK F
END_PATTERN_OPTIONS 1CPO
END_PATTERN_DEFINITION M111
!
LEVEL_ID M222
PATTERN_NAME FILESNAME.04
START_PATTERN_OPTIONS 2CPO
DIGITIZED_DATA_DARK T
END_PATTERN_OPTIONS 2CPO
END_PATTERN_DEFINITION M222
!
END_PATTERN_GROUP FID
!
!
END_MASK_GROUP G5555
END_MASK_SET S55555
END_ORDER O555555
CHECKSUM 118