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SEMI F97-0305 © SEMI 2005 5 6.1.2 Figure 2 depicts typical examples of Facility Pack age Units. Fac i lit y Monit o r i n g and Co nt r o l S y s t e m Clea nr oom E l ectrical Building s y st em s HVA C C h illed w a te…

SEMI F97-0305 © SEMI 2005 4

 FMCS Level: consists of the FMCS,

 FPU Control Level: consists of the FPU that are monitored and controlled by the FMCS, and

 FPU Field Level: consists of the hardware components to monitor and control the FPUs. A subcontrol level

within the level of the FPU may or may not be present depending on the complexity of the functions to be

performed.

FMCS

HVAC

FPU 1 FPU 2

...

FPU n

FMCS Level

FPU

Control

Level

FPU

Field

Level

I/O

ERP / MES Level

ERP

MES …

FMCS

HVAC

FPU 1

Ultra Pure Water

FPU 2

...

FPU n

FMCS Level

FPU

Control

Level

FPU

Field

Level

I/O

ERP / MES Level

I/O

Subcontrol level

Subordinated

unit n

I/O

ERP

MES …

Figure 1

Facility System

SEMI F97-0305 © SEMI 2005 5

6.1.2 Figure 2 depicts typical examples of Facility Package Units.

Facility Monitoring and

Control System

Cleanroom

Electrical

Building systems

HVAC

Chilled water

Exhaust

Hot water

Fire protectionCompressed air

Ultra pure water

Chemicals

Gases

Waste water treatment

...

Life safety

Facility Monitoring and

Control System

Cleanroom

ElectricalElectrical

Building systems

HVAC

Chilled water

Exhaust

Hot waterHot water

Fire protectionFire protectionCompressed airCompressed air

Ultra pure water

ChemicalsChemicals

GasesGases

Waste water treatment

......

Life safetyLife safety

Figure 2

Typical Examples of Facility Package Units

6.1.2.1 Description of Figure 2.

 Building systems — facility installation concerning the building, e.g. lighting.

 Chemicals — facility installation for the supply of chemicals, e.g. for process tools.

 Chilled water system — facility installation for the supply of cold water, e.g. for air condition or process tools.

 Cleanroom — production area with clean conditions and specifications concerning air condition.

 Compressed air — facility installation for the supply of compressed air.

 Electrical — facility installation for the electrical power supply.

 Exhaust — facility installation for the disposal of gases and contaminated air.

 Fire protection — facility installation for fire protection, e.g. for fire and smoke detection.

 Gases — facility installation for the supply of bulk or special gases, e.g. for process tools.

 Hot water — facility installation for the supply of hot water, e.g. for radiators, air condition or process tools.

 HVAC — facility installation for heating, ventilation and air conditioning.

 Life safety — facility installation for life safety and security, e.g. for detection of leakages of gases.

 Ultra pure water — facility installation for the supply of ultra pure water, e.g. for process tools.

 Waste water treatment — facility installation for the treatment of waste water.

7 Ordering Information

7.1 When integrating FPUs into a FMCS, suppliers and purchasers have to agree on details on how the integration

will be performed. This includes a number of items such as the information to be exchanged between FMCS and

FPUs, the communication protocol to be used

, or details of the available FPU subcontrol level. Other parties such

as fab planners or system integrators may be involved in this information exchange. Related Information 2 provides

a template for the ordering information and examples for its use.

8 Conventions

8.1 This standard follows the conventions for state model methodology and service definitions as defined by other

SEMI standards supplemented by specific extensions. The conventions used in this standard are described in the

following paragraphs.

8.2 State Model Methodology

8.2.1 This document uses the state model methodology as defined within SEMI E30 to describe the behavior of

FPUs. A state model is comprised of the following elements:

 definitions of each state and sub state,

 a diagram of the states and the transition between states, and

 a state transition table.

8.2.2 The diagram of the state model uses the Harel State Chart notation

8.3 Notion of Alarm-Mode, Warning-Mode, Error-Mode — Signifies the importance of the situation that occurred at

the FPU to draw attention at the FMCS. Error-Mode is generally used to signify an error. This error may be

persistent for some time until the error situation is corrected. Warning-Mode may be used to signal a higher

awareness that is to be raised at the FMCS. Again, attention may be needed to correct the problem. Alarm-Mode

signals the highest awareness required and may again need some attention for correction. The use of which mode is

used when and where is intentionally left to the agreement between the purchaser and the supplier. It is

recommended to use always the same philosophy for use of these three modes for the entire facility when possible.

8.4 Transition Tables

8.4.1 Transition Tables are provided in conjunction with the state diagrams to explicitly describe the nature of each

state transition. A transition table contains columns for transition number, previous state, trigger, new state, actions

and a remark. The trigger for the transition occurs while in the previous state. The actions include a combination of

actions taken upon exit of the previous state and actions taken upon entry into the new state.

Number Previous

State

Trigger New

State

Actions Remark

8.5 Operation Representation

8.5.1 Operations are used to describe interfaces between different resources (e.g. interfaces between FMCS and

FPUs). An operation definition table defines the specific set of operations for a specific resource as shown in the

following table:

Operation Description

8.5.2 Operation — Defines the operation name. The operation name has to be unique for each given resource.

8.5.3 Description — Gives a short comprehensive description of the operation with regard to functionality.

2 As an example, OPC Data Access combined with the agreed communications protocol may be used for interconnecting FMCS and FPUs.

3 Harel, D., "Statecharts: A Visual Formalism for Complex Systems", Science of Computer Programming 8 (1987), p. 231-274