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SEMI F68-1101 © SEMI 2001 5 8.3.7.2 When the im p ur ity lev el is i n th e ra ng e of th e APIMS or ultratrace analytical instrumentation, Close V13 and Open V12. Close V 9 and V10, O p en V11. 8.3.7.3 Mo nitor impurity…

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SEMI F68-1101 © SEMI 2001 4
8.2.2.4 Data collection equipment is used to gather
output from the ultratrace analytical instrumentation.
8.2.2.5 All instruments used should be calibrated
regularly, according to manufacturer specifications.
8.2.3 Test Setup and Schematic
8.2.3.1 Assemble the test setup according to Figure 1.
For a large scale system which may include
components such as flow meters, pressure regulation
and indication, and bypass loops around the purifying
media(s), the test setup may be modified accordingly in
order to use these built in attributes while adhering to
the procedural steps. Do not install the DUT until a
purge flow is established through MFC1.
8.2.3.2 Pure gas is blended with challenge gas to create
a test gas mixture containing approximately 1–10 ppm
of gaseous impurities.
8.2.3.3 The DUT is connected, purged per the
manufacturer’s recommendation, positioned with the
appropriate attitude (if required by the manufacturer),
and heated (if required by manufacturer) under pure gas
flow.
8.2.3.4 Challenge gas flow is introduced and the
impurity analyzer measures the impurity levels. If
appropriate, the APIMS or other ultratrace analytical
instrumentation may be used to measure the test gas
while the test gas bypasses the DUT. See Section 9 on
Exposure Precautions.
8.2.3.5 Measure and record the test gas concentration
for the desired impurity.
8.2.3.6 Instantaneous impurity efficiencies may be
calculated at any point by knowing the level of each
impurity entering and exiting the purifier.
8.3 Test Procedures — Refer to Figure 1.
8.3.1 Use of the impurity analyzer is recommended to
protect the APIMS or other ultratrace analytical
instrumentation from impurity spikes which may harm
the instrument. The test may be conducted without the
impurity analyzer at the risk of such spikes.
8.3.2 Analytical Instrumentation Setup
8.3.2.1 Set up and calibrate the analytical
instrumentation (APIMS or ultratrace analytical
instrumentation and impurity analyzer) according to
manufacturer specifications. This includes but is not
limited to establishing the appropriate flow rates to the
instruments.
8.3.2.2 Acquire zero data to establish the
instrumentation baseline and stability prior to starting
the test.
8.3.3 Establish flow of pure gas through the manifold
bypass:
8.3.3.1 Start with all valves closed except purge gas to
analytical instrumentation (V11 and V13 open).
8.3.3.2 Open V1 and adjust R1 to the suggested
operating pressure range of 275–415 kPa (40–60 psig).
8.3.3.3 Open V2, V8, V9 and adjust R3 to provide
appropriate backpressure for operation of the APIMS or
other ultratrace analytical instrumentation. R3 will vent
excess gas providing the volume challenge to the DUT.
Set MFC1 to the appropriate flow rate.
8.3.4 Monitor drydown of the manifold bypass:
8.3.4.1 Close V11 and Open V10.
8.3.4.2 Purge the bypass manifold until the impurity
level is in the range of the APIMS or ultratrace
analytical instrumentation.
8.3.4.3 Close V13 and Open V12.
8.3.4.4 Purge the bypass manifold until the moisture
impurity level at the APIMS or ultratrace analytical
instrumentation is below 1.0 ppb.
8.3.5 Re-isolate the APIMS or ultratrace analytical
instrumentation:
8.3.5.1 Close V12 and Open V13. Close V10 and open
V11. Maintain a constant purge to the analytical
instrumentation.
8.3.6 Install the DUT, purging with Pure Gas (may not
be necessary, as installed in the test set-up for large
scale systems):
8.3.6.1 Open V6. Remove the DUT (purifier) inlet
face-seal connection. Quickly install the DUT inlet.
Remove the DUT outlet face-seal connection and install
the DUT outlet. Open V7.
8.3.6.2 Isolate the manifold bypass, directing all flow
through the DUT, close V8 and V9.
8.3.6.3 Adjust R1 and R3 until P1 measures the stated
purifier operating pressure.
8.3.6.4 Purge the DUT (purifier) per the
manufacturer’s recommendation. If required, heat the
DUT (purifier) per manufacturer’s recommendation.
8.3.7 Monitor the impurity level at the outlet of the
DUT until stable:
8.3.7.1 Initial impurity monitoring may be done with
the impurity analyzer. Close V12, Open V9 and V10.
Close V11.
SEMI F68-1101 © SEMI 20015
8.3.7.2 When the impurity level is in the range of the
APIMS or ultratrace analytical instrumentation, Close
V13 and Open V12. Close V9 and V10, Open V11.
8.3.7.3 Monitor impurity level until stable.
8.3.8 Initiate Impurity Challenge:
8.3.8.1 Isolate the DUT and APIMS or ultratrace
analytical instrumentation. Close V7 and V12, open
V13.
