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SEMI F22-1102 © SEMI 1997, 2002 3 6 Bulk Gas Distribution Sy stems 6.1 Cryogenic Li quid Supply (see Figu re 1) Figure 1 Bulk Gas (Cryogenic) Supply System Flow Chart

SEMI F22-1102 © SEMI 1997, 2002 2

around gas distribution systems and components are

used to detect potentially unnoticeable releases at

extremely low levels.

5.2.11 low temperature sensing device — a component

which protects the system downstream of the vaporizer

from cryogenic temperatures by initiating an alarm or

triggering a valve shut-down.

5.2.12 nitrogen generation plant — a system which,

generally through cryogenic distillation, separates and

purifies nitrogen from ambient air. Other air separation

techniques may be used but are not considered in this

document.

5.2.13 point of connection (POC) — is often used

interchangeably with POU, indicating the final

connection between the system and the process tool.

5.2.14 point of use (POU) — is often used

interchangeably with POC, indicating the final

connection between the system and the process tool.

5.2.15 pressure relief valve — a device which, at a

given design pressure set point, releases gas pressure to

prevent system over-pressurization.

5.2.16 pressure transducer — a component which

mechanically or electrically senses the pressure within a

gas system and transmits a signal to a readout or a

control device.

5.2.17 process gas panel — a subsystem, generally

contained within a gas cabinet, that delivers process gas

from the cylinder to the specialty gas distribution

system.

5.2.18 purifier — generally a catalytic, resinous, or

diatomaceous material within a pressure vessel which

removes particulate and/or trace gas impurities from a

gas stream.

5.2.19 regulator — generally a mechanical device

which alters the pressure within a gas system.

5.2.20 segregation — a practice in design and

operation to prevent non-compatible gases from co-

mingling.

5.2.21 tube trailer — a bulk gas supply system which

manifolds high pressure, DOT-specified, vessels

(cylindrical tubes) on a portable trailer.

5.2.22 vacuum generator — a component in a process

gas panel which, via a suction created by an inert gas

venturi, allows for evacuation of the gas system to

levels of 16.7 kPa (25" mercury) or less.

5.2.23 valve manifold box (VMB) — a gas distribution

subsystem designed to allow the distribution of a single

process cylinder gas to multiple process tools. Its

manifold design uses a series of valves (manual or

AOV), regulators, filters, and vacuum generator(s), and

may be controlled manually or automatically.

5.2.24 vaporizer — a component which, through heat

transfer, is designed to convert a cryogenic liquid to a

gas.

6 Bulk Gas Distribution Systems

6.1 Cryogenic Liquid Supply (see Figure 1)

Figure 1

Bulk Gas (Cryogenic) Supply System Flow Chart

Regeneration

Figure 1

Bulk Gas (Cryogenic) Supply System Flow Chart (cont.)