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SEMI E54.15-0305 © SEMI 2005 15 9.1.2 The instance identifier of 1 through s, assig ned to an object type, refers to the possibility o f multiple instantiat ions of the object type. Refe r to Table 2 of thi s document an…

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SEMI E54.15-0305 © SEMI 2005 14
7.13 Controller Object (C) –– The presentation of the Controller (C) object instance attributes and services are as
indicated in Table 14.
Table 14 Controller-C Instance Object Attributes and Services
Controller (C)
Class ID = 39, Instance ID = 01 through q
Attributes
ID Attribute Name CDM Tag
01 Name CA1
02 Status CA2
03 Alarm Enable CA3
04 Warning Enable CA4
16 Setpoint CA16
17 ProcessVariable CA17
18 ControlVariable CA18
19 DataType CA19
20 DataUnits CA20
21 AlarmSettleTime CA21
22 AlarmErrorBand CA22
24 WarningSettleTime CA24
25 WarningErrorBand CA25
Services
ID Service Name CDM Tag
01 Reset CS1
03 Abort CS2
05 Recover CS3
25 Operate CS4
07 GetAttribute CS5
09 SetAttribute CS6
27 RestoreDefault CS7
8 Protocol Compliance
8.1 A method of testing protocol compliance is required to verify implementation conformance to the standard.
SafetyBUS p Club International e.V. has established and maintains a mechanism for compliance certification of
devices on a SafetyBus p network. This certification includes procedures and reporting mechanisms to demonstrate
conformance testing and interoperability testing of SafetyBUS p devices. The SafetyBUS p Club International e.V.
organization can be contacted at the web site http://www.safetybus.com to obtain the latest certification procedures.
9 Specific Device Model Mappings
9.1 This section provides for the mapping of network visible specific device structure and behavior, specified in a
SEMI standard SDM specification, to the SafetyBUS p network. Each subsection is devoted to a single Specific
Device Model (SDM) specification. Additional SDM mappings are added as sub-sections to this NCS specification
according to SEMI guidelines and the guidelines of the SEMI SAN Interoperability standard. Unless otherwise
noted, all attributes and services described are instance level attributes (as opposed to class level attributes).
9.1.1 Note that the formats of object instance attributes and services are detailed in the associated SDM
specification; the presentation of object attributes and services to the SafetyBUS p network is detailed in the tables
contained in the following sub-sections and in the SafetyBUS p standard specifications. Note that relationships
between object classes, including inheritance are defined in the associated SDM specification and the CDM
specification.
SEMI E54.15-0305 © SEMI 2005 15
9.1.2 The instance identifier of 1 through s, assigned to an object type, refers to the possibility of multiple
instantiations of the object type. Refer to Table 2 of this document and the CDM document for a further explanation
of object instance identifier assignments.
9.2 Specific Device Model for Mass Flow Device
9.2.1 These sections detail the network mapping required to support the Specific Device Model for Mass Flow
Device (see SEMI E54.3 ¶4.1). Table 15 summarizes the Mass Flow Device Object types. Subsequent Tables 16 to
25 details the instance attributes and services associated with each Mass Flow Device object type.
Table 15 Mass Flow Device Object Types
SDM Object
Identifier
Object
Name
SafetyBUS p Class
ID
MFD1 (DM) Device Manager 1
MFD2 (SAC) Sensor Actuator Controller 2
MFD3 Sensor-AI-MF 129
MFD4 Sensor-AI-AT 130
MFD5 Assembly-MFM 131
MFD6 Sensor-AI-Aux 132
MFD7 Actuator-AO-MF 133
MFD8 Controller 39
MFD9 Local Link 4
MFD10 SISO 134
MFD11 SISO-Setpoint 135
MFD12 Assembly-MFC 136
9.2.2 Sensor-AI-MF — The presentation of the Sensor Analog Input Mass Flow (Sensor-AI-MF) object instance
attributes and services are as indicated in Table 16.
Table 16 Sensor-AI-MF Object Instance Attributes and Services
Sensor-AI-MF
Class ID = 129, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
128 Flow Totalizer A1
129 Flow Hours A2
130 Zero Offset Mode A5
131 Zeroing Status A6
132 Autorange Status A7
Services
ID Service Name SDM Tag
129 Perform Zero Offset S1
131 Query-Supported Gas Types S2
133 Selected Programmed Gas Type S3
135 Insert Gas Type S4
137 Delete Gas Type S5
139 Get Gas Calibration Data Value S6
141 Set Gas Calibration Data Value S7
143 Autorange S8
SEMI E54.15-0305 © SEMI 2005 16
9.2.3 Sensor-AI-AT — The presentation of the Sensor Analog Input Ambient Temperature (Sensor-AI-AT) object
instance attributes and services are as indicated in Table 17.
Table 17 Sensor-AI-AT Object Instance Attributes and Services
Sensor-AI-AT
Class ID = 130, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.2.4 Assembly-MFM –– The presentation of the Assembly Mass Flow Meter (Assembly-MFM) object instance
attributes and services are as indicated in Table 18.
Table 18 Assembly-MFM Object Instance Attributes and Services
Assembly-MFM
Class ID = 131, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
9.2.5 Sensor-AI-Aux –– The presentation of the Sensor Analog Input Auxiliary (Sensor-AI-Aux) object instance
attributes and services are as indicated in Table 19.
Table 19 Sensor-AI-Aux Object Instance Attributes and Services
Sensor-AI-Aux
Class ID = 132, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.2.6 Actuator-AO-MF –– The presentation of the Actuator Analog Output Mass Flow (Actuator-AO-MF) object
instance attributes and services are as indicated in Table 20.
Table 20 Actuator-AO-MF Object Instance Attributes and Services
Actuator-AO-MF
Class ID = 133, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
128 Valve Type A1
129 Override A2