8.3.8.2 Open V3 and adjust R2 to the suggested
operating pressure range of 275–415 kPa (40–60 psig).
Open V5 and set MFC2 to the desired flow. (See
Appendix 1 to determine the desired flow for MFC2).
8.3.8.3 Verify test gas impurity. Close V5 and V11,
Open V4, V8, and V10 supplying test gas to the
impurity analyzer. Monitor test gas impurity until
stable and verified to theoretical impurity value (See
Appendix 1).
8.3.8.4 Initiate test. Isolate impurity analyzer, Close
V8 and V10, Open V11. Input test gas through the
DUT to the APIMS or ultratrace impurity analyzer,
Open V6 and V7. Close V13 and Open V12.
8.3.8.5 Monitor and record the outlet impurity level
until stable.
8.3.8.6 If necessary, repeat the test for a different
challenge gas mixture.
8.3.9 Determination of instantaneous purifier
efficiency:
8.3.9.1 The test may be done on newly activated media
or may be done using existing media that has been
regenerated. The test may be destructive to the DUT
(purifier).
8.3.9.2 Repeat the test as necessary to provide a
statistically valid number of test results. A discussion
of what is statistically valid is beyond the scope of this
document.
9 Exposure Precautions
9.1 The APIMS or ultratrace analytical instrument
should not be exposed to high levels of impurities.
After installation of the purifier, it should be purged
well, per the manufacturer’s recommendation. A
typical recommendation might be to purge a minimum
of 150 bed volumes before directing the flow to the
APIMS.
9.2 Alternative instrumentation should be used to
measure the challenge gas when the concentration of
the challenge gas is greater than the normal calibration
range of the APIMS or other ultratrace analytical
instrumentation.
10 Calculation of Instantaneous Purifer
Efficiency
10.1.1.1 Use the following formula to calculate the
Instantaneous Purifier Efficiency:
1001% ×
÷
÷
ø
ö
ç
ç
è
æ
−=
impurityinlet
impurityoutlet
eff
Example: Let impurity outlet = 10 ppb and impurity
inlet = 10 ppm,
9.99100
000,10
10
1% =×
÷
ø
ö
ç
è
æ
−=eff
11 Reporting Results
11.1 The following test conditions should be reported:
11.1.1 Date and time of test,
11.1.2 Operator,
11.1.3 Pure gas flow rate (slpm),
11.1.4 Challenge gas flow rate (sccm),
11.1.5 Test pressure kPa (psig or psia),
11.1.6 DUT operating temperature (° C),
11.1.7 Purifier manufacturer, model, and serial
number, and volume,
11.1.8 Ultratrace analytical instrumentation used,
11.1.9 Test gas impurities and levels (Table 1), and
11.1.10 Calibration certificates for the mass flow
devices, pressure gauges and ultratrace analytical
instrumentation.
12 Related Documents
SEMI F30 — Start-up and Verification of Purifier
Performance Testing for Trace Gas Impurities and
Particles at an Installation Site.
SEMI F43 — Test Method for Determination of
Particle Contribution by Point-Of-Use Purifiers.
NOTE 2: Unless otherwise indicated, all documents cited
shall be the latest published versions.
SEMI F68-1101 © SEMI 2001 6
Purge Gas
DUT
Pure Gas
(>9N Purity)
APIMS
or
Ultratrace
Analytical
Instrumentation
Impurity Analyzer
P1
Legend
DUT = Device Under Test
P1 = Test Pressure
R1 = Pure Gas 0–100 psig Regulator
R2 = Challenge Gas 0–100 psig Regulator
R3 = Vent Gas 0–100 psig Back Pressure Regulato
r
V1 = Pure Gas Source Isolation Valve
V2 = Pure Gas System Isolation Valve
V3 = Challenge Gas Source Isolation Valve
V4 = Challenge Gas System Isolation Valve
V5 = Challenge Gas Vent Isolation Valve
Challenge Gas
(~1% Impurity)
V4
V5
V6 V7
V8
V9
Vent
V10
V11
MFC1
R1
V1
V2
R3
V
6 = DUT Inlet Isolation Valve
V7 = DUT Outlet Isolation Valve
V8 = DUT Bypass Inlet Isolation Valve
V9 = DUT Bypass Outlet Isolation Valve
V10 = Impurity Analyzer Sample Isolation Valve
V11 = Impurity Analyzer Purge Gas Isolation Valve
V12 = APIMS/UAI Sample Isolation Valve
V13 = APIMS/UAI Purge Gas Isolation Valve
MFC1 = Pure Gas Mass Flow Controller
MFC2 = Challenge Gas Mass Flow Controller
V13
V12
MFC2
R2
V3
Figure 1
Suggested Point of Use Purifier Efficiency Test Setup
Table 1 Efficiency Of DUT Parameters
EFFICIENCY OF DUT
Impurity Pure Gas Flow Challenge Flow Inlet Conc Outlet Conc Zero Gas Analyzer
(slpm) (sccm) (ppm) (ppb) (ppb)
CH
4
H
2
O
2
N
2
CO
2
NMHC