semi合集-English.pdf - 第4227页

SEMI F74-1103 © SEMI 2002, 2003 14 NOTE 1: Leak test port(s) and porting are depen den t on seal system/substrat e design configuration. NOTE 2: Material of Construction: 316SS. NOTE 3: Drawing scale is not specified. Fi…

SEMI F74-1103 © SEMI 2002, 2003 13

FACE SEAL

NOTE 1: Leak test port(s) and porting are dependent on seal system/substrate design configuration.

NOTE 2: Material of Construction: 316SS.

NOTE 3: Drawing scale is not specified.

Figure R1-3b

1.125” Surface-Mount Performance Testing Fixture

SEMI F74-1103 © SEMI 2002, 2003 14

NOTE 1: Leak test port(s) and porting are dependent on seal system/substrate design configuration.

NOTE 2: Material of Construction: 316SS.

NOTE 3: Drawing scale is not specified.

Figure R1-3c

1.125” Surface-Mount Performance Testing Fixture

SEMI F74-1103 © SEMI 2002, 2003 15

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacture' s instructions, product labels, product data sheets, and other relevant

literature, respecting any materials or equipment mentioned herein. These standards are subject to change without

notice.

By publications of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.