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SEMI T12-0305 © SEMI 2004, 2005 43 RELATED INFORMATION 3 AN EXAMPLE ON EQUIPMENT WITH SECS-II, GEM AND OSS NOTICE: This related information is not an official part of SEMI T12 and was derived fro m the work of the origin…

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SEMI T12-0305 © SEMI 2004, 2005 42
RELATED INFORMATION 2
AN EXAMPLE ON EQUIPMENT WITH SECS-II AND GEM
NOTICE: This related information is not an official part of SEMI T12 and was derived from the work of the
originating task force. This related information was approved for publication by full letter ballot procedures on
January 9, 2004.
R2-1 GEM Level Example
R2-1.1 This example is a possible implementation of attachment tracking capabilities “Acquisition of Minimum
Tracking Information” and “Action on Expiration” with SEMI E5 (SECS-II) and SEMI E30 (GEM).
R2-1.2 Great many equipment and production lines adopt GEM level implementation around the world because it
was standardized more than ten years ago and was the only unified communication standard between equipment and
factory host computer for long period.
R2-2 Example Scenario
R2-2.1 An example scenario consists of setting up expiry, tracing data of an attachment and hitting expiration.
Host
Equipment
S2F15 (ECS)
or S2F41 (HCS)
S2F16 (ECA)
or S2F42
(
HCA
)
Settin
g
Ex
p
iration
A
cknowled
g
e
S6F11
(
ERS
)
S6F12
(
ERA
)
Acknowled
g
e
C
y
cle Increment
S6F11
(
ERS
)
S6F12
(
ERA
)
Acknowled
g
e
Use-Time Increment
S6F11
(
ERS
)
S6F12
(
ERA
)
Acknowled
g
e
Expired and
Equipment Stops
S5F1
(
ARS
)
S5F2
(
ARA
)
Acknowled
g
e
A
larm Raised
S5F1
(
ARS
)
S5F2
(
ARA
)
Acknowled
g
e
A
larm Cleared
Figure R2-1
SEMI T12-0305 © SEMI 2004, 2005 43
RELATED INFORMATION 3
AN EXAMPLE ON EQUIPMENT WITH SECS-II, GEM AND OSS
NOTICE: This related information is not an official part of SEMI T12 and was derived from the work of the
originating task force. This related information was approved for publication by full letter ballot procedures on
January 9, 2004.
R3-1 Example with GEM plus OSS
R3-1.1 This example is a possible implementation of attachment tracking capabilities “Acquisition of Minimum
Tracking Information”, “Action on Expiration” and “Identification and Verification of Attachments” with SEMI E5
(SECS-II), SEMI E30 (GEM) and SEMI E39 (OSS).
R3-1.2 Object base system modeling and OSS has been recognized recently by equipment users especially in 300
mm fabs as handy tools to access data on equipment because the allows accessing unit by object rather than all
values or just one data.
R3-2 Example Scenario
R3-2.1 An example scenario consists of verification of attachment/setting up expiry, tracing data of an attachment
and hitting expiration.
R3-2.2 Verification of Attachment/Setting up Expiry
Host
Equipment
S14F9 (COR)
S14F10 (COA)
Sendin
g
Invoice
A
cknowled
g
e
S6F11
(
ERS
)
S6F12
(
ERA
)
Acknowled
g
e
Invoice object has
been created
S6F11
(
ERS
)
S6F12
(
ERA
)
Acknowled
g
e
Secondment object
has been created
A
n attachment
has arrived
Equipment verifies
and it is ri
g
ht one.
Expiry objects has
been created, using
Invoice information
S14F19
(
GSR
)
S14F20
(
GSA
)
Acknowled
g
e
update:
(
De
p
loied
)
HistoryBuffer object
has been created
Figure R3-1
SEMI T12-0305 © SEMI 2004, 2005 44
R3-2.3 Tracing Data of an Attachment and Hitting Expiration
Host
Equipment
S14F19
(
GSR
)
S14F20
(
GSA
)
Acknowled
g
e
update:
(use-time increment)
S14F19
(
GSR
)
S14F20
(
GSA
)
Acknowled
g
e
update:
(
Ex
p
iration event
)
S6F11
(
ERS
)
S6F12
(
ERA
)
Acknowled
g
e
Equipment Stops
because expired
S5F1
(
ARS
)
S5F2
(
ARA
)
Acknowled
g
e
A
larm Raised
S5F1
(
ARS
)
S5F2
(
ARA
)
Acknowled
g
e
A
larm Cleared
S14F19
(
GSR
)
S14F20
(
GSA
)
Acknowled
g
e
update:
(
C
y
cle Increment
)
S6F11
(
ERS
)
S6F12
(
ERA
)
Acknowled
g
e
Exception object
has been created
Figure R3-2
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