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SEMI E87-0705 © SEMI 1999, 2005 41 18.7 Carrier O pened Event 18.7.1 If the carrier is equipped with a door, an e vent sha ll be gen erated when a carrier door has been opened. 18.7.2 Data required to be available for th…

SEMI E87-0705 © SEMI 1999, 2005 40

18.3.2 This event shall be generated when the access by the equipment to the carrier is approaching complete. How

the timing of the event is determined shall be configurable.

18.3.3 Detailed definition of the event timing depends upon the type of usage of the carrier. Some examples of

event timing for different types of usage are shown below.

18.3.3.1 PRODUCT — When remaining time until the carrier starts moving from internal FIMS to internal buffer

reaches the configurable variable time (internal buffer equipment only).

18.3.3.2 DUMMY — When remaining times until substrates of the carrier becomes not reusable reaches the

configurable variable times.

18.3.3.3 TEST — When remaining substrates until the carrier becomes empty reaches the configurable variable

number.

18.3.3.4 REJECT — When remaining slots until the carrier becomes full reaches the configurable variable number.

18.3.4 Suppliers shall document the interpretation and the configurable variable(s) in the equipment specification

document.

18.3.5 Data required to be available for this event report:

 CarrierID

18.4 Carrier Clamped Event

18.4.1 An event shall be generated whenever a carrier is clamped. Clamped means the load port has engaged a

device that would inhibit removal or movement of the carrier by any entity external to the load port. Some load

ports may include more than one clamping device. This event should be generated only when the first clamping is

engaged. This applies to all load ports.

18.4.2 There is no standard for when load ports clamp a carrier. Therefore the IC makers host systems and

personnel will need some signal from the equipment to know if a carrier is clamped. This event provides that signal.

This applies to all load ports that provide clamping. If a load ports does not clamp the carrier no event is required.

18.4.3 Data required to be available for this event report:

 Port ID,

 Carrier ID (if available), and

 Location ID.

18.5 Carrier Closed Event

18.5.1 If the carrier is equipped with a door, an event shall be generated when a carrier door has been closed.

18.5.2 Data required to be available for this event report:

 CarrierID,

 LocationID, and

 PortID (if valid).

18.6 Carrier Location Change Event

18.6.1 An event shall be generated whenever a carrier has changed location. This applies to both load ports,

substrate ports, and internal buffer locations.

18.6.2 Data required to be available for this event report:

 CarrierID,

 LocationID (new destination location), and

 CarrierLocationMatrix.

SEMI E87-0705 © SEMI 1999, 2005 41

18.7 Carrier Opened Event

18.7.1 If the carrier is equipped with a door, an event shall be generated when a carrier door has been opened.

18.7.2 Data required to be available for this event report:

 CarrierID,

 LocationID, and

 PortID (if valid).

18.8 Carrier Unclamped Event

18.8.1 An event shall be generated whenever a carrier is unclamped. Unclamped means that the load port has

disengaged any devices that would inhibit removal or movement of the carrier by any entity external to the load

port. Some load ports may include more than one clamping device. This event should be generated only when all

clamping or locking devices are disengaged.

18.8.2 There is no standard for when load ports unclamp a carrier. Therefore the IC makers host systems and

personnel will need some signal from the equipment to know if a carrier is unclamped. This event provides that

signal. This applies to all load ports that provide clamping and unclamping. If a load ports does not clamp and

unclamp the carrier no event is required.

18.8.3 Data required to be available for this event report:

 Port ID,

 Carrier ID (if available), and

 Location ID.

18.9 CarrierID Read Fail Event

18.9.1 An event shall be generated when the equipment attempts to read a carrierID and fails at a port in the NOT

ASSOCIATED STATE.

18.9.2 Data required to be available for this event report:

 PortID

18.10 ID Reader Available Event

18.10.1 An event shall be generated whenever an id reader becomes available. This applies to all load ports.

18.10.2 Data required to be available for this event report:

 Port ID

18.11 ID Reader Unavailable Event

18.11.1 An event shall be generated whenever an id reader becomes unavailable for any reason. This applies to all

load ports.

18.11.2 Data required to be available for this event report:

 Port ID

18.12 UnknownCarrierID Event

18.12.1

An event shall be generated when a carrier arrives at a “NOT ASSOCIATED” load port where the

CarrierID reader is unavailable.

18.12.2 Data required for this event report:

 Port ID

18.12.3 Equipment shall wait for a “ProceedWithCarrier” or “CancelCarrier” service before initiating any action.

SEMI E87-0705 © SEMI 1999, 2005 42

18.12.4 If a ProceedWithCarrier service is received from the host by the equipment the carrier object is instantiated

via transition 4 in the Carrier State Model.

18.12.5 If a CancelCarrier service is received, the equipment uses the host provided CarrierID to instantiate the

carrier object via transition 5, associates the carrier to the load port and prepares carrier for unload.

19 Variable Data

19.1 The purpose of this section is to define the list of variable data requirements for CMS equipment. Values of

these variables are available to the host via collection event reports and host status queries. Some of the data items

listed are valid for internal buffer production equipment only, and are marked as such.

19.2 Variable Data Definitions

19.2.1 The following table defines variable data that shall be provided by the production equipment. Also, for the

objects defined by Carrier Management, the identifier of that object and all of the attributes of that object shall be

available for inclusion in event reports associated with that object. Subscripted variables are used either as items

within a list or to differentiate data representing different entities. Subscripted variables are always valid.

Table 37 Variable Data Definitions

Variable Name Description Type Acc

ess

Comment

AccessMode The access mode of the loadport. Enumerated:

MANUAL, AUTO

AccessMode

The access mode for the i

load

port.

Enumerated:

MANUAL,

AUTO

AvailPartitionCapacity The current available buffer

capacity for a logical partition

inside internal buffer equipment

(PartitionCapacity - # of carriers

in partition).

Non-negative integer RO Only applicable to internal

buffer production equipment.

AvailPartitionCapacity

The AvailPartitionCapacity for the

PartitionID within the internal

buffer.

Non-negative integer RO Only applicable to internal

buffer production equipment.

BufferCapacityList The current PartitionType,

AvailPartitionCapacity, and

PartitionCapacity for all logical

buffer partitions.

List of n groups of items

1. BufferPartitionInfo

n. BufferPartitionInfo

RO Only applicable to internal

buffer production equipment.

BufferPartitionInfo The related information for a

logical buffer partition.

Structure of 5 items

PartitionID

PartitionType

AvailPartitionCapacity

PartitionCapacity

UnallocatedPartitionCapacity

RO Only applicable to internal

buffer production equipment.

BufferPartitionInfo

The related information for the i

buffer partition.

Structure of 5 items

PartitionID

PartitionType

AvailPartitionCapacity

PartitionCapacity

UnallocatedPartitionCapacity

RO Only applicable to internal

buffer production equipment.

BypassReadID Enables or disables automatic ID

acceptance when the carrier ID

reader is unavailable.

Boolean. RW If TRUE, the ID provided

with Bind is used

automatically.