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SEMI E133-0705 © SEMI 2004, 2005 2 NOTICE: This standard does not purport to address sa fety issu es, if any, associated w ith its use. It is the responsibility of th e users of this standard to establish appropriate saf…
SEMI E133-0705 © SEMI 2004, 2005 1
SEMI E133-0705
PROVISIONAL SPECIFICATION FOR AUTOMATED PROCESS
CONTROL SYSTEMS INTERFACE
This provisional specification was technically approved by the global Information & Control Committee.
This edition was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005.
It was available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published
March 2004; previously published November 2004.
1 Purpose
1.1 In order to more efficiently facilitate the integration of Process Control Systems (PCS) such as run-to-run (R2R)
control, fault detection (FD), fault classification (FC), fault prediction (FP), statistical process control (SPC), etc.
into current and future fabs, there is a need to define interfaces for Process Control Systems that enable them to
interact effectively and share data 1) among themselves and 2) with the other interdependent factory systems
(including equipment data collection). This standard is intended for use by equipment suppliers, semiconductor
manufacturers, equipment subsystem suppliers and control system suppliers who will utilize the PCS standards in
future developed products.
2 Scope
2.1 This standard focuses on defining PCS capabilities, functional groups, and functional group interfaces. The
standard is structured so that new functional groups can be added to the standard through future balloting. The
components in this document include:
Definitions of key terms and concepts pertinent to this domain,
Description of the specification conventions used,
Identification of the major functional groups within the scope of PCS,
Description of the capabilities expected in each functional group (required and optional), and
Definition of interfaces for these functional groups, including:
Data that is available across these interfaces. This includes the interface data descriptions (inputs and
outputs). Future enhancements to this specification will include detailed data structures in the form of
inheritance and aggregation models that are common to all PCS functional groups, as well as specific
models for each,
Services supported and Interface behavior assumed, and
Description of an approach for compliance verification testing.
2.2 The specific format and protocol implementation of these interface specifications, which are technology
specific, will be delineated in supporting “dot” specifications to this standard. As an example a possible format is
XML (which would include data type definitions and metamodel schemas).
2.3 In addition to the information embodied in this standard, the PCS TF will describe a validation process
(prototyping) for the standard to identify and address real implementation issues as early as possible; results of this
work will be included in future versions.
2.4 The provisional status of this specification will be removed when the following enhancements are added:
Interface data structures and services specifications for the R2R, FD, FC, FP and SPC functional groups, and
Additional compliance verification procedures for the R2R, FD, FC, FP and SPC functional groups.
2.5 Note that conformance with this standard as defined in §11 is not enforceable until the complete data structures
have been defined for at least one functional group.
SEMI E133-0705 © SEMI 2004, 2005 2
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 The proposed PCS standards will not focus on:
Low-level communication mechanisms (for example, hardware connection schemes, transport layer software,
etc.) between PCS functional groups,
Methodology for implementing actual equipment or factory level control strategies,
Specifying internal structure or implementation methods of PCS functional groups,
Capabilities of complementary applications (recipe management, data collection, engineering analysis, data
storage, scheduling, change control, …),
The management of information and collaboration between functional groups. This is left to implementation,
Communications within equipment or within factory systems,
Determination of the proper control algorithm, model, or runtime selectable behavior. It is optional for a PCS
function to contain “context matching”,
The creation and management of Process Control System Jobs, or
Defining test procedures required for validating the standard.
4 Referenced Standards and Documents
4.1 SEMI Standards
SEMI E81 — Provisional Specification for CIM Framework Domain Architecture
SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications
SEMI E125 — Provisional Specification for Equipment Self Description (ESD)
SEMI E134 — Specification for Data Collection Management
4.2 Other Sources
The Unified Modeling Language Reference Manual, James Rumbaugh, Ivar Jacobson, Grady Booch, 1999 / 0-201-
30988-X / Addison Wesley Professional.
The Unified Modeling Language User Guide, Grady Booch, James Rumbaugh, Ivar Jacobson, 1999 / 0-201-57168-4
/ Addison Wesley Professional.
Object-Oriented Modeling and Design, Prentice Hall, Englewood Cliffs, NJ, 1991 by James Rumbaugh, et. al.
Equipment Engineering Capabilities (EEC) Guidelines (Phase 2.0), Version 2.5, International SEMATECH, July
2002.
IEC 61158-5, “Digital data communications for measurement and control – Fieldbus for use in industrial control
systems – Part 5: Application layer service definition,” Final Draft International Standard, 2003.
ISO 8601 — Data elements and interchange formats—Information interchange—Representation of dates and times,
International Organization for Standardization, (December 2000).
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations & Acronyms
5.1.1 XML — eXtensible Markup Language
SEMI E133-0705 © SEMI 2004, 2005 3
5.2 Definitions
5.2.1 Advanced Process Control (APC)
1
— the manufacturing discipline for applying control strategies and/or
employing analysis and computation mechanisms to recommend optimized machine settings and detect faults and
determine their cause.
5.2.2 Analysis Engine (AE) — a process that utilizes data and possibly operational instructions to produce a
response. In the context of this standard, this term is used to encompass the characteristics common to all PCS
functional groups.
5.2.3 context — a series of attributes that uniquely identifies a manufacturing entity (e.g., wafer, lot, module, tool,
reticle) and its status in the manufacturing operation.
5.2.4 Context Matching (CM) — the process of comparing and matching the values of a set of attributes that
represent the state of a system (e.g., process, product and equipment) to a set of stored or computed values. This is
usually done so that a unique action can be specified by the context matching system.
5.2.5 Fault Classification (FC) — the technique of determining the cause of a fault once it has been detected.
5.2.6 Fault Detection (FD) — the technique of monitoring and analyzing variations in tool and/or process data to
detect anomalies. Fault detection includes both univariate and multivariate statistical analysis techniques.
5.2.7 Fault Detection and Classification (FDC) — combination of FD & FC.
5.2.8 Fault Prediction (or Prognosis) (FP) — the technique of monitoring and analyzing variations in process data
to predict anomalies.
5.2.9 Functional Group (FG) — a collection of closely related software capabilities that one would expect to be
provided as an integrated product.
5.2.10 Process Control System Job (PCSJob) — a unit of work that could be tracked and have data associated with
it. In the context of this standard a process control system job is associated with a unit of work that a PCS Analysis
Engine performs; a unique identifier such as an ID number is often utilized to track the process control system job.
5.2.11 Process Control System (PCS)
1
— a system capable of performing Process Control, which includes one or
more of R2R Control, FD, FC, FP, SPC, or any future Process Control functionality defined in this standard for a
PCS functional group.
5.2.12 Run-to-Run (R2R) Control — the technique of modifying recipe parameters or the selection of control
parameters between runs to improve processing performance. A “run” can be a batch, lot, or an individual wafer.
5.2.13 Statistical Process Control (SPC) — the technique of using statistical methods to analyze process or product
metrics to take appropriate actions to achieve and maintain a state of statistical control and continuously improve the
process capability.
6 Background
6.1 With the development of process control system applications at the factory level and inside the equipment, it is
now apparent that the lack of interface standards for these applications has inhibited widespread adoption of process
control at the factory level. Moreover, adding process control and integrated metrology capabilities inside the tool
requires the ability for the factory level applications to collaborate with tool level applications.
7 Conventions
7.1 This section defines conventions followed in this document.
7.2 Object Modeling
7.2.1 Unified Modeling Language (UML) — This specification uses UML notation for all class diagrams and for
object diagrams provided as examples. No other types of diagrams are used in this specification.
7.2.2 UML class diagrams have clearly defined meanings and are a part of this specification. Detail contained in
these diagrams is not always repeated in the text.
1 APC and PCS terms are used interchangeably in some companies. Both can be seen as the umbrella of components for process control.